TWI406962B - Coating device - Google Patents

Abstract

A coating device includes an umbrella stand for supporting a workpiece, a plurality of connecting members, a bracket, and a detecting device. Each of the connecting members includes a first end portion and a second end portion opposite to the first end portion. The first end portions are connected to the top of the umbrella stand. The second end portions each have an outer thread formed thereon. The bracket has a plurality of threaded holes therein. The second end portions of the connecting members are threadingly engaged into the threaded holes of the bracket, thereby hanging the umbrella stand to the bracket. The detecting device is for judging whether the umbrella stand is horizontal after rotation of the connecting members. In this way, the incline of the umbrella stand is avoided. Thus a high coating accuracy is achieved.

Description

Coating device

The invention relates to the field of coating process, in particular to a coating device.

Currently, many industrial products are coated with functional films to improve various properties of the surface of the product. For example, an anti-reflection film is coated on the surface of the optical lens to reduce the reflectivity of the lens surface and reduce the energy loss of incident light passing through the lens. Another example is that a filter film is coated on the surface of some filter elements to filter out light of a predetermined wavelength band to form a variety of filters. The coating method mainly includes ion plating method, radio frequency magnetron sputtering, vacuum evaporation method, chemical vapor deposition method and the like. Ichiki, M. et al., May 2003, 2003, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Thin film formation-a fabrication on non-planar surface by spray coating method A method of forming a film on a non-planar surface.

The vapor deposition is a physical vapor deposition technique. Specifically, the vapor deposition material is heated by an ion beam or an electron beam to change the vapor deposition material into a gaseous state or an ionic state, and is deposited on the surface of the workpiece to be plated to form a vapor deposition layer. Material film layer.

When the workpiece is coated, the coated umbrella frame is usually suspended on a bracket by a connecting member such as a stud, and the workpiece to be coated is fixed on the coated umbrella frame, and the vapor deposition target is The material is placed under the coated umbrella frame, and after the target evaporates, it spreads to the surface of the coated workpiece. When the coated umbrella stand needs to be sandblasted, the bracket is screwed out by means of a connecting member such as a stud for sandblasting maintenance. After the blasting maintenance is completed, the coated umbrella frame is re-fixed to the bracket by screwing the bracket into a bracket such as a stud. However, since the artificial operation differs from the fastening of the studs and the like, the coated umbrella frame is inclined, and it is difficult to adjust the horizontal position, so that the coating thickness of the workpiece to be coated is greatly different in the coating process. Reduced coating accuracy.

In view of this, it is necessary to provide a coating device with a high coating precision.

A coating device includes a coated umbrella frame for supporting a workpiece to be plated, a plurality of connecting members, a bracket and a detecting device. Each of the connecting members has a first end portion and a second end portion opposite thereto, the first end portion is connected to the top of the coated umbrella frame, the second end portion is provided with an external thread, and the bracket is provided with a threaded hole. The second end of the plurality of connecting members is screwed into the threaded hole of the bracket to suspend the coated umbrella frame, and the bottom of the coated umbrella frame is provided with at least two opposite first through holes, and the coating device further Included as a detecting device for detecting whether the coated umbrella stand is horizontal during the screwing or unscrewing of the second end of the connecting member, the detecting device further comprising a light source and a light receiving device, the light source Corresponding to the light receiving device, the two sides of the at least two first through holes of the coated umbrella frame are disposed on the same horizontal line.

A coating device comprises a vacuum container, a vapor deposition source disposed in the vacuum container, a coated umbrella frame disposed opposite the vapor deposition source, a plurality of connecting members, a bracket and a detecting device. Each of the connectors has a first end and is opposite thereto a second end portion, the first end portion is connected to the top of the coated umbrella frame, the second end portion is provided with an external thread, the bracket is provided with a threaded hole, and the second end portion of the plurality of connecting members is screwed into the second end portion In the threaded hole of the bracket, the coated umbrella frame is suspended, and the bottom of the coated umbrella frame is provided with at least two opposite first through holes, and the coating device further comprises a detecting device for detecting the connecting piece The detecting device further includes a light source and a light receiving device, and the light source and the light receiving device are disposed at least on the coated umbrella frame during the process of screwing or unscrewing the two ends into the bracket. The two first through holes are on both sides and are on the same horizontal line.

