TWI387662B - Sputtering bracket and sputtering device using the same - Google Patents

Description

Coated stent and coating machine

The invention relates to a coating device, in particular to a coating stent and a coating machine.

Currently, many industrial products are coated with functional films to improve the surface properties of the product. For example, an anti-reflection film is coated on the surface of the optical lens to reduce the reflectivity of the lens surface and reduce the energy loss of incident light passing through the lens. Another example is that a filter film is coated on the surface of some filter elements to filter out light of a predetermined wavelength band to form a variety of filters.

At present, due to the increasing requirements for optical performance, many optical surfaces such as optical lenses or filters need to be coated on both sides. For example, because image sensors in a digital camera lens of a mobile phone, such as a charge-coupled sensor, generate current by sensing the energy of light, even in a very dark environment, temperature, infrared, electromagnetic waves, and the like are still present. The noise is generated by the influence; and the infrared cut filter can filter the infrared light through the infrared cut-off optical film layer formed on the glass substrate to reduce the noise. With the increasing demand for high-end mobile digital camera lenses, an anti-reflective optical coating (AR Coating) is applied to the back of the infrared cut filter to enhance the light passing through the infrared cut filter. The demand for the penetration rate of the glass substrate is also gradually increasing.

In the lens coating process, the coating needs to be coated on both sides of the lens. Therefore, after the plating is finished, the lens is turned over and then placed in the coating machine for the second surface coating. In fact, the lens is turned over on the coated stent. In this way, each lens is usually turned over one by one in a manual manner, which is quite time consuming and labor intensive. See "Spinning bracket for hollow cylindrical coating" by Su Chengbin et al., "Instrument Technology and Sensors", No. 2, 1980, which introduces a coating bracket for cylindrical optical parts and its use. method. In the prior art, there are also some automatic turning mechanism of the coating bracket, but most of them are simple mechanical control mechanisms, so the angle of the turning of the bracket cannot be precisely controlled, thereby affecting the coating quality.

In view of this, a coating stent is provided for use in a coating apparatus, which is capable of automatically turning over the coated substrate holder, and the coating bracket and the coating machine with precise turning angle control are necessary.

The present invention provides a coated stent comprising a stent body and at least one substrate holder, each of the substrate holders and the stent body being coupled by a rotating shaft. a first gear is disposed on the rotating shaft connected to each of the substrate holders, and each of the substrate holders is correspondingly provided with a magnetic flow control element, and each of the magnetic current control elements can drive a second meshing engagement with the first gear The gear, thereby driving the rotating shaft, drives the substrate fixture to flip.

The present invention also provides a coating machine comprising: a vacuum container; at least one target disposed in the vacuum container; and a substrate holder for coating film disposed opposite the target. The coating holder includes a holder body and at least one substrate holder, and each of the substrate holders and the holder body are connected by a rotating shaft. a first gear is disposed on the rotating shaft connected to each of the substrate holders, and each of the substrate holders is correspondingly provided with a magnetic flow control element, and each of the magnetic current control elements can drive a second meshing engagement with the first gear The gear, thereby driving the rotating shaft, drives the substrate fixture to flip.

Compared with the prior art, the coating holder and the coating machine have the advantages of automatically turning over the coated substrate holder and accurately controlling the turning angle.

The invention will be further described in detail below with reference to the accompanying drawings.

As shown in FIG. 1 , a coated stent 100 according to a preferred embodiment of the present invention includes: a stent body 110 and at least one substrate holder 120; each substrate holder 120 is correspondingly provided with a magnetic flow control element 130, and the magnetic flow control Element 130 is used to drive the corresponding substrate holder 120 to flip.

The bracket body 110 is made of a metal semi-disc having good thermal conductivity, and the material thereof may be metal such as copper, aluminum or stainless steel. In this embodiment, the bracket body 110 is a stainless steel semi-disc.

The substrate holder 120 is also made of a metal having good thermal conductivity, and the material thereof may be metal such as copper, aluminum or stainless steel. The shape of the substrate holder 120 may be a fan shape, a circular shape, a square shape, or the like. The principle is that the substrate holder 120 does not collide with the holder body 110 when it is inverted in the holder body 110. In the embodiment, the substrate holder 120 has a fan shape.

Each of the substrate holders 120 is provided with at least one receiving through hole 121 for receiving the substrate to be plated and exposing the opposite surfaces to be plated of the substrate to be plated. The substrate to be plated is a glass lens or a plastic lens.

The substrate holder 120 and the holder body 110 are connected by a rotating shaft 140. In this embodiment, the rotating shaft 140 is disposed at the axial position of the substrate holder 120. A first gear 141 is disposed on the corresponding rotating shaft 140 of each of the substrate holders 120. In the embodiment, the first gear 141 is disposed at an end of the rotating shaft 140. Each of the magnetic flow control elements 130 can drive a second gear 142 that meshes with the first gear 141 to rotate, thereby driving the substrate 120 to flip the clamp.

The magnetic flow control element 130 can be fixed to the bracket body 110. The magnetic flow control element 130 is coupled to the second gear 142 for controlling the rotation of the second gear 142 to drive the rotation of the first gear 141 to invert the substrate clamp 120.

The magnetic flow control element 130 can indirectly control the substrate clamp 120 to flip. The magnetic flow control element 130 can be a magnetic flow control device such as an electromagnetic pump, a magnetic current motor or a magnetorheological controller. In addition, a wireless device can be installed on the switch of the magnetic flow control component 130 to control the operation of the magnetic flow control component 130 by means of remote control, thereby realizing automatic control of the flipping of the substrate clamp 120.

