PL1752557T3 - Urządzenie do powlekania próżniowego z napędzaną silnikiem obrotową katodą - Google Patents
Urządzenie do powlekania próżniowego z napędzaną silnikiem obrotową katodąInfo
- Publication number
- PL1752557T3 PL1752557T3 PL05017403T PL05017403T PL1752557T3 PL 1752557 T3 PL1752557 T3 PL 1752557T3 PL 05017403 T PL05017403 T PL 05017403T PL 05017403 T PL05017403 T PL 05017403T PL 1752557 T3 PL1752557 T3 PL 1752557T3
- Authority
- PL
- Poland
- Prior art keywords
- coating apparatus
- vacuum coating
- rotating cathode
- powered rotating
- attached
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3435—Target holders (includes backing plates and endblocks)
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP05017403A EP1752557B1 (de) | 2005-08-10 | 2005-08-10 | Vakuumbeschichtungsanlage mit motorisch angetriebener Drehkathode |
Publications (1)
Publication Number | Publication Date |
---|---|
PL1752557T3 true PL1752557T3 (pl) | 2009-04-30 |
Family
ID=36425257
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PL05017403T PL1752557T3 (pl) | 2005-08-10 | 2005-08-10 | Urządzenie do powlekania próżniowego z napędzaną silnikiem obrotową katodą |
Country Status (9)
Country | Link |
---|---|
US (2) | US20070051304A1 (pl) |
EP (1) | EP1752557B1 (pl) |
JP (1) | JP4504336B2 (pl) |
CN (1) | CN100532631C (pl) |
AT (1) | ATE415503T1 (pl) |
DE (1) | DE502005006069D1 (pl) |
ES (1) | ES2318392T3 (pl) |
PL (1) | PL1752557T3 (pl) |
TW (1) | TWI329678B (pl) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008033902B4 (de) * | 2008-07-18 | 2012-01-19 | Von Ardenne Anlagentechnik Gmbh | Endblock für eine Magnetronanordnung mit einem rotierenden Target und Vakuumbeschichtungsanlage |
DE102009007897A1 (de) * | 2009-02-08 | 2010-08-12 | Oerlikon Trading Ag, Trübbach | Vakuumkammer für Beschichtungsanlagen und Verfahren zum Herstellen einer Vakuumkammer für Beschichtungsanlagen |
JP6277398B2 (ja) * | 2013-08-27 | 2018-02-14 | 株式会社ユーテック | プラズマcvd装置及び配管内の成膜方法 |
DE102014019974B3 (de) | 2014-10-20 | 2022-08-25 | VON ARDENNE Asset GmbH & Co. KG | Endblock-Anordnung und Sockelanordnung |
DE102014115280B4 (de) * | 2014-10-20 | 2023-02-02 | VON ARDENNE Asset GmbH & Co. KG | Magnetronanordnung |
DE102014115282B4 (de) * | 2014-10-20 | 2019-10-02 | VON ARDENNE Asset GmbH & Co. KG | Sockelanordnung |
JP6469432B2 (ja) * | 2014-12-09 | 2019-02-13 | 株式会社アルバック | ロータリーカソード、および、スパッタ装置 |
CN106011768A (zh) * | 2016-07-29 | 2016-10-12 | 江苏宇天港玻新材料有限公司 | 一种磁控溅射工艺中使用的旋转银靶 |
CN107858653B (zh) * | 2017-10-31 | 2023-05-12 | 东莞市汇成真空科技有限公司 | 一种电弧靶升降抬头机构 |
KR20230074594A (ko) * | 2020-10-05 | 2023-05-30 | 어플라이드 머티어리얼스, 인코포레이티드 | 캐소드들을 위한 텀블링 프로텍터, 및 캐소드의 텀블링을 보상하기 위한 방법 |
WO2023110105A1 (en) * | 2021-12-16 | 2023-06-22 | Applied Materials, Inc. | Cathode assembly, deposition apparatus and method for sputter deposition |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3127092A (en) * | 1964-03-31 | Motor mounting | ||
US4422916A (en) * | 1981-02-12 | 1983-12-27 | Shatterproof Glass Corporation | Magnetron cathode sputtering apparatus |
US4383074A (en) * | 1982-06-16 | 1983-05-10 | The General Tire & Rubber Company | Bushings |