Compared with the prior art, the coating device determines whether the coated umbrella frame is in a horizontal position by the detecting device, and realizes the horizontal position adjustment of the coated umbrella frame by the plurality of connecting members, thereby avoiding the inclination of the coated umbrella frame in the coating process. The difference in coating thickness of the surface of the workpiece to be coated is further improved the coating precision.

100,200‧‧‧ coating device

10‧‧‧ coated umbrella stand

20‧‧‧ bracket

30‧‧‧Connecting parts

40‧‧‧Flexible components

50‧‧‧Detection device

102‧‧‧ accommodating through holes

106‧‧‧First through hole

104‧‧‧Protruding

108‧‧‧Second through hole

304‧‧‧First end

306‧‧‧second end

202‧‧‧End

502‧‧‧Light source

504‧‧‧Light receiving device

210‧‧‧Vacuum container

220‧‧‧vapor deposition source

1 is a schematic perspective view showing a coating apparatus according to a first embodiment of the present invention.

2 is an exploded perspective view of FIG. 1.

Figure 3 is a schematic cross-sectional view of Figure 1.

4 is a schematic perspective view showing a coating device according to a second embodiment of the present invention.

The embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

Referring to FIG. 1 to FIG. 3 together, a coating apparatus 100 according to a first embodiment of the present invention is provided. The coating device 100 includes a coated umbrella stand 10, a bracket 20, four connectors 30, four elastic members 40, and a detecting device 50.

The coated umbrella stand 10 is made of a metal having good thermal conductivity, and the material thereof may be metal such as copper, aluminum or stainless steel. The coated umbrella frame 10 is provided with a plurality of receiving through holes 102 for accommodating workpieces to be plated (not shown). The first umbrella hole 106 is opened at the bottom of the coated umbrella frame 10. Each of the two first through holes 106 is oppositely disposed on the same horizontal line. Preferably, the connection of each of the two first through holes 106 intersects the axis of the coated umbrella frame 10. The top of the coated umbrella frame 10 has a protrusion 104, and the protrusion 104 is provided with four second through holes 108.

Each of the connectors 30 has a first end 304 and a second end 306 opposite thereto. The width of the first end portion 304 of the connecting member 30 is greater than the width of the second through hole 108. The width of the second end portion 306 of the connecting member 30 is smaller than the width of the second through hole 108. The second through hole 108 is bored in the lower direction of the coated umbrella frame 10. The second end 306 is provided with an external thread. The four connecting members 30 are evenly arranged on the protruding portion 104 at equal intervals.

The end portion 202 of the bracket 20 is provided with a threaded hole (not shown), and the second end portion 306 of the plurality of connecting members 30 is screwed into the threaded hole of the bracket 20 to suspend the coated umbrella frame 10. The bracket 20 can be connected to an external driving device (not shown), and the external driving device can drive the bracket 20 to rotate at a high speed, thereby driving the coated umbrella frame 10 to rotate at a high speed.

The elastic member 40 is wound around the connecting member 30, and the elastic member 40 is a spring or a spring.

The detecting device 50 is configured to detect whether the coated umbrella stand 10 is in a horizontal state during the process of screwing or unscrewing the second end portion 306 of the connecting member 30 into the bracket 20. The detecting device 50 further includes a light source 502 and a light receiving device 504. The light source 502 and the light receiving device 504 are disposed on opposite sides of the two first through holes 106 of the coated umbrella frame 10 and are located on the same horizontal line. . In this embodiment, the number of the first through holes is twelve. Of course, it is not limited to 12, as long as the coated umbrella frame 10 can be rotated to different angles, the light emitted by the light source 502 can be received by the light receiving device 504 through two of the oppositely disposed first through holes 106. can.

When the four connecting members 30 are screwed into or out of the bracket 20 respectively, the detecting device 50 determines whether the axis of the coated umbrella frame 10 is perpendicular to the horizontal plane, that is, whether the coated umbrella frame 10 is kept horizontal. status. When the light receiving device 504 on the same horizontal line can receive the light emitted by the illuminating light source 502 100%, it can be determined that the axis of the coated umbrella frame 10 is perpendicular to the horizontal plane. The elastic deformation of the elastic member 40 can be used to fix the position of the coated umbrella frame 10 so that the coated umbrella frame 10 does not sway during the spin coating process. In this embodiment, the illuminating light source 502 is an infrared light source, and the light receiving device 504 is an infrared light receiver. Of course, it can also be other kinds of illuminating light sources, and is not limited to such a light source.

