201000655 九、發明說明： 【發明所屬之技術領域】 本發明涉及鍍膜製程領域，尤其涉及一種鍍膜裝置。 【先前技術】 當前，許多工業產品表面均鍍有功能薄膜以改善產品 表面之各種性能。如於光學鏡片之表面鍍上一層抗反射 膜，以降低鏡片表面之反射率，降低入射光通過鏡片之能 量損耗。又如於某些濾光元件表面鍍上一層濾光膜，可濾 掉某一預定波段之光，製成各種各樣之濾光片。鍍膜方法 主要包括離子鍍膜法、射頻磁控濺鍍、真空蒸發法、化學 氣相沈積法等。Ichiki, M.等人於2003年5月發表於2003 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 之論文 Thin film formation-a fabrication on non-planar surface by spray coating method 中介紹了 藉由喷 塗於非平面形成薄膜之方法。 蒸鍍係一種物理氣相沈積技術，具體地，其藉由離子 % 束或電子束對蒸鍍材料進行加熱，使蒸鍍材料變成氣態或 離子態，而沈積於待鍍工件表面以形成一層蒸鍍材料膜層。 於工件進行鍍膜時，通常係將鍍膜傘架藉由螺柱等連 接件懸吊於一支架上，再將待鍍膜工件固定於鍍膜傘架 上，蒸鍍靶材設置於鍍膜傘架下方，靶材蒸發後，擴散到 鍍膜工件之表面。當鍍膜傘架需要進行喷砂保養時，藉由 螺柱等連接件旋出該支架進行喷砂保養。喷砂保養完成 後，藉由螺柱等連接件旋入該支架，從而將鍍膜傘架重新 6 201000655 =定於支架上。然而，由於人為操作之差異於緊固螺柱等 ^接件時會造成_傘架傾斜，且不易調整其 置丄從：於鐘膜製程中，造成待鍍膜工件表面鑛膜厚度有 杈大之差異，降低了鍍膜精度。 【發明内容】 有4a於此冑必要提供—種鍍臈精度較高之鍵膜裝置。 一種鍍膜裝置，其包括—田 架、複數連接件、架及/支撐待鑛^件之鍵膜傘 . ’、 檢測裝置。該每個連接件且 其相!之第二端部，該第-端部連接於該 螺蚊孔% m該弟一端部設有外螺紋’該支架開設有 中、，以懸二ίΓ牛之第二端部螺合入該支架之螺紋孔 個相對:==::錢膜傘架之底部開設有至少兩 ΐ中=測該連接件之第二端部旋入或旋出該支架之過 程中^錢膜傘架是否保持水平，該檢測裝 光接收裝置，該光源與光接收裝置對應』 :::傘系之至少兩個第一通孔之兩側，且位於同一條水 一 =_置’其包括一真空容器、設置於該直空容 :件、-j源、與蒸鍛源相對設置之錢膜伞架、複數連 及盘一檢測展置。該每個連接件具有第一端部 弟—&部’該第—端部連接於該it膜傘竿之 頂：，該第二端部設有外螺紋，該支架開設有螺:：:； 稷、接件之第二端部螺合入該支架之螺紋孔令，以懸吊 201000655 該，膜傘架，該鍍膜傘架之底部開設有至少兩個相對設置 =遠’該鍍膜裝置進一步包括一檢測裝置，用於檢 、以 之第二端部旋入或旋出該支架之過程中，嗲获 持水平’該檢測裝置進一步包括-光源：: 先接收裝置，該光源與光接收裝置對應設置 之至少兩個第-通孔之兩側，且位於同一條水平線又上膜;·架 架是術’該鍍膜裝置由檢測裝置判斷鑛膜伞 .，'、、千位置，並藉由該複數連接件實現鍍膜傘架之 7、Μ立置調整’從而避免了於制製程中由於鍍膜伞架之 i斜所造成之待鍍膜卫件表面鍍膜厚度之差異，進— 尚了鐘膜精度。 v长 【實施方式】 明。下面將結合附圖，對本發明實施例作進一步之詳細說 鍍膜：至圖3,本發明第-實施例提供之-種 、 Μ、又膜裝置100包括一鍍膜伞架10、一支 “兮連接件3〇、4個彈性元件40、及一檢测裳置5〇。 二鍍膜傘架1G用導熱性能良好之金屬製成，其材料可 、’S、銘或不銹鋼等金屬。該錄膜傘架10設置有複數六f 相對設置，心： 中，每兩個第-通孔· ;5 —水平線上。優選地，該每兩個第一通 之頂端:有線膜傘架10之軸線相交。該鍍膜傘架10 頁n犬起部104，該突起部綱開設有4個第二通 8 201000655 孔 108。 該每個連接件30具有第一端部304及與其相對之第二 端部306。該連接件3〇之第一端部3〇4之寬度大於該第二 通孔1〇8之寬度，該連接件30之第二端部306之寬度小於 該第二通孔108之寬度，該連接件3〇於該鍍膜傘架忉之 下方向上穿設該第二通孔1〇8。該第二端部3〇6設有外螺 紋。該4個連接件3〇等間距地均勻排佈於該突出部1〇4上。、 該支架20之端部2〇2開設有螺紋孔 連接件30之苐二端部螺合人該支架2〇之螺)紋孔^數 以懸吊該鍍膜傘架1〇。該支架2〇可與外部驅動裝置相連 (圖未不），該外部驅動裝置可帶動該支架2〇高速旋 從而帶動該鍍膜傘架10高速旋轉。 為彈=件40纏繞於該連接件30上，該彈性元件4。 該檢測裝置50用於檢測該連接件3〇之 :广戈旋出該支架20之過程中，該鍵膜伞架1〇-== 則裝置50進一步包括一光源502與一光接收 凌置504,該光源502與光接收裝置 收 伞架,。之兩個第一之兩側，且位201000655 IX. Description of the Invention: [Technical Field] The present invention relates to the field of coating processes, and more particularly to a coating apparatus. [Prior Art] Currently, many industrial products are coated with functional films to improve various properties of the surface of the product. For example, an anti-reflective film is coated on the surface of the optical lens to reduce the reflectivity of the lens surface and reduce the energy loss of incident light through the lens. Another example is that a filter film is coated on the surface of some filter elements to filter out light of a predetermined wavelength to make a variety of filters. The coating method mainly includes ion plating method, radio frequency magnetron sputtering, vacuum evaporation method, chemical vapor deposition method, and the like. Ichiki, M., et al., May 2003, 2003, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Thin film formation-a fabrication on non-planar surface by spray coating method A method of applying a non-planar film. The vapor deposition is a physical vapor deposition technique. Specifically, the vapor deposition material is heated by an ion % beam or an electron beam to change the vapor deposition material into a gaseous state or an ionic state, and is deposited on the surface of the workpiece to be plated to form a