FI105237B - Kiselmikromekanisk våg - Google Patents

Kiselmikromekanisk våg Download PDF

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Publication number
FI105237B
FI105237B FI982832A FI982832A FI105237B FI 105237 B FI105237 B FI 105237B FI 982832 A FI982832 A FI 982832A FI 982832 A FI982832 A FI 982832A FI 105237 B FI105237 B FI 105237B
Authority
FI
Finland
Prior art keywords
electrodes
road
mass
silicon
electrode
Prior art date
Application number
FI982832A
Other languages
English (en)
Finnish (fi)
Other versions
FI982832A (sv
FI982832A0 (sv
Inventor
Heikki Seppae
Aarne Oja
Teuvo Sillanpaeae
Original Assignee
Valtion Teknillinen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FI981458A external-priority patent/FI981458A0/sv
Application filed by Valtion Teknillinen filed Critical Valtion Teknillinen
Priority to FI982832A priority Critical patent/FI105237B/sv
Publication of FI982832A0 publication Critical patent/FI982832A0/sv
Priority to US09/720,112 priority patent/US6513388B1/en
Priority to PCT/FI1999/000538 priority patent/WO1999067605A1/en
Publication of FI982832A publication Critical patent/FI982832A/sv
Application granted granted Critical
Publication of FI105237B publication Critical patent/FI105237B/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01G—WEIGHING
    • G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
    • G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01G—WEIGHING
    • G01G7/00—Weighing apparatus wherein the balancing is effected by magnetic, electromagnetic, or electrostatic action, or by means not provided for in the preceding groups
    • G01G7/06—Weighing apparatus wherein the balancing is effected by magnetic, electromagnetic, or electrostatic action, or by means not provided for in the preceding groups by electrostatic action

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Pressure Sensors (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)

Claims (4)

1. En kiselmikromekansik väg (26) som omfattar minst tvä elektroder (2,15), 5 framställda pä sä sätt att de är konduktiva, vilka befinner sig pä ett avständ ifrän varandra, varvid en av de elastiskt upphängda elektrodytoma (2), eller en konstruktion som förenas med denna, fungerar som vägens vägyta kännetecknad av att vägen (26) omfattar apparatur (21) vars funktion är att hälla elektrodema (2,15) pä ett konstant avständ ifrän varandra oberoende av massans 10 kvantitet, varvid det vägda objektets massa kan fastställas pä basen av äterkopplingsstymingen (Uf), samt av att minst en av elektrodema (2,15) är delad i minst tvä delar för att möjliggöra styming av elektrodytoma tili ett väsentligen parallelt läge genom separat styming av kraftema som päverkar enskilda elektroddelar. 15
2. Väg enligt patentkrav 1, kännetecknad av att vägen (26) omfattar apparatur för fastställandet av avständet mellan elektrodema (2,15) för fastställandet av massan. 20
3. Väg enligt patentkrav 1, kännetecknad av att elektrodema (2, 15) är väsentligen planformade. I I I I I i i i M · • · · • · • · • ♦ · t · f • · • « * · · • · · • · • · • · f • f · • · • · > • · · • · · • · · r * ‘t i ( f I · IH i I I I • « I » · · I·· • · % · • · · « » t · * » · · • > I · • » I a · • · • · »
FI982832A 1998-06-24 1998-12-30 Kiselmikromekanisk våg FI105237B (sv)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FI982832A FI105237B (sv) 1998-06-24 1998-12-30 Kiselmikromekanisk våg
US09/720,112 US6513388B1 (en) 1998-06-24 1999-06-18 Micromechanical precision silicon scale
PCT/FI1999/000538 WO1999067605A1 (en) 1998-06-24 1999-06-18 Micromechanical precision silicon scale

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
FI981458 1998-06-24
FI981458A FI981458A0 (sv) 1998-06-24 1998-06-24 Kiselmikromekanisk våg
FI982832A FI105237B (sv) 1998-06-24 1998-12-30 Kiselmikromekanisk våg
FI982832 1998-12-30

Publications (3)

Publication Number Publication Date
FI982832A0 FI982832A0 (sv) 1998-12-30
FI982832A FI982832A (sv) 1999-12-25
FI105237B true FI105237B (sv) 2000-06-30

Family

ID=26160609

Family Applications (1)

Application Number Title Priority Date Filing Date
FI982832A FI105237B (sv) 1998-06-24 1998-12-30 Kiselmikromekanisk våg

Country Status (3)

Country Link
US (1) US6513388B1 (sv)
FI (1) FI105237B (sv)
WO (1) WO1999067605A1 (sv)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1794792A4 (en) * 2004-09-29 2010-02-17 Loadstar Sensors Inc DISTANCE CHANGE DETECTION BY CAPACITIVE TECHNIQUES
US20090120198A1 (en) * 2005-09-28 2009-05-14 Dallenbach William D Gap-change sensing through capacitive techniques
US7343814B2 (en) * 2006-04-03 2008-03-18 Loadstar Sensors, Inc. Multi-zone capacitive force sensing device and methods
ITBO20080516A1 (it) * 2008-08-07 2010-02-08 Sortron S R L Dispositivo per misurare il peso di un oggetto
CN103207004B (zh) * 2013-04-12 2015-11-25 昆山禾信质谱技术有限公司 基于微振荡法测量颗粒物质量的装置
US9645029B2 (en) * 2014-04-07 2017-05-09 Infineon Technology Ag Force feedback loop for pressure sensors
CN106500652B (zh) * 2016-11-14 2019-08-06 河海大学 一种随动多点接触式环向应变测量装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH662181A5 (de) 1983-09-16 1987-09-15 Mettler Instrumente Ag Kraftmesser.
NL8500139A (nl) 1985-01-21 1986-08-18 Advanced Micro Electronic Capacitief weegtoestel.
US4738324A (en) * 1987-02-24 1988-04-19 Borchard John S Self-adjusting weighing system
US4960177A (en) 1988-06-03 1990-10-02 University Of Hawaii Silicon membrane micro-scale
US5473945A (en) * 1990-02-14 1995-12-12 The Charles Stark Draper Laboratory, Inc. Micromechanical angular accelerometer with auxiliary linear accelerometer
US5291534A (en) * 1991-06-22 1994-03-01 Toyoda Koki Kabushiki Kaisha Capacitive sensing device
FI93579C (sv) * 1993-08-20 1995-04-25 Vaisala Oy Kapacitiv givare som är återkopplad med elektrostatisk kraft och förfarande för styrning av formen hos dess aktiva element
FI93580C (sv) * 1993-10-08 1995-04-25 Vaisala Oy Förfarande och anordning för återkoppling av en osymmetrisk tryckskillnadsgivare
US5684276A (en) 1995-12-12 1997-11-04 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Micromechanical oscillating mass balance
EP0967468A1 (en) * 1998-06-26 1999-12-29 Bossard AG Capacitive force sensor

Also Published As

Publication number Publication date
FI982832A (sv) 1999-12-25
FI982832A0 (sv) 1998-12-30
US6513388B1 (en) 2003-02-04
WO1999067605A1 (en) 1999-12-29

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