RU2018122084A - Устройство для нанесения покрытия на одну или несколько нитей методом осаждения из паровой фазы - Google Patents
Устройство для нанесения покрытия на одну или несколько нитей методом осаждения из паровой фазы Download PDFInfo
- Publication number
- RU2018122084A RU2018122084A RU2018122084A RU2018122084A RU2018122084A RU 2018122084 A RU2018122084 A RU 2018122084A RU 2018122084 A RU2018122084 A RU 2018122084A RU 2018122084 A RU2018122084 A RU 2018122084A RU 2018122084 A RU2018122084 A RU 2018122084A
- Authority
- RU
- Russia
- Prior art keywords
- zone
- gas phase
- longitudinal axis
- layer
- discharge
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/02—Layered products essentially comprising sheet glass, or glass, slag, or like fibres in the form of fibres or filaments
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/24—Deposition of silicon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
- C23C16/325—Silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
-
- D—TEXTILES; PAPER
- D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
- D04D—TRIMMINGS; RIBBONS, TAPES OR BANDS, NOT OTHERWISE PROVIDED FOR
- D04D3/00—Chenille trimmings
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06B—TREATING TEXTILE MATERIALS USING LIQUIDS, GASES OR VAPOURS
- D06B3/00—Passing of textile materials through liquids, gases or vapours to effect treatment, e.g. washing, dyeing, bleaching, sizing, impregnating
- D06B3/04—Passing of textile materials through liquids, gases or vapours to effect treatment, e.g. washing, dyeing, bleaching, sizing, impregnating of yarns, threads or filaments
- D06B3/045—Passing of textile materials through liquids, gases or vapours to effect treatment, e.g. washing, dyeing, bleaching, sizing, impregnating of yarns, threads or filaments in a tube or a groove
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
- D06M11/00—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with inorganic substances or complexes thereof; Such treatment combined with mechanical treatment, e.g. mercerising
- D06M11/73—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with inorganic substances or complexes thereof; Such treatment combined with mechanical treatment, e.g. mercerising with carbon or compounds thereof
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
- D06M11/00—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with inorganic substances or complexes thereof; Such treatment combined with mechanical treatment, e.g. mercerising
- D06M11/58—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with inorganic substances or complexes thereof; Such treatment combined with mechanical treatment, e.g. mercerising with nitrogen or compounds thereof, e.g. with nitrides
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
- D06M11/00—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with inorganic substances or complexes thereof; Such treatment combined with mechanical treatment, e.g. mercerising
- D06M11/73—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with inorganic substances or complexes thereof; Such treatment combined with mechanical treatment, e.g. mercerising with carbon or compounds thereof
- D06M11/74—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with inorganic substances or complexes thereof; Such treatment combined with mechanical treatment, e.g. mercerising with carbon or compounds thereof with carbon or graphite; with carbides; with graphitic acids or their salts
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
- D06M2101/00—Chemical constitution of the fibres, threads, yarns, fabrics or fibrous goods made from such materials, to be treated
- D06M2101/40—Fibres of carbon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Textile Engineering (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Chemical Or Physical Treatment Of Fibers (AREA)
- Yarns And Mechanical Finishing Of Yarns Or Ropes (AREA)
- Physical Vapour Deposition (AREA)
Claims (27)
1. Устройство для нанесения покрытия на одну или несколько нитей методом осаждения из паровой фазы, содержащее по меньшей мере:
- камеру обработки, образующую по меньшей мере первую зону обработки и вторую зону обработки, в которых по меньшей мере одна нить подлежит нанесению покрытия посредством метода осаждения из паровой фазы, при этом первая и вторая зоны разделены стенкой, и первая зона окружает вторую зону или расположена над второй зоной,
- систему транспортировки, выполненную с возможностью перемещения указанной по меньшей мере одной нити через первую и вторую зоны,
- первое устройство нагнетания, выполненное с возможностью нагнетания первой газовой фазы обработки в первую зону, а также первое устройство удаления, выполненное с возможностью удаления остаточной первой газовой фазы из первой зоны, и
- второе устройство нагнетания, выполненное с возможностью нагнетания второй газовой фазы обработки во вторую зону, а также второе устройство удаления, выполненное с возможностью удаления остаточной второй газовой фазы из второй зоны.