steaming layer. Coating material layer. When the workpiece is coated, the coated umbrella frame is usually suspended on a bracket by a connecting member such as a stud, and the workpiece to be coated is fixed on the coated umbrella frame, and the vapor deposition target is placed under the coated umbrella frame. After evaporation, the material diffuses to the surface of the coated workpiece. When the coated umbrella stand needs to be sandblasted, the bracket is screwed out by a connector such as a stud for sandblasting maintenance. After the blasting maintenance is completed, the bracket is screwed into the bracket by a connector such as a stud, so that the coated umbrella frame is re-set on the bracket. However, due to the difference in man-made operation, when the studs are tightened, the umbrella frame is inclined, and it is difficult to adjust the placement of the umbrella frame. In the process of the bell film, the thickness of the surface of the workpiece to be coated is increased. The difference reduces the coating accuracy. SUMMARY OF THE INVENTION There is a need for a key film device having a high precision of rhodium plating. A coating device comprising: a field frame, a plurality of connecting members, a frame and/or a key film umbrella supporting the parts to be mined. ???, a detecting device. The second end of each of the connecting members and the phase thereof, the first end portion is connected to the screwing mosquito hole % m, and the other end portion of the younger one is provided with an external thread 'the bracket is opened in the middle, to suspend the two The second end is screwed into the threaded hole of the bracket:==:: The bottom of the money film umbrella frame is provided with at least two turns. The process of measuring the second end of the connecting member is screwed in or out of the bracket. Whether the medium money film umbrella stand is kept horizontal, the detecting light receiving device, the light source and the light receiving device correspond to :: 2: both sides of at least two first through holes of the umbrella system, and are located in the same water one = _ The utility model comprises a vacuum container, a vacuum chamber disposed on the direct air volume, a -j source, a money film umbrella frame disposed opposite to the steam forging source, a plurality of connection and a disk-detection display. Each of the connecting members has a first end portion, the first end portion is connected to the top of the IT film umbrella, and the second end portion is provided with an external thread, and the bracket is provided with a screw:::稷, the second end of the connector is screwed into the threaded hole of the bracket to suspend 201000655, the membrane umbrella frame, the bottom of the coated umbrella frame is provided with at least two relative settings = far 'the coating device further Included as a detecting device for detecting, during the process of screwing or unscrewing the second end into the bracket, the detecting device further comprises a light source: a receiving device, the light source and the light receiving device Corresponding to the two sides of the at least two first-through holes, and located on the same horizontal line and on the film; · The frame is the 'coating device judged by the detecting device, the film umbrella., ',, thousands position, and by The plurality of connecting pieces realize the adjustment of the coated umbrella frame 7 and the vertical adjustment of the ' 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而 从而. v long [Embodiment] Ming. In the following, the embodiment of the present invention will be further described in detail with reference to the accompanying drawings: to FIG. 3, the seed, the cymbal and the membrane device 100 of the first embodiment of the present invention comprises a coated umbrella frame 10 and a "兮 connection". 