NO309300B1 - Kapasitiv transduser med tilbakekopling ved elektrostatisk kraftpåvirkning, og fremgangsmåte for styring av profilen av dens aktive transduserelement - Google Patents
Kapasitiv transduser med tilbakekopling ved elektrostatisk kraftpåvirkning, og fremgangsmåte for styring av profilen av dens aktive transduserelement Download PDFInfo
- Publication number
- NO309300B1 NO309300B1 NO943069A NO943069A NO309300B1 NO 309300 B1 NO309300 B1 NO 309300B1 NO 943069 A NO943069 A NO 943069A NO 943069 A NO943069 A NO 943069A NO 309300 B1 NO309300 B1 NO 309300B1
- Authority
- NO
- Norway
- Prior art keywords
- transducer
- electrodes
- membrane
- electrode
- transducer element
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 10
- 239000012528 membrane Substances 0.000 claims description 64
- 238000005259 measurement Methods 0.000 claims description 23
- 230000001105 regulatory effect Effects 0.000 claims description 10
- 230000000694 effects Effects 0.000 claims description 5
- 230000001276 controlling effect Effects 0.000 claims description 3
- 239000011159 matrix material Substances 0.000 claims description 2
- 230000006978 adaptation Effects 0.000 claims 1
- 230000005284 excitation Effects 0.000 claims 1
- 239000002184 metal Substances 0.000 description 14
- 238000012546 transfer Methods 0.000 description 11
- 239000003990 capacitor Substances 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000010276 construction Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000012886 linear function Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000008844 regulatory mechanism Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/004—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by the use of counterbalancing forces
- G01L11/008—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by the use of counterbalancing forces electrostatic or electromagnetic counterbalancing forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Measuring Fluid Pressure (AREA)
- Feedback Control In General (AREA)
- Transducers For Ultrasonic Waves (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FI933670A FI93579C (sv) | 1993-08-20 | 1993-08-20 | Kapacitiv givare som är återkopplad med elektrostatisk kraft och förfarande för styrning av formen hos dess aktiva element |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| NO943069D0 NO943069D0 (no) | 1994-08-19 |
| NO943069L NO943069L (no) | 1995-02-21 |
| NO309300B1 true NO309300B1 (no) | 2001-01-08 |
Family
ID=8538447
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NO943069A NO309300B1 (no) | 1993-08-20 | 1994-08-19 | Kapasitiv transduser med tilbakekopling ved elektrostatisk kraftpåvirkning, og fremgangsmåte for styring av profilen av dens aktive transduserelement |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US5531128A (sv) |
| EP (1) | EP0639755B1 (sv) |
| JP (1) | JP3369316B2 (sv) |
| CA (1) | CA2130364C (sv) |
| DE (1) | DE69414783T2 (sv) |
| FI (1) | FI93579C (sv) |
| NO (1) | NO309300B1 (sv) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FI93580C (sv) * | 1993-10-08 | 1995-04-25 | Vaisala Oy | Förfarande och anordning för återkoppling av en osymmetrisk tryckskillnadsgivare |
| FI102783B1 (sv) * | 1994-12-22 | 1999-02-15 | Vaisala Oyj | Förfarande för linearisering av en strömhastighetsgivare samt lineariserad strömhastighetsmätanordning |