2. Устройство по п. 1, в котором первая зона простирается вдоль первой продольной оси, и в котором в первую зону выходит по меньшей мере один первый нагнетательный канал, при этом указанный первый нагнетательный канал выполнен с возможностью нагнетания по меньшей мере части первой газовой фазы в первую зону в первом направлении нагнетания, не параллельном первой продольной оси.
3. Устройство по п. 2, в котором первое направление нагнетания образует угол, составляющий от 30° до 60° с первой продольной осью.
4. Устройство по п. 1, в котором вторая зона простирается вдоль второй продольной оси, и в котором во вторую зону выходит по меньшей мере один второй нагнетательный канал, при этом указанный второй нагнетательный канал выполнен с возможностью нагнетания по меньшей мере части второй газовой фазы во вторую зону во втором направлении нагнетания, не параллельном второй продольной оси.
5. Устройство по п. 4, в котором второе направление нагнетания образует угол, составляющий от 30° до 60° со второй продольной осью.
6. Устройство по п. 1, в котором первая зона простирается вдоль первой продольной оси, и в котором первое устройство нагнетания содержит нагнетательные отверстия, выходящие в первую зону, причем эти нагнетательные отверстия смещены вдоль первой продольной оси.
7. Устройство по п. 1, в котором вторая зона простирается вдоль второй продольной оси, и в котором второе устройство нагнетания содержит нагнетательные отверстия, выходящие во вторую зону, причем эти нагнетательные отверстия смещены вдоль второй продольной оси.
8. Устройство по п. 1, в котором стенка покрыта слоем, отражающим инфракрасное излучение, имеющим средний коэффициент отражения, составляющий от 5% до 50%, в области длины волны, составляющей от 1000 нм до 8000 нм.
9. Устройство по п. 1, в котором система транспортировки содержит элемент регулирования скорости движения указанной по меньшей мере одной нити через камеру обработки.
10. Устройство по п. 1, в котором первая зона окружает вторую зону, и в котором вторая зона простирается вдоль второй продольной оси, при этом система транспортировки содержит несколько наборов направляющих элементов, расположенных в виде кольца вокруг второй продольной оси и выполненных с возможностью располагать обрабатываемые нити в окружном направлении в каждой из первой и второй зон.
11. Способ нанесения покрытия на одну или несколько нитей методом осаждения из паровой фазы с использованием устройства по любому из пп. 1-10, при этом способ включает по меньшей мере следующие стадии:
- нагнетание первой газовой фазы в первую зону и второй газовой фазы во вторую зону,
- перемещение по меньшей мере одной нити при помощи системы транспортировки через камеру обработки, во время которого:
- указанная по меньшей мере одна нить проходит либо через первую зону, либо через вторую зону, чтобы сформировать первый слой на указанной по меньшей мере одной нити посредством парофазного осаждения из первой газовой фазы или из второй газовой фазы, соответственно, и затем
- указанная по меньшей мере одна нить, покрытая первым слоем, проходит либо через вторую зону, либо через первую зону, соответственно, чтобы сформировать второй слой на указанном первом слое посредством парофазного осаждения из второй газовой фазы или из первой газовой фазы, соответственно, и
- удаление остаточной первой газовой фазы из первой зоны и остаточной второй газовой фазы из второй зоны.
12. Способ по п. 11, в котором указанная по меньшей мере одна нить перемещается непрерывно системой транспортировки через камеру обработки.
13. Способ по п. 11, в котором первый слой и/или второй слой формируют посредством химического осаждения из паровой фазы или посредством реакционного химического осаждения из паровой фазы.
14. Способ по п. 11, в котором каждый из первого и второго слоя представляет собой слой межфазного покрытия.