3〇, 4 elastic elements 40, and a detection skirt 5〇. The second coated umbrella stand 1G is made of metal with good thermal conductivity, and the material can be metal such as 'S, Ming or stainless steel. The frame 10 is provided with a plurality of six relative positions, a center: every two first-through holes, and a fifth line. Preferably, the top of each of the two first passes: the axis of the wired film umbrella stand 10 intersects The coated umbrella frame 10 pages n canine portion 104, the protrusion portion is provided with four second through 8 201000655 holes 108. Each of the connecting members 30 has a first end portion 304 and a second end portion 306 opposite thereto. The width of the first end portion 3〇4 of the connecting member 3 is greater than the width of the second through hole 1〇8, and the width of the second end portion 306 of the connecting member 30 is smaller than the width of the second through hole 108. The connecting member 3 passes through the second through hole 1〇8 in the direction below the coated umbrella frame. The second end portion 3〇6 is provided with an external thread. The four connecting members 3 are evenly arranged on the protruding portion 1〇4 at equal intervals. The end portion 2〇2 of the bracket 20 is provided with a threaded hole connecting member 30 and the two end portions are screwed to the bracket 2 The snail has a number of holes to suspend the coated umbrella frame. The bracket 2 can be connected to an external driving device (not shown), and the external driving device can drive the bracket 2 to rotate the coating to drive the coating. The umbrella frame 10 rotates at a high speed. The elastic member 4 is wound around the connecting member 30. The detecting device 50 is used for detecting the connecting member 3: during the process of rotating the bracket 20, The key film umbrella stand 1〇-== The device 50 further includes a light source 502 and a light receiving ridge 504, the light source 502 and the light receiving device are provided on the two sides, and the two sides are
上。於本實施例中，該第-通孔之數目12個。〜 A 限於U個’只要能夠使該鐘膜傘架1〇 :二：局 時，該光源搬發出之光均可通過其中兩個相對;置= 一通孔106被光接收裝置504接收即可。 直之弟 當該4個連接件3〇被分別旋入或旋出該支架20之過 201000655 程中藉由該檢測裝置50來判斷該鍍膜傘架1〇之軸線是 否垂直於水平面，即該鍍膜傘架1〇是否保持水平狀態。當 處於同一水平線上之該光接收裝置5〇4能夠1〇〇%地接收到 "亥發光光源502發出之光時，可判斷該鍍膜傘架1〇之軸線 垂直於水平面。該彈性元件4〇之彈性形變作用，可用來固 定調整後之該鍍膜傘架10之位置，使得該鍍膜傘架1〇於 旋轉鍵臈過程中不會發生晃動。於本實施例中，該發光光 源502 &紅外光源’該光接收裝f 5〇4 & 一個紅外光接收 器。當然，其亦可為其他種類之發光光源，而不僅限於這 種光源。 請參閱圖4,本發明第二實施例提供之一種鍍臈裝置 2〇0。與第—實施例中鑛膜裝置⑽不同之處在於：該鍍膜 f置200 it-步包括一個真空容g 21〇及設置於該真空容 器210内之一個蒸鍍源22〇。該鍍膜傘架1〇與該蒸鍍源2如 相對設置。 相較於先前技術，該鍍膜裝置1〇〇或2〇〇由檢測裝置 5〇判斷鍍齡架10是否為水平位置，並藉由該複數連接件 30實現鑛膜傘架1G之水平位置調整，避免了於鑛膜製程中 由於錢膜㈣H)之傾斜所造成之㈣膜工件表 之差異，進一步提高了鍍膜精度。 、 θ綜上所述，本發明確已符合發明專利之要件，遂依法 =出專财請。惟，以上料者僅為本發明之較佳實施方 式’自不能以此限制本案之t請專利範圍。舉凡孰 技藝之人士援依本發明之精神所作之等效修飾或變;，皆 201000655 應涵蓋於以下申請專利範圍内。 【圖式簡單說明】 圖1係本發明第一實施例提供之鍍膜裝置之立體結構 示意圖。 圖2係圖1之分解示意圖。 圖3係圖1之剖面示意圖。 圖4係本發明第二實施例提供之鍍膜裝置之立體結構 示意圖。 