TW200702466A - Apparatus for vacuum deposition - Google Patents

Apparatus for vacuum deposition

Info

Publication number
TW200702466A
TW200702466A TW094123176A TW94123176A TW200702466A TW 200702466 A TW200702466 A TW 200702466A TW 094123176 A TW094123176 A TW 094123176A TW 94123176 A TW94123176 A TW 94123176A TW 200702466 A TW200702466 A TW 200702466A
Authority
TW
Taiwan
Prior art keywords
substrate holder
vacuum deposition
systems
vacuum chamber
cucible
Prior art date
Application number
TW094123176A
Other languages
Chinese (zh)
Other versions
TWI391507B (en
Inventor
Shih-Che Chien
Original Assignee
Hon Hai Prec Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hon Hai Prec Ind Co Ltd filed Critical Hon Hai Prec Ind Co Ltd
Priority to TW94123176A priority Critical patent/TWI391507B/en
Publication of TW200702466A publication Critical patent/TW200702466A/en
Application granted granted Critical
Publication of TWI391507B publication Critical patent/TWI391507B/en

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  • Physical Vapour Deposition (AREA)

Abstract

An apparatus for vacuum deposition includes a vacuum chamber, a substrate holder, plurality of crucible systems, and plurality of baffles. The substrate holder is mounted in the ceiling of the vacuum chamber. The cucible systems are on the bottom of the vacuum chamber below the substrate holder. The baffles gyrally covers between the substrate holder and the cucible systems by using a rotary mechanism.
TW94123176A 2005-07-08 2005-07-08 Apparatus for vacuum deposition TWI391507B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94123176A TWI391507B (en) 2005-07-08 2005-07-08 Apparatus for vacuum deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94123176A TWI391507B (en) 2005-07-08 2005-07-08 Apparatus for vacuum deposition

Publications (2)

Publication Number Publication Date
TW200702466A true TW200702466A (en) 2007-01-16
TWI391507B TWI391507B (en) 2013-04-01

Family

ID=48803310

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94123176A TWI391507B (en) 2005-07-08 2005-07-08 Apparatus for vacuum deposition

Country Status (1)

Country Link
TW (1) TWI391507B (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI386499B (en) * 2007-12-14 2013-02-21 Hon Hai Prec Ind Co Ltd Evaporation equipment
TWI396767B (en) * 2008-06-27 2013-05-21 Hon Hai Prec Ind Co Ltd Optical coating device
TWI406962B (en) * 2008-06-27 2013-09-01 Hon Hai Prec Ind Co Ltd Coating device
TWI447244B (en) * 2008-05-30 2014-08-01 Hon Hai Prec Ind Co Ltd Coating device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM260551U (en) * 2004-05-28 2005-04-01 Hon Hai Prec Ind Co Ltd Optics deposition apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI386499B (en) * 2007-12-14 2013-02-21 Hon Hai Prec Ind Co Ltd Evaporation equipment
TWI447244B (en) * 2008-05-30 2014-08-01 Hon Hai Prec Ind Co Ltd Coating device
TWI396767B (en) * 2008-06-27 2013-05-21 Hon Hai Prec Ind Co Ltd Optical coating device
TWI406962B (en) * 2008-06-27 2013-09-01 Hon Hai Prec Ind Co Ltd Coating device

Also Published As

Publication number Publication date
TWI391507B (en) 2013-04-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees