RU2008146334A - Защитные слои для оптических покрытий - Google Patents

Защитные слои для оптических покрытий Download PDF

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RU2008146334A
RU2008146334A RU2008146334/03A RU2008146334A RU2008146334A RU 2008146334 A RU2008146334 A RU 2008146334A RU 2008146334/03 A RU2008146334/03 A RU 2008146334/03A RU 2008146334 A RU2008146334 A RU 2008146334A RU 2008146334 A RU2008146334 A RU 2008146334A
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layer
outer layer
group
crack
formation
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Кайли В. ХАКЕРИ (US)
Кайли В. ХАКЕРИ
Питер А. МЕШВИТЦ (US)
Питер А. МЕШВИТЦ
Ренд Д. ДАННЕНБЕРГ (US)
Ренд Д. ДАННЕНБЕРГ
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АГК Флэт Гласс Нос Амэрика, Инк. (US)
АГК Флэт Гласс Нос Амэрика, Инк.
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3618—Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3441—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising carbon, a carbide or oxycarbide
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3634—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing carbon, a carbide or oxycarbide
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C03C17/366—Low-emissivity or solar control coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/78—Coatings specially designed to be durable, e.g. scratch-resistant
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/355—Temporary coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)
  • Laminated Bodies (AREA)

Abstract

1. Способ получения прозрачного изделия, предусматривающий ! предоставление стеклянной подложки, обладающей оптическим покрытием, включающим расположенный дальше всего от подложки однородный наружный слой; и ! формирование на наружном слое препятствующего распространению трещин слоя, имеющего толщину от 2 до 8 нм, в котором ! препятствующий распространению трещин слой является однородным слоем, содержащим материал, выбранный из группы, состоящей из ! Ti, Si, Zn, Sn, In, Zr, Al, Cr, Nb, Mo, Hf, Та и W; ! оксиды Ti, Si, Zn, Sn, In, Zr, Al, Cr, Nb, Mo, Hf, Та и W; ! нитриды Ti, Si, Zn, Sn, In, Zr, Al, Cr, Nb, Mo, Hf, Та и W; и их смесей. ! 2. Способ по п.1, в котором наружный слой содержит нитрид кремния. ! 3. Способ по п.1, в котором формирование предусматривает газофазное осаждение препятствующего распространению трещин слоя на наружном слое. ! 4. Способ по п.1, в котором ! препятствующий распространению трещин слой содержит материал, выбранный из группы, состоящей из TiO2, SiO2, ZnO, SnO2, In2O3, ZrO2, Al2O3, Cr2O3, Nb2O5, MoO3, HfO2, Ta2O5 и WO3 и их смесей; и ! формирование предусматривает ! осаждение на наружном слое барьерного для диффузии слоя металла, субоксида металла или субнитрида металла, содержащего, по меньшей мере, один элемент, выбранный из группы, состоящей из Ti, Si, Zn, Sn, In, Zr, Al, Cr, Nb, Mo, Hf, Та и W; ! нагревание барьерного для диффузии слоя в атмосфере, содержащей кислород; и ! введение барьерного для диффузии слоя в реакцию с кислородом с образованием препятствующего распространению трещин слоя. ! 5. Способ по п.4, в котором барьерный для диффузии слой имеет толщину от 4 до 6 нм. ! 6. Способ по п.4, в котором атмосферой, содержащей кислород, является воздух. ! 7. Способ по п.4, в котором нагревание предусматривает пов�

Claims (14)

