PT2977485T - Aparelho de processamento de pvd e método de processamento de pvd - Google Patents

Aparelho de processamento de pvd e método de processamento de pvd

Info

Publication number
PT2977485T
PT2977485T PT14769428T PT14769428T PT2977485T PT 2977485 T PT2977485 T PT 2977485T PT 14769428 T PT14769428 T PT 14769428T PT 14769428 T PT14769428 T PT 14769428T PT 2977485 T PT2977485 T PT 2977485T
Authority
PT
Portugal
Prior art keywords
pvd processing
processing apparatus
processing method
pvd
processing
Prior art date
Application number
PT14769428T
Other languages
English (en)
Inventor
Fujii Hirofumi
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Publication of PT2977485T publication Critical patent/PT2977485T/pt

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Coating Apparatus (AREA)
PT14769428T 2013-03-19 2014-03-03 Aparelho de processamento de pvd e método de processamento de pvd PT2977485T (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013056771A JP6000173B2 (ja) 2013-03-19 2013-03-19 Ｐｖｄ処理装置及びｐｖｄ処理方法

Publications (1)

Publication Number Publication Date
PT2977485T true PT2977485T (pt) 2019-06-11

Family

ID=51579681

Family Applications (1)

Application Number Title Priority Date Filing Date
PT14769428T PT2977485T (pt) 2013-03-19 2014-03-03 Aparelho de processamento de pvd e método de processamento de pvd

Country Status (11)

Country Link
US (1) US20160002769A1 (pt)
EP (1) EP2977485B1 (pt)
JP (1) JP6000173B2 (pt)
KR (1) KR20150126701A (pt)
CN (1) CN105051247B (pt)
BR (1) BR112015024142B1 (pt)
ES (1) ES2727323T3 (pt)
MX (1) MX2015011420A (pt)
PT (1) PT2977485T (pt)
TW (1) TWI522486B (pt)
WO (1) WO2014147979A1 (pt)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105420681A (zh) * 2015-12-09 2016-03-23 中国科学院长春光学精密机械与物理研究所 一种用于控制平面元件膜厚均匀性的镀膜工装
CN105603377B (zh) * 2016-02-23 2018-06-08 东莞市汇成真空科技有限公司 公转与自转均可独立调速的真空镀膜机工件转架运动机构
DE102016007727A1 (de) * 2016-06-23 2017-12-28 Man Truck & Bus Ag Brennkraftmaschine, insbesondere Hubkolben-Brennkraftmaschine
WO2019208551A1 (ja) * 2018-04-27 2019-10-31 株式会社神戸製鋼所 成膜装置及び成膜方法
CN108977789B (zh) * 2018-09-07 2021-01-05 中国工程物理研究院激光聚变研究中心 微球涂层系统
JP6772315B2 (ja) * 2019-02-14 2020-10-21 Ｔｏｗａ株式会社 成膜品の製造方法及びスパッタリング装置
CN109868451B (zh) * 2019-03-07 2021-05-28 安徽工业大学 一种涂层刀具及其涂层制备工艺
CN110284115A (zh) * 2019-07-09 2019-09-27 江苏太平洋精锻科技股份有限公司 多腔式差速旋转台车
JP2022541389A (ja) * 2019-07-26 2022-09-26 エリコン サーフェス ソリューションズ アーゲー、 プフェフィコン Ｐｖｄプロセスで使用される円筒状の伸長基材用の固定具
JP6635492B1 (ja) * 2019-10-15 2020-01-29 サンテック株式会社 基板回転装置
CN111041445A (zh) * 2019-12-26 2020-04-21 北京大学深圳研究院 一种螺纹件表面涂层物理气相沉积用多向转动装置
KR102627931B1 (ko) * 2023-07-05 2024-01-23 한국생산기술연구원 장축관 균일 코팅 장치 및 방법

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60116775A (ja) * 1983-11-28 1985-06-24 Pioneer Electronic Corp 蒸着処理装置
JP2836876B2 (ja) 1988-08-25 1998-12-14 ハウザー インダストリーズ ビーブイ 物理的な蒸着の二重被覆を行う装置および方法
CN2061568U (zh) * 1990-01-25 1990-09-05 北京有色金属研究总院 物理气相沉积用杆状基体夹持装置
JPH11200042A (ja) 1998-01-14 1999-07-27 Nikon Corp 成膜装置及び成膜方法
DE10005612A1 (de) * 2000-02-09 2001-08-16 Hauzer Techno Coating Europ B Verfahren zur Herstellung eines Gegenstandes und Gegenstand
JP3959737B2 (ja) * 2002-03-14 2007-08-15 三菱マテリアル神戸ツールズ株式会社 高速歯切加工ですぐれた耐チッピング性を発揮する硬質被覆層を超硬合金製むく歯切工具の表面に形成する方法
JP4120255B2 (ja) * 2002-04-11 2008-07-16 三菱マテリアル株式会社 工具の成膜方法
JP4173762B2 (ja) * 2003-04-04 2008-10-29 株式会社神戸製鋼所 α型結晶構造主体のアルミナ皮膜の製造方法および積層皮膜被覆部材の製造方法
US20050126497A1 (en) * 2003-09-30 2005-06-16 Kidd Jerry D. Platform assembly and method
JP4600025B2 (ja) * 2004-12-16 2010-12-15 日新電機株式会社 コーティング装置
US20070240982A1 (en) * 2005-10-17 2007-10-18 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Arc ion plating apparatus
JP2010095745A (ja) * 2008-10-15 2010-04-30 Sumitomo Electric Ind Ltd 成膜方法及び成膜装置
CN102002679A (zh) * 2010-12-20 2011-04-06 天津乾谕电子有限公司 真空镀膜的自转式工架机构
JP2012224878A (ja) * 2011-04-15 2012-11-15 Nissan Motor Co Ltd 蒸着装置用ワーク移動機構とこれを用いた蒸着方法

Also Published As

Publication number Publication date
MX2015011420A (es) 2016-02-03
CN105051247B (zh) 2018-05-18
ES2727323T3 (es) 2019-10-15
CN105051247A (zh) 2015-11-11
TW201439348A (zh) 2014-10-16
BR112015024142A2 (pt) 2017-07-18
BR112015024142B1 (pt) 2021-08-03
TWI522486B (zh) 2016-02-21
EP2977485A4 (en) 2017-01-04
WO2014147979A1 (ja) 2014-09-25
EP2977485A1 (en) 2016-01-27
KR20150126701A (ko) 2015-11-12
JP6000173B2 (ja) 2016-09-28
EP2977485B1 (en) 2019-05-08
US20160002769A1 (en) 2016-01-07
JP2014181385A (ja) 2014-09-29

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