15. Способ изготовления детали из композиционного материала, включающий по меньшей мере следующие стадии:
- нанесение межфазного покрытия на множество нитей по меньшей мере посредством осуществления способа по п. 14,
- формирование волокнистой заготовки по меньшей мере посредством осуществления одной или нескольких текстильных операций в отношении нитей с нанесенным таким образом межфазным покрытием, и
- уплотнение волокнистой заготовки при помощи матрицы для получения детали из композиционного материала.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1561149A FR3044023B1 (fr) | 2015-11-19 | 2015-11-19 | Dispositif pour le revetement d'un ou plusieurs fils par un procede de depot en phase vapeur |
FR1561149 | 2015-11-19 | ||
PCT/FR2016/052990 WO2017085412A1 (fr) | 2015-11-19 | 2016-11-17 | Dispositif pour le revêtement d'un ou plusieurs fils par un procédé de dépôt en phase vapeur |
Publications (3)
Publication Number | Publication Date |
---|---|
RU2018122084A true RU2018122084A (ru) | 2019-12-19 |
RU2018122084A3 RU2018122084A3 (ru) | 2020-01-21 |
RU2717620C2 RU2717620C2 (ru) | 2020-03-24 |
Family
ID=55752375
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
RU2018122084A RU2717620C2 (ru) | 2015-11-19 | 2016-11-17 | Устройство для нанесения покрытия на одну или несколько нитей методом осаждения из паровой фазы |
Country Status (9)
Country | Link |
---|---|
US (1) | US10597782B2 (ru) |
EP (1) | EP3377670B1 (ru) |
JP (1) | JP6989499B2 (ru) |
CN (1) | CN108291297B (ru) |
BR (1) | BR112018010020B1 (ru) |
CA (1) | CA3005329C (ru) |
FR (1) | FR3044023B1 (ru) |
RU (1) | RU2717620C2 (ru) |
WO (1) | WO2017085412A1 (ru) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR3044024B1 (fr) * | 2015-11-19 | 2017-12-22 | Herakles | Dispositif pour le revetement d'un ou plusieurs fils par un procede de depot en phase vapeur |
KR101938874B1 (ko) * | 2016-07-20 | 2019-01-15 | 주식회사 참트론 | 고품질 그래핀 합성을 위한 열처리 장비 |
FR3075829B1 (fr) * | 2017-12-26 | 2020-09-04 | Safran Ceram | Procede et dispositif de depot d'un revetement sur une fibre continue |
WO2019188683A1 (ja) * | 2018-03-30 | 2019-10-03 | Jfeスチール株式会社 | 表面処理設備 |
FR3081172B1 (fr) * | 2018-05-18 | 2020-05-29 | Safran Ceramics | Procede de traitement de fibres en carbure de silicium par depot chimique en phase vapeur reactive |
WO2021145491A1 (ko) * | 2020-01-17 | 2021-07-22 | 엘지전자 주식회사 | 화학 기상 증착 장치 |
FR3113496A1 (fr) | 2020-08-21 | 2022-02-25 | Safran Ceramics | Procédé de dépôt d’un revêtement sur un fil sous champ micro-ondes |
FR3141700A1 (fr) * | 2022-11-08 | 2024-05-10 | Safran Ceramics | Installation d’infiltration chimique en phase gazeuse à double traitement |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3379803A (en) * | 1964-05-04 | 1968-04-23 | Union Carbide Corp | Coating method and apparatus for deposition of polymer-forming vapor under vacuum |
FR91083E (fr) * | 1964-05-08 | 1968-04-05 | Int Standard Electric Corp | Perfectionnements aux méthodes de formation de couches |
US3367304A (en) | 1967-03-13 | 1968-02-06 | Dow Corning | Deposition chamber for manufacture of refractory coated filaments |
