RU2019102242A - Способ химической инфильтрации или осаждения из паровой фазы - Google Patents
Способ химической инфильтрации или осаждения из паровой фазы Download PDFInfo
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- RU2019102242A RU2019102242A RU2019102242A RU2019102242A RU2019102242A RU 2019102242 A RU2019102242 A RU 2019102242A RU 2019102242 A RU2019102242 A RU 2019102242A RU 2019102242 A RU2019102242 A RU 2019102242A RU 2019102242 A RU2019102242 A RU 2019102242A
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- silicon carbide
- gas phase
- fibrous preform
- substrate
- reagent compound
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
- C04B35/571—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained from Si-containing polymer precursors or organosilicon monomers
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/628—Coating the powders or the macroscopic reinforcing agents
- C04B35/62844—Coating fibres
- C04B35/62857—Coating fibres with non-oxide ceramics
- C04B35/6286—Carbides
- C04B35/62863—Silicon carbide
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/628—Coating the powders or the macroscopic reinforcing agents
- C04B35/62844—Coating fibres
- C04B35/62857—Coating fibres with non-oxide ceramics
- C04B35/62873—Carbon
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/71—Ceramic products containing macroscopic reinforcing agents
- C04B35/78—Ceramic products containing macroscopic reinforcing agents containing non-metallic materials
- C04B35/80—Fibres, filaments, whiskers, platelets, or the like
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
- C23C16/325—Silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/52—Constituents or additives characterised by their shapes
- C04B2235/5208—Fibers
- C04B2235/5216—Inorganic
- C04B2235/524—Non-oxidic, e.g. borides, carbides, silicides or nitrides
- C04B2235/5244—Silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/52—Constituents or additives characterised by their shapes
- C04B2235/5208—Fibers
- C04B2235/5216—Inorganic
- C04B2235/524—Non-oxidic, e.g. borides, carbides, silicides or nitrides
- C04B2235/5248—Carbon, e.g. graphite
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/52—Constituents or additives characterised by their shapes
- C04B2235/5208—Fibers
- C04B2235/5252—Fibers having a specific pre-form
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/614—Gas infiltration of green bodies or pre-forms
Claims (19)
1. Способ химической инфильтрации или осаждения из паровой фазы, включающий в себя по меньшей мере следующие стадии:
- формирование карбида кремния в порах пористой подложки или на поверхности подложки, при этом данная подложка помещена в реакционную камеру, карбид кремния формируется из газовой фазы, введенной в реакционную камеру, газовая фаза содержит соединение-реагент, которое является предшественником карбида кремния и имеет следующую формулу:
где
n является целым числом, равным 0 или 1;
m является целым числом в интервале от 1 до 3;
p является целым числом в интервале от 0 до 2, причем m+p=3; а
R представляет собой -H или –CH3,
отношение C/Si между количеством атомов углерода и количеством атомов кремния в введенной газовой фазе находится в интервале от 2 до 3.
2. Способ по п. 1, в котором R обозначает -H.
3. Способ по п. 1 или 2, в котором n равно 0.
4. Способ по любому из пп. 1-3, в котором соединение-реагент выбрано из винилхлорсилана, винилдихлорсилана, винилтрихлорсилана, винилметилмонохлорсилана и аллилтрихлорсилана.
5. Способ по п. 4, в котором соединение-реагент представляет собой винилтрихлорсилан или аллилтрихлорсилан.
6. Способ по любому из пп. 1-5, в котором газовая фаза не содержит какого-либо дополнительного углеродсодержащего соединения-реагента, отличающегося от предшественника А.
7. Способ по любому из пп. 1-6, в котором отношение C/Si равно 2 или 3.
8. Способ изготовления детали из композитного материала, содержащего матрицу, по меньшей мере частично образованную из карбида кремния, при этом данный способ включает в себя по меньшей мере следующие стадии:
- уплотнение волокнистой преформы детали, подлежащей изготовлению, матричной фазой карбида кремния путем осуществления способа по любому из пп. 1-7.
9. Способ по п. 8, в котором волокнистая преформа изготовлена из нитей керамического материала или углеродного материала.