US4478703A (en) * | 1983-03-31 | 1984-10-23 | Kawasaki Jukogyo Kabushiki Kaisha | Sputtering system |
US4445997A (en) | 1983-08-17 | 1984-05-01 | Shatterproof Glass Corporation | Rotatable sputtering apparatus |
JPH02205669A (ja) * | 1989-02-03 | 1990-08-15 | Matsushita Electric Ind Co Ltd | スパッタ装置 |
EP0393344A1 (de) * | 1989-04-20 | 1990-10-24 | Balzers Aktiengesellschaft | Haltevorrichtung für Targets von Zerstäubungsquellen und Verfahren zum Festhalten eines Targets in einer Halterung |
US5200049A (en) | 1990-08-10 | 1993-04-06 | Viratec Thin Films, Inc. | Cantilever mount for rotating cylindrical magnetrons |
JPH0565634A (ja) * | 1991-09-06 | 1993-03-19 | Rohm Co Ltd | スパツタ装置 |
US5258675A (en) * | 1991-10-15 | 1993-11-02 | Marathon Electric Manufacturing Corporation | Mount apparatus for rotatable apparatus coupled to a rotating drive unit |
US5620577A (en) | 1993-12-30 | 1997-04-15 | Viratec Thin Films, Inc. | Spring-loaded mount for a rotatable sputtering cathode |
US5591314A (en) * | 1995-10-27 | 1997-01-07 | Morgan; Steven V. | Apparatus for affixing a rotating cylindrical magnetron target to a spindle |
US5753092A (en) * | 1996-08-26 | 1998-05-19 | Velocidata, Inc. | Cylindrical carriage sputtering system |
DE19746988A1 (de) * | 1997-10-24 | 1999-05-06 | Leybold Ag | Zerstäuberkathode |
DE10004787A1 (de) | 1999-09-14 | 2001-03-15 | Ardenne Anlagentech Gmbh | Vakuumbeschichtungsanlage mit einem rohrförmigen Magnetron |
US6736948B2 (en) | 2002-01-18 | 2004-05-18 | Von Ardenne Anlagentechnik Gmbh | Cylindrical AC/DC magnetron with compliant drive system and improved electrical and thermal isolation |
JP2003232404A (ja) * | 2002-02-07 | 2003-08-22 | Nok Corp | 防振マウント |
US6905579B2 (en) * | 2003-02-13 | 2005-06-14 | Sputtering Components, Inc. | Cylindrical magnetron target and spindle apparatus |
DE102004017300A1 (de) * | 2004-04-08 | 2005-11-03 | Pierburg Gmbh | Anordnung zur Dämpfung einer Schwingungsübertragung |
-
2005
- 2005-08-10 EP EP05017403A patent/EP1752557B1/de not_active Not-in-force
- 2005-08-10 DE DE502005006069T patent/DE502005006069D1/de active Active
- 2005-08-10 ES ES05017403T patent/ES2318392T3/es active Active
- 2005-08-10 PL PL05017403T patent/PL1752557T3/pl unknown
- 2005-08-10 AT AT05017403T patent/ATE415503T1/de not_active IP Right Cessation
-
2006
- 2006-08-09 TW TW095129200A patent/TWI329678B/zh not_active IP Right Cessation
- 2006-08-09 CN CNB2006101097620A patent/CN100532631C/zh not_active Expired - Fee Related
- 2006-08-09 US US11/501,286 patent/US20070051304A1/en not_active Abandoned
- 2006-08-10 JP JP2006218642A patent/JP4504336B2/ja not_active Expired - Fee Related
-
2010
- 2010-01-11 US US12/685,343 patent/US20100108505A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
EP1752557B1 (de) | 2008-11-26 |
US20100108505A1 (en) | 2010-05-06 |
TW200712234A (en) | 2007-04-01 |
EP1752557A1 (de) | 2007-02-14 |
CN1912175A (zh) | 2007-02-14 |
JP4504336B2 (ja) | 2010-07-14 |
CN100532631C (zh) | 2009-08-26 |
JP2007051373A (ja) | 2007-03-01 |
ATE415503T1 (de) | 2008-12-15 |
US20070051304A1 (en) | 2007-03-08 |
TWI329678B (en) | 2010-09-01 |
ES2318392T3 (es) | 2009-05-01 |
DE502005006069D1 (de) | 2009-01-08 |
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