CH553258A - DEVICE FOR VACUUM EVAPORATION. - Google Patents
DEVICE FOR VACUUM EVAPORATION.Info
- Publication number
- CH553258A CH553258A CH900970A CH900970A CH553258A CH 553258 A CH553258 A CH 553258A CH 900970 A CH900970 A CH 900970A CH 900970 A CH900970 A CH 900970A CH 553258 A CH553258 A CH 553258A
- Authority
- CH
- Switzerland
- Prior art keywords
- vacuum evaporation
- evaporation
- vacuum
- Prior art date
Links
- 238000007738 vacuum evaporation Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Toxicology (AREA)
- Materials Engineering (AREA)
- Health & Medical Sciences (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE8403/69A SE345881B (en) | 1969-06-13 | 1969-06-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
CH553258A true CH553258A (en) | 1974-08-30 |
Family
ID=20273979
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH900970A CH553258A (en) | 1969-06-13 | 1970-06-15 | DEVICE FOR VACUUM EVAPORATION. |
Country Status (7)
Country | Link |
---|---|
US (1) | US3695217A (en) |
JP (1) | JPS4947631B1 (en) |
CH (1) | CH553258A (en) |
DE (1) | DE2029014C3 (en) |
FR (1) | FR2052572A5 (en) |
GB (1) | GB1318046A (en) |
SE (1) | SE345881B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0124829A1 (en) * | 1983-05-06 | 1984-11-14 | Dr. Johannes Heidenhain GmbH | Beam heating evaporation apparatus for the vapour coating of several materials |
DE102012207159A1 (en) * | 2012-04-30 | 2013-10-31 | Von Ardenne Anlagentechnik Gmbh | Apparatus for coating substrates in coating chamber with crucible system, has crucible system with unit to transmit power from drive unit to crucible outside drive chamber which is in air-tight state against coating chamber interior |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3996469A (en) * | 1975-01-06 | 1976-12-07 | Jersey Nuclear-Avco Isotopes, Inc. | Floating convection barrier for evaporation source |
US4048462A (en) * | 1975-01-17 | 1977-09-13 | Airco, Inc. | Compact rotary evaporation source |
US4091257A (en) * | 1975-02-24 | 1978-05-23 | General Electric Company | Deep diode devices and method and apparatus |
JP2913745B2 (en) * | 1990-04-10 | 1999-06-28 | 松下電器産業株式会社 | Vacuum deposition equipment |
JP2003113466A (en) * | 2001-07-31 | 2003-04-18 | Fuji Photo Film Co Ltd | Vacuum deposition apparatus |
-
1969
- 1969-06-13 SE SE8403/69A patent/SE345881B/xx unknown
-
1970
- 1970-06-11 US US45496A patent/US3695217A/en not_active Expired - Lifetime
- 1970-06-11 GB GB2834670A patent/GB1318046A/en not_active Expired
- 1970-06-12 DE DE2029014A patent/DE2029014C3/en not_active Expired
- 1970-06-13 JP JP45051456A patent/JPS4947631B1/ja active Pending
- 1970-06-15 CH CH900970A patent/CH553258A/en not_active IP Right Cessation
- 1970-06-15 FR FR7021879A patent/FR2052572A5/fr not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0124829A1 (en) * | 1983-05-06 | 1984-11-14 | Dr. Johannes Heidenhain GmbH | Beam heating evaporation apparatus for the vapour coating of several materials |
DE102012207159A1 (en) * | 2012-04-30 | 2013-10-31 | Von Ardenne Anlagentechnik Gmbh | Apparatus for coating substrates in coating chamber with crucible system, has crucible system with unit to transmit power from drive unit to crucible outside drive chamber which is in air-tight state against coating chamber interior |
Also Published As
Publication number | Publication date |
---|---|
US3695217A (en) | 1972-10-03 |
DE2029014A1 (en) | 1971-01-07 |
SE345881B (en) | 1972-06-12 |
JPS4947631B1 (en) | 1974-12-17 |
DE2029014C3 (en) | 1979-10-04 |
DE2029014B2 (en) | 1972-12-07 |
FR2052572A5 (en) | 1971-04-09 |
GB1318046A (en) | 1973-05-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |