RU2535242C2 - Устройство электросмачивания - Google Patents
Устройство электросмачивания Download PDFInfo
- Publication number
- RU2535242C2 RU2535242C2 RU2012118592/28A RU2012118592A RU2535242C2 RU 2535242 C2 RU2535242 C2 RU 2535242C2 RU 2012118592/28 A RU2012118592/28 A RU 2012118592/28A RU 2012118592 A RU2012118592 A RU 2012118592A RU 2535242 C2 RU2535242 C2 RU 2535242C2
- Authority
- RU
- Russia
- Prior art keywords
- dielectric
- wetting device
- electrode
- electrolytic solution
- acid
- Prior art date
Links
- 239000008151 electrolyte solution Substances 0.000 claims abstract description 43
- 239000012530 fluid Substances 0.000 claims abstract description 34
- 229910052751 metal Inorganic materials 0.000 claims abstract description 32
- 239000002184 metal Substances 0.000 claims abstract description 32
- 239000000203 mixture Substances 0.000 claims abstract description 29
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- 150000004706 metal oxides Chemical class 0.000 claims abstract description 26
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 4
- 238000009736 wetting Methods 0.000 claims description 88
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 claims description 45
- 238000007743 anodising Methods 0.000 claims description 44
- 238000000034 method Methods 0.000 claims description 29
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 26
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- 150000003839 salts Chemical class 0.000 claims description 7
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- 239000010936 titanium Substances 0.000 claims description 4
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- 239000001257 hydrogen Substances 0.000 claims description 3
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- 150000001642 boronic acid derivatives Chemical class 0.000 claims description 2
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- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 3
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 2
- 239000004254 Ammonium phosphate Substances 0.000 description 2
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Chemical compound CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
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- MNNHAPBLZZVQHP-UHFFFAOYSA-N diammonium hydrogen phosphate Chemical compound [NH4+].[NH4+].OP([O-])([O-])=O MNNHAPBLZZVQHP-UHFFFAOYSA-N 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 2
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- 230000035876 healing Effects 0.000 description 2
- KQNPFQTWMSNSAP-UHFFFAOYSA-N isobutyric acid Chemical compound CC(C)C(O)=O KQNPFQTWMSNSAP-UHFFFAOYSA-N 0.000 description 2
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- 150000007522 mineralic acids Chemical class 0.000 description 2
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical class [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 2
- 239000002798 polar solvent Substances 0.000 description 2
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- 238000001179 sorption measurement Methods 0.000 description 2
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- 239000010935 stainless steel Substances 0.000 description 2
- 229910001936 tantalum oxide Inorganic materials 0.000 description 2
- HPQUMJNDQVOTAZ-UHFFFAOYSA-N 2,2-dihydroxypropanoic acid Chemical compound CC(O)(O)C(O)=O HPQUMJNDQVOTAZ-UHFFFAOYSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- OXQGTIUCKGYOAA-UHFFFAOYSA-N 2-Ethylbutanoic acid Chemical compound CCC(CC)C(O)=O OXQGTIUCKGYOAA-UHFFFAOYSA-N 0.000 description 1
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- FEWFXBUNENSNBQ-UHFFFAOYSA-N 2-hydroxyacrylic acid Chemical compound OC(=C)C(O)=O FEWFXBUNENSNBQ-UHFFFAOYSA-N 0.000 description 1
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- ALRHLSYJTWAHJZ-UHFFFAOYSA-N 3-hydroxypropionic acid Chemical compound OCCC(O)=O ALRHLSYJTWAHJZ-UHFFFAOYSA-N 0.000 description 1
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- 239000005695 Ammonium acetate Substances 0.000 description 1
- BTBUEUYNUDRHOZ-UHFFFAOYSA-N Borate Chemical compound [O-]B([O-])[O-] BTBUEUYNUDRHOZ-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
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- 125000001931 aliphatic group Chemical group 0.000 description 1
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- 150000001408 amides Chemical class 0.000 description 1
- 235000019257 ammonium acetate Nutrition 0.000 description 1
- 229940043376 ammonium acetate Drugs 0.000 description 1
