NL9100205A - Inrichting voor het optisch meten van de hoogte van een oppervlak. - Google Patents

Inrichting voor het optisch meten van de hoogte van een oppervlak. Download PDF

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Publication number
NL9100205A
NL9100205A NL9100205A NL9100205A NL9100205A NL 9100205 A NL9100205 A NL 9100205A NL 9100205 A NL9100205 A NL 9100205A NL 9100205 A NL9100205 A NL 9100205A NL 9100205 A NL9100205 A NL 9100205A
Authority
NL
Netherlands
Prior art keywords
radiation
sensitive
detection systems
spot
optical
Prior art date
Application number
NL9100205A
Other languages
English (en)
Dutch (nl)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Priority to NL9100205A priority Critical patent/NL9100205A/nl
Priority to US07/827,192 priority patent/US5329358A/en
Priority to EP92200251A priority patent/EP0498495B1/fr
Priority to DE69211171T priority patent/DE69211171T2/de
Priority to JP4017919A priority patent/JPH04319615A/ja
Publication of NL9100205A publication Critical patent/NL9100205A/nl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
NL9100205A 1991-02-06 1991-02-06 Inrichting voor het optisch meten van de hoogte van een oppervlak. NL9100205A (nl)

Priority Applications (5)

Application Number Priority Date Filing Date Title
NL9100205A NL9100205A (nl) 1991-02-06 1991-02-06 Inrichting voor het optisch meten van de hoogte van een oppervlak.
US07/827,192 US5329358A (en) 1991-02-06 1992-01-28 Device for optically measuring the height of a surface
EP92200251A EP0498495B1 (fr) 1991-02-06 1992-01-29 Dispositif pour la mesure optique de la hauteur d'une surface
DE69211171T DE69211171T2 (de) 1991-02-06 1992-01-29 Anordnung zum optischen Messen der Höhe einer Oberfläche
JP4017919A JPH04319615A (ja) 1991-02-06 1992-02-03 光学式高さ測定装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL9100205A NL9100205A (nl) 1991-02-06 1991-02-06 Inrichting voor het optisch meten van de hoogte van een oppervlak.
NL9100205 1991-02-06

Publications (1)

Publication Number Publication Date
NL9100205A true NL9100205A (nl) 1992-09-01

Family

ID=19858833

Family Applications (1)

Application Number Title Priority Date Filing Date
NL9100205A NL9100205A (nl) 1991-02-06 1991-02-06 Inrichting voor het optisch meten van de hoogte van een oppervlak.

Country Status (5)

Country Link
US (1) US5329358A (fr)
EP (1) EP0498495B1 (fr)
JP (1) JPH04319615A (fr)
DE (1) DE69211171T2 (fr)
NL (1) NL9100205A (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997002466A1 (fr) * 1995-06-30 1997-01-23 Siemens Aktiengesellschaft Capteur optique de distance
US5760891A (en) * 1995-08-25 1998-06-02 Eastman Kodak Company Wound web roll sidewall quality measurement
US6034764A (en) * 1996-03-20 2000-03-07 Carter; Robert J. Portable electronic distance and vertical angle instrument
DE19816271C1 (de) * 1998-04-11 2000-01-13 Werth Messtechnik Gmbh Verfahren und Vorrichtung zur Profilbestimmung einer Materialoberfläche
US6731383B2 (en) * 2000-09-12 2004-05-04 August Technology Corp. Confocal 3D inspection system and process
US20020148984A1 (en) * 2001-02-09 2002-10-17 Cory Watkins Confocal 3D inspection system and process
US20020145734A1 (en) * 2001-02-09 2002-10-10 Cory Watkins Confocal 3D inspection system and process
US6870609B2 (en) * 2001-02-09 2005-03-22 August Technology Corp. Confocal 3D inspection system and process
US6882415B1 (en) 2001-07-16 2005-04-19 August Technology Corp. Confocal 3D inspection system and process
US6970287B1 (en) 2001-07-16 2005-11-29 August Technology Corp. Confocal 3D inspection system and process
US20030025918A1 (en) * 2001-07-16 2003-02-06 August Technology Corp. Confocal 3D inspection system and process
TWI398745B (zh) * 2009-03-06 2013-06-11 Ind Tech Res Inst 基於光線強度的定位方法及系統
US9405000B2 (en) 2009-03-06 2016-08-02 Industrial Technology Research Institute Positioning method and positioning system based on light intensity
JP5381613B2 (ja) * 2009-10-23 2014-01-08 富士通株式会社 光走査装置および光走査方法
FI127908B (en) * 2015-09-22 2019-05-15 Teknologian Tutkimuskeskus Vtt Oy Method and apparatus for measuring surface height

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0137772A1 (fr) * 1983-02-14 1985-04-24 The Coe Manufacturing Company Procede et appareil pour determiner la position optique d'un faisceau analyseur
JPS60194301A (ja) * 1984-03-15 1985-10-02 Matsushita Electric Works Ltd 距離検出装置
US4681450A (en) * 1985-06-21 1987-07-21 Research Corporation Photodetector arrangement for measuring the state of polarization of light
JPH0619244B2 (ja) * 1985-09-30 1994-03-16 横河電機株式会社 変位変換器
NL8503182A (nl) * 1985-11-19 1987-06-16 Philips Nv Inrichting voor het langs optische weg meten van een oppervlakteprofiel.
JPS6473214A (en) * 1987-09-14 1989-03-17 Mitutoyo Corp Non-contact displacement meter

Also Published As

Publication number Publication date
EP0498495B1 (fr) 1996-06-05
EP0498495A1 (fr) 1992-08-12
US5329358A (en) 1994-07-12
DE69211171D1 (de) 1996-07-11
JPH04319615A (ja) 1992-11-10
DE69211171T2 (de) 1996-12-05

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A1B A search report has been drawn up
BV The patent application has lapsed