PH12014000029A1 - Polishing apparatus, and method for polishing and manufacturing glass substrate - Google Patents
Polishing apparatus, and method for polishing and manufacturing glass substrateInfo
- Publication number
- PH12014000029A1 PH12014000029A1 PH12014000029A PH12014000029A PH12014000029A1 PH 12014000029 A1 PH12014000029 A1 PH 12014000029A1 PH 12014000029 A PH12014000029 A PH 12014000029A PH 12014000029 A PH12014000029 A PH 12014000029A PH 12014000029 A1 PH12014000029 A1 PH 12014000029A1
- Authority
- PH
- Philippines
- Prior art keywords
- polishing
- glass substrate
- manufacturing glass
- polishing surface
- polishing apparatus
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Surface Treatment Of Glass (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013008782A JP5983422B2 (ja) | 2013-01-21 | 2013-01-21 | ガラス基板の研磨方法及び製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
PH12014000029A1 true PH12014000029A1 (en) | 2015-07-27 |
Family
ID=51182759
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PH12014000029A PH12014000029A1 (en) | 2013-01-21 | 2014-01-21 | Polishing apparatus, and method for polishing and manufacturing glass substrate |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP5983422B2 (ja) |
CN (1) | CN103934747A (ja) |
PH (1) | PH12014000029A1 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8421684B2 (en) * | 2009-10-01 | 2013-04-16 | Qualcomm Incorporated | Methods and apparatus for beam steering using steerable beam antennas with switched parasitic elements |
JP6589762B2 (ja) * | 2016-07-13 | 2019-10-16 | 株式会社Sumco | 両面研磨装置 |
JP6575463B2 (ja) * | 2016-08-24 | 2019-09-18 | 信越半導体株式会社 | ウェーハの研磨方法 |
CN107584407B (zh) * | 2017-07-08 | 2019-02-19 | 合肥嘉东光学股份有限公司 | 一种激光晶体双面抛光装置 |
JP6938262B2 (ja) * | 2017-07-24 | 2021-09-22 | 株式会社ディスコ | ウエーハの加工方法 |
CN108789133A (zh) * | 2018-07-13 | 2018-11-13 | 航天精工股份有限公司 | 一种适用于轴承套圈的研磨载盘及研磨装置 |
TW202129731A (zh) * | 2019-08-13 | 2021-08-01 | 美商應用材料股份有限公司 | Cmp溫度控制的裝置及方法 |
JP7291795B2 (ja) * | 2019-09-30 | 2023-06-15 | Hoya株式会社 | 基板配置支援治具及び基板の製造方法 |
CN110665589A (zh) * | 2019-10-19 | 2020-01-10 | 王刚 | 一种玉米粉碎机 |
CN110744440A (zh) * | 2019-10-22 | 2020-02-04 | 西安奕斯伟硅片技术有限公司 | 一种双面研磨装置及方法 |
JP6813813B2 (ja) * | 2019-11-26 | 2021-01-13 | 日本電気硝子株式会社 | ガラス板 |
CN115427367A (zh) | 2020-04-23 | 2022-12-02 | Agc株式会社 | 玻璃物品及玻璃物品的制造方法 |
JP7004026B2 (ja) * | 2020-06-12 | 2022-01-21 | 株式会社Sumco | ワークの両面研磨方法、ワークの製造方法、及びワークの両面研磨装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06170728A (ja) * | 1992-11-30 | 1994-06-21 | Naoetsu Seimitsu Kako Kk | 硬脆薄板の研磨方法 |
JP2004141984A (ja) * | 2002-10-22 | 2004-05-20 | Hoya Corp | マスクブランクス用基板の製造方法 |
JP2004306173A (ja) * | 2003-04-03 | 2004-11-04 | Sharp Corp | 基板研磨装置 |
JP5454180B2 (ja) * | 2010-02-02 | 2014-03-26 | 旭硝子株式会社 | 磁気記録媒体用ガラス基板の製造方法及び磁気記録媒体用ガラス基板 |
-
2013
- 2013-01-21 JP JP2013008782A patent/JP5983422B2/ja active Active
-
2014
- 2014-01-21 PH PH12014000029A patent/PH12014000029A1/en unknown
- 2014-01-21 CN CN201410027681.0A patent/CN103934747A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
JP2014138973A (ja) | 2014-07-31 |
CN103934747A (zh) | 2014-07-23 |
JP5983422B2 (ja) | 2016-08-31 |
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