- 229940010556 ammonium phosphate Drugs 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000000231 atomic layer deposition Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- NGPGDYLVALNKEG-UHFFFAOYSA-N azanium;azane;2,3,4-trihydroxy-4-oxobutanoate Chemical compound [NH4+].[NH4+].[O-]C(=O)C(O)C(O)C([O-])=O NGPGDYLVALNKEG-UHFFFAOYSA-N 0.000 description 1
- 229910021538 borax Inorganic materials 0.000 description 1
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- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical compound C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
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- FGKJLKRYENPLQH-UHFFFAOYSA-N isocaproic acid Chemical compound CC(C)CCC(O)=O FGKJLKRYENPLQH-UHFFFAOYSA-N 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 125000006574 non-aromatic ring group Chemical group 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
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- 239000013307 optical fiber Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000005501 phase interface Effects 0.000 description 1
- 229920000128 polypyrrole Polymers 0.000 description 1
- LJCNRYVRMXRIQR-OLXYHTOASA-L potassium sodium L-tartrate Chemical compound [Na+].[K+].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O LJCNRYVRMXRIQR-OLXYHTOASA-L 0.000 description 1
- 229940074439 potassium sodium tartrate Drugs 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 235000019260 propionic acid Nutrition 0.000 description 1
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
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- 239000001632 sodium acetate Substances 0.000 description 1
- 235000017281 sodium acetate Nutrition 0.000 description 1
- 229960004249 sodium acetate Drugs 0.000 description 1
- 229960004599 sodium borate Drugs 0.000 description 1
- 235000011006 sodium potassium tartrate Nutrition 0.000 description 1
- 235000010339 sodium tetraborate Nutrition 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 235000000346 sugar Nutrition 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 150000008163 sugars Chemical class 0.000 description 1
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical class FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 1
- WYURNTSHIVDZCO-UHFFFAOYSA-N tetrahydrofuran Substances C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- WYXIGTJNYDDFFH-UHFFFAOYSA-Q triazanium;borate Chemical compound [NH4+].[NH4+].[NH4+].[O-]B([O-])[O-] WYXIGTJNYDDFFH-UHFFFAOYSA-Q 0.000 description 1
- BSVBQGMMJUBVOD-UHFFFAOYSA-N trisodium borate Chemical compound [Na+].[Na+].[Na+].[O-]B([O-])[O-] BSVBQGMMJUBVOD-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
- G02B26/005—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid based on electrowetting
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/06—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of fluids in transparent cells
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/12—Fluid-filled or evacuated lenses
- G02B3/14—Fluid-filled or evacuated lenses of variable focal length
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
- G09G3/3433—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/12—Function characteristic spatial light modulator
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Theoretical Computer Science (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
- Battery Electrode And Active Subsutance (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP09172296 | 2009-10-06 | ||
EP09172296.7 | 2009-10-06 | ||
PCT/IB2010/054378 WO2011042835A1 (en) | 2009-10-06 | 2010-09-29 | Electrowetting device |
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RU2535242C2 true RU2535242C2 (ru) | 2014-12-10 |
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Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2754038A1 (en) | 2009-03-13 | 2010-09-16 | Sun Chemical Corporation | Colored fluids for electrowetting, electrofluidic, and electrophoretic technologies |
JP5671026B2 (ja) * | 2009-08-04 | 2015-02-18 | サン ケミカル コーポレイション | エレクトロウェッティング及び電気流体技術用着色導電性流体 |
US9182591B2 (en) | 2009-12-16 | 2015-11-10 | University Of South Florida | System and method for electrowetting actuation utilizing diodes |
WO2011084597A2 (en) | 2009-12-16 | 2011-07-14 | University Of South Florida | Bidirectional electrowetting actuation with voltage polarity dependence |
JP5959798B2 (ja) * | 2010-10-12 | 2016-08-02 | キヤノン株式会社 | 液体レンズ及びこれを備えた機器 |
CN104603678A (zh) * | 2012-06-29 | 2015-05-06 | 庄臣及庄臣视力保护公司 | 多态电活性眼科装置 |
KR101984701B1 (ko) * | 2012-11-13 | 2019-05-31 | 삼성전자주식회사 | 전기습윤 렌즈 어레이를 포함하는 3차원 영상 디스플레이 장치 및 3차원 영상 획득 장치 |