【主要元件符號說明】 鍍膜裝置 100、200 鍍膜傘架 10 支架 20 連接件 30 彈性元件 40 檢測裝置 50 容置通孔 102 第一通孔 106 突起部 104 第二通孔 108 第一端部 304 第二端部 306 端部 202 光源 502 光接收裝置 504 11 201000655 真空容器 210 蒸鍍源 220 12on. In this embodiment, the number of the first through holes is twelve. 〜A is limited to U's. As long as the clock umbrella holder can be made to be two: two, the light emitted by the light source can pass through two of them; and the one through hole 106 can be received by the light receiving device 504. When the four connecting members 3 are screwed into or out of the bracket 20 respectively, the detecting device 50 determines whether the axis of the coated umbrella frame 1 is perpendicular to the horizontal plane, that is, the coated umbrella Whether the shelf 1 is horizontal. When the light receiving device 5〇4 on the same horizontal line can receive the light emitted by the "Huiguang light source 502 by 1%, it can be judged that the axis of the coated umbrella stand 1 is perpendicular to the horizontal plane. The elastic deformation of the elastic member 4 can be used to fix the position of the coated umbrella frame 10 so that the coated umbrella frame 1 does not sway during the rotating key. In the present embodiment, the illuminating light source 502 & infrared light source 'the light receiving device f 5 〇 4 & an infrared light receiver. Of course, it can also be other types of illuminating light sources, and is not limited to such a light source. Referring to FIG. 4, a second embodiment of the present invention provides a rhodium plating apparatus 2〇0. The difference from the mineral film device (10) in the first embodiment is that the coating film f is disposed 200 steps including a vacuum capacity 21 and an evaporation source 22 disposed in the vacuum container 210. The coated umbrella stand 1 is disposed opposite to the vapor deposition source 2. Compared with the prior art, the coating device 1〇〇 or 2〇〇 determines whether the plating age frame 10 is in a horizontal position by the detecting device 5〇, and realizes the horizontal position adjustment of the mineral film umbrella frame 1G by the plurality of connecting members 30, The difference in the film workpiece table caused by the tilt of the money film (4) H) in the mineral film process is avoided, and the coating precision is further improved. According to the above, the invention has indeed met the requirements of the invention patent, and is legally qualified. However, the above description is only a preferred embodiment of the present invention. Equivalent modifications or variations made by those skilled in the art in accordance with the spirit of the present invention; 201000655 are to be included in the scope of the following claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing the structure of a coating apparatus according to a first embodiment of the present invention. 2 is an exploded perspective view of FIG. 1. Figure 3 is a schematic cross-sectional view of Figure 1. Fig. 4 is a perspective view showing the structure of a coating apparatus according to a second embodiment of the present invention. [Description of main component symbols] Coating device 100, 200 Coated umbrella stand 10 Bracket 20 Connector 30 Elastic component 40 Detection device 50 accommodating through hole 102 First through hole 106 Projection portion 104 Second through hole 108 First end portion 304 Two end portions 306 end portion 202 light source 502 light receiving device 504 11 201000655 vacuum container 210 evaporation source 220 12