Since the process of the magnetorheological liquid phase change of the magnetic current control element 130 can be completed in the order of milliseconds, the magnetic current control element 130 has the advantages of high sensitivity and low energy consumption. Therefore, the accuracy of turning the substrate jig 120 can be greatly improved.

In the embodiment, the substrate fixtures 120 are the same size and are symmetrically distributed on the bracket body 110. Each of the substrate holders 120 is provided with a through hole 122, and each of the symmetrically disposed two substrate holders 120 has a through hole 122 on one axis. This through hole 122 facilitates monitoring of the flip angle of the substrate holder 120.

Referring to FIG. 2 together, a coating machine 200 using the above-mentioned coating holder 100 includes: a vacuum container 210; at least one target 220 disposed in the vacuum container 210; and a coating holder 100 disposed opposite the target 220. The coating machine 200 provided by the embodiment of the invention further includes an illuminating light source 150 and a light receiving device 160.

When the coating machine 200 is in use, first, the coated substrate is coated on one side. After one side is plated, only the magnetic flow control element 130 on the coating holder 100 is used to control each substrate holder 120 to be turned 180 degrees, that is, The other side can be coated. Since the magnetic flow control element 130 can be controlled by an electronically controlled or remotely controlled device, the flipping action of the substrate holder 120 can be performed automatically.

Preferably, in order to better monitor the angle at which the substrate holder 120 is turned over, an illuminating light source 150 is disposed not far from the coating holder 100, and a light receiving device is disposed at a position symmetrical with the other end of the illuminating light source 150 corresponding to the coating holder 100. 160. When the angles of the two symmetrical substrate holders 120 are both 180 degrees, the light emitted from the illuminating light source 150 can be completely transmitted through the through holes 122 and received by the light receiving device 160. Therefore, when the light receiving device 160 can receive the light emitted from the illuminating light source 150 100%, the flip angle of the substrate jig 120 can be considered to be 180. When a flip angle of a certain substrate jig 120 is not 180 degrees, and there is a certain error, the through hole 122 on the substrate jig 120 and the through hole 122 on the other substrate jig 120 symmetrical thereto are Not in a straight line, the light of the illuminating light source 150 is partially blocked by the substrate holder 120, and therefore, the light receiving device 160 cannot receive the light emitted from the illuminating light source 150 100%. Thus, based on the ratio of the amount of light received by the light receiving device 160, it can be judged whether or not the substrate holder 120 is accurately inverted by 180 degrees. In the embodiment, the illuminating light source 150 is an infrared light source, and the light receiving device 160 is an infrared light receiver. Of course, it can also be other types of illuminating light sources, and is not limited to such a light source.

Compared with the prior art, the coating holder and the coating machine have the advantages of automatically turning over the coated substrate holder and accurately controlling the turning angle.

In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Equivalent modifications or variations made by persons skilled in the art in light of the spirit of the invention are intended to be included within the scope of the following claims.

Coated stent. . . 100

Bracket body. . . 110

Substrate fixture. . . 120

Hold through holes. . . 121

Through hole. . . 122

Magnetic flow control element. . . 130

Rotating shaft. . . 140

The first gear. . . 141

Second gear. . . 142

Luminous light source. . . 150

Light receiving device. . . 160

Coating machine. . . 200

Vacuum container. . . 210

target. . . 220

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a substrate holder for coating film according to a preferred embodiment of the present invention.

2 is a schematic view of a coating machine in accordance with a preferred embodiment of the present invention.

Coated stent. . . 100

Bracket body. . . 110

Substrate fixture. . . 120

Hold through holes. . . 121

Through hole. . . 122

Magnetic flow control element. . . 130

Rotating shaft. . . 140

The first gear. . . 141

Second gear. . . 142

Claims (10)

A coated stent comprises a stent body and at least one substrate holder, wherein each substrate holder and the holder body are connected by a rotating shaft, and the improvement is that a first shaft is arranged on the rotating shaft of each of the substrate holders The gears are respectively provided with a magnetic flow control element, and each of the magnetic flow control elements can drive a second gear that meshes with the first gear, thereby driving the rotating shaft to rotate, and driving the substrate clamp to reverse. The coated stent of claim 1, wherein the magnetic flow control element is an electromagnetic pump, a magnetic current motor or a magnetorheological controller. The coated stent of claim 1, wherein the stent body material is selected from the group consisting of copper, aluminum, and stainless steel. The coated stent of claim 1, wherein the substrate holder material is selected from the group consisting of copper, aluminum, and stainless steel. The coated stent of claim 1, wherein the substrate holders are the same size and symmetrically distributed on the stent body. The coated stent of claim 5, wherein each of the substrate holders has a through hole, and each of the two symmetric substrate holders has a through hole on one axis. A coating machine comprising: a vacuum container; at least one target disposed in the vacuum container; and a coating holder disposed opposite the target, the coating holder having a holder body and at least one substrate holder, each of the bases The sheet clamp and the bracket body are connected by a rotating shaft, and the improvement is that a first gear is disposed on the rotating shaft connected to each of the substrate clamps, and each of the substrate clamps is correspondingly provided with a magnetic flow control element, and each magnetic The flow control element can drive another second gear that meshes with the first gear to drive the rotation of the shaft to drive the substrate holder to flip. The coating machine of claim 7, wherein the magnetic flow control element is an electromagnetic pump, a magnetic current motor or a magnetorheological controller. The coating machine of claim 7, wherein each of the substrate holders has a through hole, and each of the two symmetric substrate holders has a through hole on one axis. The coating machine of claim 9, wherein the coating machine further comprises a light source and a light receiving device, wherein the light source and the light receiving device are disposed on opposite sides of the coating holder and are located on an axis; the light source The emitted light can be received by the light receiving device through the through hole to monitor whether the substrate jig angle of the substrate is 180 degrees.