US3908585A (en) * | 1974-04-25 | 1975-09-30 | Goodyear Tire & Rubber | Apparatus using super-heated vapor for drying solvent-treated tire cord fabric |
SU726212A1 (ru) * | 1976-07-09 | 1980-04-15 | Предприятие П/Я А-1857 | Устройство дл осаждени материалов из газовой фазы |
JPH01143106A (ja) * | 1987-11-27 | 1989-06-05 | Furukawa Electric Co Ltd:The | 酸化物超電導成形体の製造方法 |
US5322711A (en) * | 1989-07-21 | 1994-06-21 | Minnesota Mining And Manufacturing Company | Continuous method of covering inorganic fibrous material with particulates |
RU2011700C1 (ru) * | 1991-10-17 | 1994-04-30 | Государственный научно-исследовательский институт конструкционных материалов на основе графита | Устройство для нанесения тугоплавких покрытий на волокнистые материалы |
JPH05195230A (ja) * | 1992-01-14 | 1993-08-03 | Sumitomo Electric Ind Ltd | 長尺体用コーティング装置 |
JPH07197264A (ja) * | 1993-12-29 | 1995-08-01 | Tonen Corp | 繊維の表面処理方法、強化繊維及び応用 |
DE9421895U1 (de) * | 1994-11-02 | 1997-03-06 | Dresden Vakuumtech Gmbh | Einrichtung zur chemischen Abscheidung auf Fasern |
CN1203640A (zh) * | 1995-12-01 | 1998-12-30 | 纳幕尔杜邦公司 | 电容耦合的射频类金刚石碳反应器 |
US6067931A (en) * | 1996-11-04 | 2000-05-30 | General Electric Company | Thermal processor for semiconductor wafers |
KR100492769B1 (ko) * | 2001-05-17 | 2005-06-07 | 주식회사 엘지이아이 | 수직챔버를 구비한 플라즈마중합 연속처리장치 |
WO2005028741A1 (en) | 2003-09-18 | 2005-03-31 | Surface Innovations Limited | Fibrous products and methods of making and using them |
EP1640352B1 (en) * | 2004-09-28 | 2007-05-30 | General Electric Company | Low cost manufacturing process for high performance ceramic matrix composites |
WO2006094285A2 (en) | 2005-03-04 | 2006-09-08 | Global Tech International, Inc. | Surface treatment methods including metallization, apparatus for carrying out the methods, and articles produced thereby |
FR2891541B1 (fr) * | 2005-10-05 | 2008-01-11 | Snecma Sa | Procede d'enduction metallique de fibres par voie liquide |
US20070099527A1 (en) * | 2005-11-01 | 2007-05-03 | General Electric Company | Method and reactor to coat fiber tows and article |
RU2499081C2 (ru) * | 2008-03-26 | 2013-11-20 | ДжиТиЭйТи Корпорейшн | Системы и способы распределения газа в реакторе для химического осаждения из паровой фазы |
KR20100139092A (ko) * | 2008-03-26 | 2010-12-31 | 지티 솔라 인코퍼레이티드 | 금-코팅된 폴리실리콘 반응기 시스템 및 방법 |
JP2011179084A (ja) * | 2010-03-02 | 2011-09-15 | Fujifilm Corp | 大気圧プラズマ装置 |
US10056237B2 (en) | 2012-09-14 | 2018-08-21 | Vapor Technologies, Inc. | Low pressure arc plasma immersion coating vapor deposition and ion treatment |
CA2846177C (en) | 2013-03-15 | 2019-09-17 | Vapor Technologies, Inc. | Low pressure arc plasma immersion coating vapor deposition and ion treatment |
JP2015045078A (ja) * | 2013-08-29 | 2015-03-12 | 王子ホールディングス株式会社 | 成膜装置、成膜方法 |
CN103722785B (zh) | 2013-09-11 | 2016-01-27 | 太仓派欧技术咨询服务有限公司 | 一种多孔c/c为内衬的轻质防氧化材料结构的制备方法 |
TWI498206B (zh) * | 2014-09-04 | 2015-09-01 | Univ Nat Central | 連續式合成碳薄膜或無機材料薄膜之設備與方法 |
-
2015
- 2015-11-19 FR FR1561149A patent/FR3044023B1/fr active Active
-
2016