10. Способ по п. 8 или 9, в котором волокнистая преформа изготовлена в виде единой части путем трехмерного тканья или иным образом из двухмерных слоев волокон.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1656092 | 2016-06-29 | ||
| FR1656092A FR3053360B1 (fr) | 2016-06-29 | 2016-06-29 | Procede d'infiltration ou de depot chimique en phase vapeur |
| PCT/FR2017/051712 WO2018002510A1 (fr) | 2016-06-29 | 2017-06-27 | Procédé d'infiltration ou de dépôt chimique en phase vapeur |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| RU2019102242A true RU2019102242A (ru) | 2020-07-29 |
| RU2019102242A3 RU2019102242A3 (ru) | 2020-09-11 |
| RU2738718C2 RU2738718C2 (ru) | 2020-12-15 |
Family
ID=57583144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2019102242A RU2738718C2 (ru) | 2016-06-29 | 2017-06-27 | Способ химической инфильтрации или осаждения из паровой фазы |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US11198934B2 (ru) |
| EP (1) | EP3478870B1 (ru) |
| JP (1) | JP7102355B2 (ru) |
| CN (1) | CN109415803A (ru) |
| BR (1) | BR112018077235A2 (ru) |
| CA (1) | CA3029384A1 (ru) |
| FR (1) | FR3053360B1 (ru) |
| RU (1) | RU2738718C2 (ru) |
| WO (1) | WO2018002510A1 (ru) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11472747B2 (en) * | 2019-10-08 | 2022-10-18 | Rolls-Royce High Temperature Composites Inc. | Assembly for chemical vapor infiltration of a fiber preform and method of infiltrating a fiber preform |
| FR3113496A1 (fr) * | 2020-08-21 | 2022-02-25 | Safran Ceramics | Procédé de dépôt d’un revêtement sur un fil sous champ micro-ondes |
| FR3130273B1 (fr) * | 2021-12-10 | 2023-12-15 | Safran Ceram | Procédé de fabrication d’une pièce en matériau composite SiC/SiC |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994015887A1 (en) * | 1993-01-11 | 1994-07-21 | E.I. Du Pont De Nemours And Company | Thermostructural composite articles and method for making same |
| FR2732338B1 (fr) | 1995-03-28 | 1997-06-13 | Europ Propulsion | Materiau composite protege contre l'oxydation par matrice auto-cicatrisante et son procede de fabrication |
| RU2130509C1 (ru) | 1998-01-26 | 1999-05-20 | Открытое акционерное общество Научно-производственное объединение "Композит" | Способ получения композиционного материала |
| JPH11335170A (ja) * | 1998-05-25 | 1999-12-07 | Natl Res Inst For Metals | 高強度炭化ケイ素複合材料及び製造方法 |
| FR2887601B1 (fr) | 2005-06-24 | 2007-10-05 | Snecma Moteurs Sa | Piece mecanique et procede de fabrication d'une telle piece |
| RU2394117C2 (ru) | 2008-03-24 | 2010-07-10 | Общество с ограниченной ответственностью научно-производственная фирма "Эпикрист" | Cvd-реактор и способ синтеза гетероэпитаксиальных пленок карбида кремния на кремнии |
| JP6249815B2 (ja) * | 2014-02-17 | 2017-12-20 | 株式会社Ihi | 耐熱複合材料の製造方法及び製造装置 |
| EP2933353B1 (en) * | 2014-04-17 | 2017-12-20 | Safran Ceramics | Method for producing fiber-reinforced composites |
-
2016
- 2016-06-29 FR FR1656092A patent/FR3053360B1/fr not_active Expired - Fee Related
-
2017
- 2017-06-27 EP EP17745802.3A patent/EP3478870B1/fr active Active
- 2017-06-27 JP JP2018568783A patent/JP7102355B2/ja active Active
- 2017-06-27 US US16/313,824 patent/US11198934B2/en active Active
- 2017-06-27 CA CA3029384A patent/CA3029384A1/fr not_active Abandoned
- 2017-06-27 BR BR112018077235-6A patent/BR112018077235A2/pt not_active IP Right Cessation
- 2017-06-27 CN CN201780041235.7A patent/CN109415803A/zh active Pending
- 2017-06-27 WO PCT/FR2017/051712 patent/WO2018002510A1/fr unknown
- 2017-06-27 RU RU2019102242A patent/RU2738718C2/ru active
Also Published As
| Publication number | Publication date |
|---|---|
| RU2019102242A3 (ru) | 2020-09-11 |
| JP7102355B2 (ja) | 2022-07-19 |
| BR112018077235A2 (pt) | 2019-04-02 |
| CA3029384A1 (fr) | 2018-01-04 |
| EP3478870A1 (fr) | 2019-05-08 |
| CN109415803A (zh) | 2019-03-01 |
| FR3053360B1 (fr) | 2018-07-27 |
| JP2019527294A (ja) | 2019-09-26 |
| WO2018002510A1 (fr) | 2018-01-04 |
| US20190389774A1 (en) | 2019-12-26 |
| US11198934B2 (en) | 2021-12-14 |
| FR3053360A1 (fr) | 2018-01-05 |
| RU2738718C2 (ru) | 2020-12-15 |
| EP3478870B1 (fr) | 2022-04-06 |
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