Referring to FIG. 4, a coating apparatus 200 according to a second embodiment of the present invention is provided. The difference from the coating device 100 in the first embodiment is that the coating device 200 is The step includes a vacuum vessel 210 and an evaporation source 220 disposed in the vacuum vessel 210. The coated umbrella stand 10 is disposed opposite to the vapor deposition source 220.

Compared with the prior art, the coating device 100 or 200 determines whether the coated umbrella frame 10 is in a horizontal position by the detecting device 50, and realizes the horizontal position adjustment of the coated umbrella frame 10 by the plurality of connecting members 30, thereby avoiding the coating process. Due to the difference in coating thickness of the surface of the workpiece to be coated caused by the inclination of the coated umbrella frame 10, the coating precision is further improved.

In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Equivalent modifications or variations made by persons skilled in the art in light of the spirit of the invention are intended to be included within the scope of the following claims.

100‧‧‧ coating device

10‧‧‧ coated umbrella stand

20‧‧‧ bracket

30‧‧‧Connecting parts

40‧‧‧Flexible components

50‧‧‧Detection device

102‧‧‧ accommodating through holes

106‧‧‧First through hole

104‧‧‧Protruding

202‧‧‧End

502‧‧‧Light source

504‧‧‧Light receiving device

Claims (10)

A coating device comprising: a coated umbrella stand for supporting a workpiece to be plated; a plurality of connecting members each having a first end and a second end opposite thereto, the first end being connected to the a top end of the coated umbrella frame, the second end portion is provided with an external thread; and a bracket having a threaded hole, the second end of the plurality of connecting members being screwed into the threaded hole of the bracket to suspend the The coated umbrella stand is improved in that at least two opposite first through holes are formed in the bottom of the coated umbrella stand, and each two first through holes are oppositely disposed on the same horizontal line, and the coating device further comprises a detecting device The detecting device further includes a light source and a light receiving device, and the light receiving device and the light receiving device are configured to detect whether the coated umbrella stand is horizontal when the second end of the connecting member is screwed into or out of the bracket. Corresponding to the two sides of the at least two first through holes of the coated umbrella stand, and located on the same horizontal line. The coating device of claim 1, wherein each of the connecting members is provided with a resilient member. The coating device of claim 1, wherein the top of the coated umbrella frame is provided with a plurality of second through holes, and a width of the first end of the connecting member is greater than a width of the second through hole, the connection The width of the second end portion of the member is smaller than the width of the second through hole, and the connecting member penetrates the second through hole from below the coated umbrella frame. The coating device according to claim 1, wherein the plurality of connecting members are evenly arranged at equal intervals on the top of the coated umbrella frame. The coating device of claim 1, wherein the bracket is a rotary bracket. A coating device comprising: a vacuum container; an evaporation source disposed in the vacuum container; a coated umbrella frame disposed opposite the evaporation source; a plurality of connectors each having a first end and opposite thereto a second end portion, the first end portion is connected to the top of the coated umbrella frame, the second end portion is provided with an external thread, and a bracket is provided with a threaded hole, and the second end portion of the plurality of connecting members is Screwing into the threaded hole of the bracket to suspend the coated umbrella frame, wherein the bottom of the coated umbrella frame is provided with at least two oppositely disposed first through holes, and each of the two first through holes is oppositely disposed and located On the same horizontal line, the coating device further comprises a detecting device for detecting whether the coated umbrella stand is horizontal during the screwing or unscrewing of the second end of the connecting member, the detecting device further comprising a light source And a light receiving device, the light source and the light receiving device are disposed on opposite sides of at least two first through holes of the coated umbrella frame, and are located on the same horizontal line. The coating device of claim 6, wherein each of the connecting members is provided with a resilient member. The coating device of claim 6, wherein the top of the coated umbrella frame is provided with a plurality of second through holes, and a width of the first end of the connecting member is greater than a width of the second through hole, the connection The width of the second end portion of the member is smaller than the width of the second through hole, and the connecting member penetrates the second through hole from below the coated umbrella frame. The coating device according to claim 6, wherein the plurality of connecting members are evenly arranged at equal intervals on the top of the coated umbrella frame. The coating device of claim 6, wherein the bracket is a rotary bracket.