| US5916179A (en) * | 1997-04-18 | 1999-06-29 | Sharrock; Nigel | System and method for reducing iatrogenic damage to nerves |
| US20040099061A1 (en) * | 1997-12-22 | 2004-05-27 | Mks Instruments | Pressure sensor for detecting small pressure differences and low pressures |
| FI105237B (sv) | 1998-06-24 | 2000-06-30 | Valtion Teknillinen | Kiselmikromekanisk våg |
| FI20000339A (sv) | 2000-02-16 | 2001-08-16 | Nokia Mobile Phones Ltd | Mikromekanisk reglerbar kondensator och integrerad reglerbar resonator |
| DE10122912A1 (de) * | 2001-05-11 | 2002-11-21 | Infineon Technologies Ag | Vorrichtung und Verfahren zum Erzeugen einer vorbestimmten Positionsbeziehung zweier zueinander beweglicher Elektroden |
| US6813954B2 (en) * | 2001-05-25 | 2004-11-09 | Panametrics, Inc. | High sensitivity pressure sensor with long term stability |
| WO2003009319A1 (en) * | 2001-07-17 | 2003-01-30 | Redwood Microsystems, Inc. | Micro-electromechanical sensor |
| DE60319770T2 (de) | 2002-05-29 | 2009-04-23 | Imec Vzw, Interuniversitair Microelectronica Centrum Vzw | Gerät und Verfahren, um die Leistung von Mikromaschinen oder mikroelektromechanischen Bauelementen zu bestimmen |
| EP1367405B1 (en) * | 2002-05-29 | 2008-03-19 | IMEC vzw, Interuniversitair Microelectronica Centrum vzw | Apparatus and method for determining the performance of micro machined or microelectromechanical devices |
| EP1382977A1 (en) * | 2002-07-19 | 2004-01-21 | IMEC vzw, Interuniversitair Microelectronica Centrum vzw | Apparatus and method for determining the performance of micro machines or microelectromechanical devices |
| FR2858854B1 (fr) * | 2003-08-13 | 2005-12-16 | Sercel Rech Const Elect | Accelerometre a vibrations parasites reduites par rappel ameliore |
| US6877382B1 (en) * | 2003-10-20 | 2005-04-12 | Robert D Gourlay | Inhalation detector |
| JP4103877B2 (ja) * | 2004-09-22 | 2008-06-18 | セイコーエプソン株式会社 | 静電型超音波トランスデューサ及び超音波スピーカ |
| US7137301B2 (en) | 2004-10-07 | 2006-11-21 | Mks Instruments, Inc. | Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor |
| US7141447B2 (en) * | 2004-10-07 | 2006-11-28 | Mks Instruments, Inc. | Method of forming a seal between a housing and a diaphragm of a capacitance sensor |
| JP5169608B2 (ja) * | 2008-08-08 | 2013-03-27 | 富士電機株式会社 | 静電容量式圧力センサおよび静電容量式圧力検出装置 |
| DE102012111533A1 (de) | 2012-11-28 | 2014-05-28 | Endress + Hauser Gmbh + Co. Kg | Druckmesszelle |
| CN104555882B (zh) * | 2013-10-10 | 2016-03-23 | 原相科技股份有限公司 | 微机电元件与微机电补偿结构 |
| FR3054861B1 (fr) * | 2016-08-02 | 2019-08-23 | Zodiac Aerotechnics | Procede de pilotage d'une pompe a membrane ondulante, et systeme pilote de pompe a membrane ondulante |
| AT520420B1 (de) * | 2017-08-09 | 2019-07-15 | Anton Paar Gmbh | Kapazitive Wegmessvorrichtung zum Messen einer Weginformation eines Sondenkörpers |
| DE102017131066A1 (de) * | 2017-12-22 | 2019-06-27 | Endress+Hauser SE+Co. KG | Verfahren zum Bereitstellen von kalibrierten Druckmessumformern |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3229530A (en) * | 1960-12-12 | 1966-01-18 | North American Aviation Inc | Accelerometer |
| GB1138401A (en) * | 1965-05-06 | 1969-01-01 | Mallory & Co Inc P R | Bonding |
| US3602047A (en) * | 1969-06-24 | 1971-08-31 | Kistler Instr Corp | Servo pressure transducer |
| JPS5516228A (en) * | 1978-07-21 | 1980-02-04 | Hitachi Ltd | Capacity type sensor |
| US4340409A (en) * | 1979-04-16 | 1982-07-20 | The Bendix Corporation | Method of fabricating a pressure sensor |
| US4386453A (en) * | 1979-09-04 | 1983-06-07 | Ford Motor Company | Method for manufacturing variable capacitance pressure transducers |
| US4332000A (en) * | 1980-10-03 | 1982-05-25 | International Business Machines Corporation | Capacitive pressure transducer |
| US4390925A (en) * | 1981-08-26 | 1983-06-28 | Leeds & Northrup Company | Multiple-cavity variable capacitance pressure transducer |
| DE3463849D1 (en) * | 1983-03-03 | 1987-06-25 | Onera (Off Nat Aerospatiale) | Electrostatic accelerometer |
| FI69211C (fi) * | 1984-02-21 | 1985-12-10 | Vaisala Oy | Kapacitiv styckgivare |
| FI74350C (sv) * | 1984-02-21 | 1988-01-11 | Vaisala Oy | Kapacitiv absoluttryckgivare. |
| FI71015C (fi) * | 1984-02-21 | 1986-10-27 | Vaisala Oy | Temperaturoberoende kapacitiv tryckgivare |
| US4679434A (en) * | 1985-07-25 | 1987-07-14 | Litton Systems, Inc. | Integrated force balanced accelerometer |
| FI872049A (fi) * | 1987-05-08 | 1988-11-09 | Vaisala Oy | Kondensatorkonstruktion foer anvaendning vid tryckgivare. |
| US5211051A (en) * | 1987-11-09 | 1993-05-18 | California Institute Of Technology | Methods and apparatus for improving sensor performance |
| JPH0672899B2 (ja) * | 1988-04-01 | 1994-09-14 | 株式会社日立製作所 | 加速度センサ |
| US5019783A (en) * | 1989-01-30 | 1991-05-28 | Dresser Industries, Inc. | Precision transducer circuit and linearization method |
| US5028876A (en) * | 1989-01-30 | 1991-07-02 | Dresser Industries, Inc. | Precision capacitive transducer circuits and methods |
| US5048165A (en) * | 1989-01-30 | 1991-09-17 | Dresser Industries, Inc. | Method for controlling the sensitivity and linearity of capacitive transducer systems |
| US4996627A (en) * | 1989-01-30 | 1991-02-26 | Dresser Industries, Inc. | High sensitivity miniature pressure transducer |
| US5085070A (en) * | 1990-02-07 | 1992-02-04 | At&T Bell Laboratories | Capacitive force-balance system for measuring small forces and pressures |
-
1993
- 1993-08-20 FI FI933670A patent/FI93579C/sv active IP Right Grant
-
1994
- 1994-08-17 EP EP94306067A patent/EP0639755B1/en not_active Expired - Lifetime
- 1994-08-17 DE DE69414783T patent/DE69414783T2/de not_active Expired - Lifetime
- 1994-08-18 CA CA002130364A patent/CA2130364C/en not_active Expired - Fee Related
- 1994-08-19 NO NO943069A patent/NO309300B1/no not_active IP Right Cessation
- 1994-08-19 US US08/293,463 patent/US5531128A/en not_active Expired - Lifetime
- 1994-08-22 JP JP19666094A patent/JP3369316B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CA2130364A1 (en) | 1995-02-21 |
| FI93579C (sv) | 1995-04-25 |
| DE69414783T2 (de) | 1999-07-29 |
| EP0639755B1 (en) | 1998-11-25 |
| US5531128A (en) | 1996-07-02 |
| CA2130364C (en) | 2002-01-22 |
| NO943069L (no) | 1995-02-21 |
| FI933670A0 (sv) | 1993-08-20 |
| EP0639755A2 (en) | 1995-02-22 |
| FI93579B (sv) | 1995-01-13 |
| JP3369316B2 (ja) | 2003-01-20 |
| EP0639755A3 (en) | 1996-01-17 |
| JPH0792046A (ja) | 1995-04-07 |
| DE69414783D1 (de) | 1999-01-07 |
| NO943069D0 (no) | 1994-08-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM1K | Lapsed by not paying the annual fees |