CN103149680B (zh) * | 2013-03-28 | 2015-04-01 | 四川大学 | 一种基于电湿润效应的双路液体光开关 |
KR102227978B1 (ko) | 2014-05-22 | 2021-03-15 | 삼성전자주식회사 | 전기습윤 소자용 유체 및 이를 이용한 전기습윤 소자 |
KR102279240B1 (ko) | 2014-10-29 | 2021-07-19 | 삼성전자주식회사 | 전기습윤 소자용 유체 및 이를 포함한 전기습윤 소자 |
US20160201699A1 (en) * | 2015-01-08 | 2016-07-14 | Abl Ip Holding Llc | Generating waveforms, such as standing or propagating waves, in a multi-fluid electrowetting system |
US9841402B2 (en) * | 2015-04-15 | 2017-12-12 | Sharp Life Science (Eu) Limited | Multifunction electrode with combined heating and EWOD drive functionality |
WO2016193754A1 (en) * | 2015-06-05 | 2016-12-08 | The University Of Manchester | Electrowetting device |
CN109804295B (zh) * | 2016-07-11 | 2021-11-05 | 康宁股份有限公司 | 具有降低的色度偏差的液体透镜 |
CN106597657A (zh) * | 2016-12-05 | 2017-04-26 | 清华大学 | 基于电润湿的液态金属变焦微型反光镜 |
US10175470B2 (en) * | 2017-02-01 | 2019-01-08 | Abl Ip Holding Llc | Intelligent self-healing of electrowetting devices |
US10509238B2 (en) * | 2017-04-14 | 2019-12-17 | Verily Life Sciences Llc | Electrowetting opthalmic optics including gas-permeable components |
US10866431B2 (en) * | 2017-09-08 | 2020-12-15 | Verily Life Sciences Llc | Self healing lead wires in humid environments |
US11207686B2 (en) * | 2018-08-21 | 2021-12-28 | Sharp Life Science (Eu) Limited | Microfluidic device and methods for digital assays in biological analyses |
US11378822B2 (en) * | 2018-12-12 | 2022-07-05 | Verily Life Sciences Llc | Electrowetting ophthalmic devices with anion getter |
CN109603940A (zh) * | 2019-01-08 | 2019-04-12 | 苏州奥素液芯电子科技有限公司 | 基于铝和三氧化二铝复合电极的电润湿微流体系统 |
CN110632752A (zh) | 2019-09-27 | 2019-12-31 | Oppo广东移动通信有限公司 | 聚光板、聚光显示屏及移动终端 |
CN115166964A (zh) * | 2022-06-29 | 2022-10-11 | 合肥京东方显示技术有限公司 | 3d显示器件以及3d显示装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU817099A1 (ru) * | 1979-05-03 | 1981-03-30 | Предприятие П/Я В-8542 | Способ изготовлени пористыхМЕМбРАН |
US20080100905A1 (en) * | 2006-09-29 | 2008-05-01 | Sony Corporation | Electrowetting device and varifocal lens, optical pickup device, optical recording/reproduction device, droplet operation device, optical element, zoom lens, imaging device, light modulating |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6949176B2 (en) * | 2001-02-28 | 2005-09-27 | Lightwave Microsystems Corporation | Microfluidic control using dielectric pumping |
TW200504774A (en) * | 2003-02-10 | 2005-02-01 | Tdk Corp | Solid electrolytic capacitor and method for manufacturing the same |
JP2005136336A (ja) * | 2003-10-31 | 2005-05-26 | Tdk Corp | 固体電解質およびその製造方法、ならびに電解コンデンサおよびその製造方法 |
JP2006065045A (ja) * | 2004-08-27 | 2006-03-09 | Fuji Photo Film Co Ltd | 光学素子、レンズユニット、および撮像装置 |
JP2006285031A (ja) | 2005-04-01 | 2006-10-19 | Sony Corp | 可変焦点レンズとこれを用いた光学装置、可変焦点レンズの製造方法 |
JP2009518676A (ja) * | 2005-12-12 | 2009-05-07 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 流体フォーカスレンズにおける溶液流の防止 |
JP4894703B2 (ja) * | 2006-09-29 | 2012-03-14 | ソニー株式会社 | エレクトロウエッティング装置とこれを用いた可変焦点レンズ、光ピックアップ装置、光記録再生装置、液滴操作装置、光学素子、ズームレンズ、撮像装置、光変調装置及び表示装置 |
US8542163B2 (en) * | 2007-03-08 | 2013-09-24 | Roy J Rosser | Bistable electrowetting picture element |
DE102007018959A1 (de) * | 2007-04-21 | 2008-10-30 | Advanced Display Technology Ag | Schichtaufbau eines Elektrowetting-Systems |
GB0720484D0 (en) * | 2007-10-19 | 2007-11-28 | Seereal Technologies Sa | Cells |
-
2010
- 2010-09-29 WO PCT/IB2010/054378 patent/WO2011042835A1/en active Application Filing
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- 2010-09-29 KR KR1020187015301A patent/KR101982348B1/ko active Active
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU817099A1 (ru) * | 1979-05-03 | 1981-03-30 | Предприятие П/Я В-8542 | Способ изготовлени пористыхМЕМбРАН |
US20080100905A1 (en) * | 2006-09-29 | 2008-05-01 | Sony Corporation | Electrowetting device and varifocal lens, optical pickup device, optical recording/reproduction device, droplet operation device, optical element, zoom lens, imaging device, light modulating |
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BR112012007656A8 (pt) | 2017-10-10 |
BR112012007656A2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 2017-09-12 |
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CN102576096B (zh) | 2015-03-25 |
US20120200939A1 (en) | 2012-08-09 |
EP2486433A1 (en) | 2012-08-15 |
JP2013506881A (ja) | 2013-02-28 |
US8854739B2 (en) | 2014-10-07 |
KR20120093260A (ko) | 2012-08-22 |
EP2486433B1 (en) | 2021-03-17 |
RU2012118592A (ru) | 2013-11-20 |
WO2011042835A1 (en) | 2011-04-14 |
KR20180063362A (ko) | 2018-06-11 |
KR101982348B1 (ko) | 2019-05-24 |
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