- 2016-11-17 JP JP2018526121A patent/JP6989499B2/ja active Active
- 2016-11-17 BR BR112018010020-0A patent/BR112018010020B1/pt active IP Right Grant
- 2016-11-17 CN CN201680067915.1A patent/CN108291297B/zh active Active
- 2016-11-17 WO PCT/FR2016/052990 patent/WO2017085412A1/fr active Application Filing
- 2016-11-17 US US15/777,492 patent/US10597782B2/en active Active
- 2016-11-17 CA CA3005329A patent/CA3005329C/fr active Active
- 2016-11-17 EP EP16815583.6A patent/EP3377670B1/fr active Active
- 2016-11-17 RU RU2018122084A patent/RU2717620C2/ru active
Also Published As
Publication number | Publication date |
---|---|
RU2717620C2 (ru) | 2020-03-24 |
EP3377670B1 (fr) | 2019-10-09 |
FR3044023B1 (fr) | 2017-12-22 |
WO2017085412A1 (fr) | 2017-05-26 |
FR3044023A1 (fr) | 2017-05-26 |
BR112018010020B1 (pt) | 2021-05-25 |
CN108291297A (zh) | 2018-07-17 |
US20180347048A1 (en) | 2018-12-06 |
CN108291297B (zh) | 2020-07-14 |
CA3005329C (fr) | 2023-03-28 |
US10597782B2 (en) | 2020-03-24 |
CA3005329A1 (fr) | 2017-05-26 |
JP2018534428A (ja) | 2018-11-22 |
JP6989499B2 (ja) | 2022-01-05 |
RU2018122084A3 (ru) | 2020-01-21 |
EP3377670A1 (fr) | 2018-09-26 |
BR112018010020A2 (pt) | 2018-11-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
RU2018122084A (ru) | Устройство для нанесения покрытия на одну или несколько нитей методом осаждения из паровой фазы | |
RU2016134430A (ru) | Оборачиваемая текстильная оплетка и способ ее изготовления | |
IL176414A (en) | Process for making high-performance polyethylene multifilament yarn | |
JP2012526205A5 (ru) | ||
RU2014110698A (ru) | Пряжа и ткань, характеризующиеся наличием обработанной поверхности с улучшенными физическими и адгезионными свойствами, и способ их изготовления | |
US20100003881A1 (en) | Methods and apparatus associated with narrow tows fabricated from large-tow preforms | |
DE502005010024D1 (de) | Verfahren und vorrichtung zur herstellung eines gekräuselten verbundfadens | |
WO2018064269A1 (en) | Refractory oxide coated fiber and method of making | |
US20170326838A1 (en) | Fiber delivery assembly and method of making | |
RU2013141409A (ru) | Способ изготовления моноблочной осесимметричной металлической детали, содержащей усиление из керамических волокон | |
FR3057864A1 (fr) | Procede d'infiltration ou de depot chimique en phase vapeur mettant en oeuvre le precurseur ci2bnh2 pour former du nitrure de bore | |
RU2018122087A (ru) | Устройство для нанесения покрытия на одну или несколько нитей методом осаждения из паровой фазы | |
RU2017110154A (ru) | Способ производства двухслойной термоструктурной монолитной композиционной детали и производимая деталь | |
JP2017531107A (ja) | ポリアミド溶融物からマルチフィラメント糸を製造する方法および装置 | |
CN109440290A (zh) | 一种扁丝生产用经编机导纱装置 | |
KR101278865B1 (ko) | 보온성과 경량성이 우수한 폴리에스터 복합사 및 그 제조방법 | |
KR101798339B1 (ko) | 해도사 방사용 노즐 장치 | |
KR101838653B1 (ko) | 다중단사 전처리를 위한 챔버장치 | |
MX2021001941A (es) | Aumento de volumen por chorro de vapor de hilos de multiples componentes para mejorar el procesamiento textil posterior. | |
CN112154223A (zh) | 在连续纤维上沉积涂层的方法和装置 | |
WO2015137902A1 (en) | A method for monofilament yarn production |