1. Способ получения прозрачного изделия, предусматривающий
предоставление стеклянной подложки, обладающей оптическим покрытием, включающим расположенный дальше всего от подложки однородный наружный слой; и
формирование на наружном слое препятствующего распространению трещин слоя, имеющего толщину от 2 до 8 нм, в котором
препятствующий распространению трещин слой является однородным слоем, содержащим материал, выбранный из группы, состоящей из
Ti, Si, Zn, Sn, In, Zr, Al, Cr, Nb, Mo, Hf, Та и W;
оксиды Ti, Si, Zn, Sn, In, Zr, Al, Cr, Nb, Mo, Hf, Та и W;
нитриды Ti, Si, Zn, Sn, In, Zr, Al, Cr, Nb, Mo, Hf, Та и W; и их смесей.
2. Способ по п.1, в котором наружный слой содержит нитрид кремния.
3. Способ по п.1, в котором формирование предусматривает газофазное осаждение препятствующего распространению трещин слоя на наружном слое.
4. Способ по п.1, в котором
препятствующий распространению трещин слой содержит материал, выбранный из группы, состоящей из TiO2, SiO2, ZnO, SnO2, In2O3, ZrO2, Al2O3, Cr2O3, Nb2O5, MoO3, HfO2, Ta2O5 и WO3 и их смесей; и
формирование предусматривает
осаждение на наружном слое барьерного для диффузии слоя металла, субоксида металла или субнитрида металла, содержащего, по меньшей мере, один элемент, выбранный из группы, состоящей из Ti, Si, Zn, Sn, In, Zr, Al, Cr, Nb, Mo, Hf, Та и W;
нагревание барьерного для диффузии слоя в атмосфере, содержащей кислород; и
введение барьерного для диффузии слоя в реакцию с кислородом с образованием препятствующего распространению трещин слоя.
5. Способ по п.4, в котором барьерный для диффузии слой имеет толщину от 4 до 6 нм.
6. Способ по п.4, в котором атмосферой, содержащей кислород, является воздух.
7. Способ по п.4, в котором нагревание предусматривает повышение температуры оптического покрытия по меньшей мере до 400°С.
8. Способ по п.4, в котором нагревание подвергает закалке оптическое покрытие.
9. Способ по п.4, в котором нагревание подвергает закалке подложку.
10. Способ по п.4, дополнительно предусматривающий
осаждение слоя, по существу, состоящего из углерода, на барьерном для диффузии слое перед нагреванием барьерного для диффузии слоя; и
введение слоя, по существу, состоящего из углерода, в реакцию с кислородом с образованием углеродсодержащего газа.
11. Способ по п.10, в котором углеродсодержащий газ содержит, по меньшей мере, одно соединение, выбранное из группы, состоящей из монооксида углерода и диоксида углерода.
12. Способ по п.1, в котором стекло является прозрачным для видимого света.
13. Прозрачное изделие, содержащее
стеклянную подложку;
оптическое покрытие, содержащее один или большее количество находящихся на подложке слоев, в котором один или большее количество слоев включает расположенный дальше всего от подложки однородный наружный слой, содержащий нитрид кремния; и
защитное покрытие, расположенное на наружном слое, в котором
защитное покрытие состоит из препятствующего распространению трещин слоя, имеющего толщину от 2 до 8 нм, расположенного на наружном слое; и
препятствующий распространению трещин слой является однородным слоем, содержащим материал, выбранный из группы, состоящей из
Ti, Si, Zn, Sn, In, Zr, Al, Cr, Nb, Mo, Hf, Та и W;
оксиды Ti, Si, Zn, Sn, In, Zr, Al, Cr, Nb, Mo, Hf, Та и W;
нитриды Ti, Si, Zn, Sn, In, Zr, Al, Cr, Nb, Mo, Hf, Ta и W; и их смесей.
14. Прозрачное изделие по п.13, в котором оптическое покрытие представляет собой покрытие, подвергнутое закалке.
RU2008146334/03A 2002-01-25 2003-01-27 Защитные слои для оптических покрытий RU2498954C2 (ru)

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US10/054,973 US6770321B2 (en) 2002-01-25 2002-01-25 Method of making transparent articles utilizing protective layers for optical coatings

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US7361404B2 (en) * 2000-05-10 2008-04-22 Ppg Industries Ohio, Inc. Coated article with removable protective coating and related methods
US20030155065A1 (en) * 2002-02-13 2003-08-21 Thomsen Scott V. Method of making window unit
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