NL8503217A - Preparaathouder. - Google Patents

Preparaathouder. Download PDF

Info

Publication number
NL8503217A
NL8503217A NL8503217A NL8503217A NL8503217A NL 8503217 A NL8503217 A NL 8503217A NL 8503217 A NL8503217 A NL 8503217A NL 8503217 A NL8503217 A NL 8503217A NL 8503217 A NL8503217 A NL 8503217A
Authority
NL
Netherlands
Prior art keywords
samples
holder
vacuum
grinding
preparation
Prior art date
Application number
NL8503217A
Other languages
English (en)
Dutch (nl)
Original Assignee
Hoogovens Groep Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoogovens Groep Bv filed Critical Hoogovens Groep Bv
Priority to NL8503217A priority Critical patent/NL8503217A/nl
Priority to DE19868631087 priority patent/DE8631087U1/de
Publication of NL8503217A publication Critical patent/NL8503217A/nl

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/32—Polishing; Etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)
NL8503217A 1985-11-22 1985-11-22 Preparaathouder. NL8503217A (nl)

Priority Applications (2)

Application Number Priority Date Filing Date Title
NL8503217A NL8503217A (nl) 1985-11-22 1985-11-22 Preparaathouder.
DE19868631087 DE8631087U1 (es) 1985-11-22 1986-11-20

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL8503217A NL8503217A (nl) 1985-11-22 1985-11-22 Preparaathouder.
NL8503217 1985-11-22

Publications (1)

Publication Number Publication Date
NL8503217A true NL8503217A (nl) 1987-06-16

Family

ID=19846905

Family Applications (1)

Application Number Title Priority Date Filing Date
NL8503217A NL8503217A (nl) 1985-11-22 1985-11-22 Preparaathouder.

Country Status (2)

Country Link
DE (1) DE8631087U1 (es)
NL (1) NL8503217A (es)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW353203B (en) * 1995-04-10 1999-02-21 Matsushita Electric Ind Co Ltd Apparatus for holding substrate to be polished
US6024630A (en) 1995-06-09 2000-02-15 Applied Materials, Inc. Fluid-pressure regulated wafer polishing head
US6183354B1 (en) 1996-11-08 2001-02-06 Applied Materials, Inc. Carrier head with a flexible membrane for a chemical mechanical polishing system
US6146259A (en) * 1996-11-08 2000-11-14 Applied Materials, Inc. Carrier head with local pressure control for a chemical mechanical polishing apparatus
US6398621B1 (en) 1997-05-23 2002-06-04 Applied Materials, Inc. Carrier head with a substrate sensor
US5957751A (en) * 1997-05-23 1999-09-28 Applied Materials, Inc. Carrier head with a substrate detection mechanism for a chemical mechanical polishing system
US5964653A (en) 1997-07-11 1999-10-12 Applied Materials, Inc. Carrier head with a flexible membrane for a chemical mechanical polishing system
US6080050A (en) 1997-12-31 2000-06-27 Applied Materials, Inc. Carrier head including a flexible membrane and a compliant backing member for a chemical mechanical polishing apparatus
US5993302A (en) * 1997-12-31 1999-11-30 Applied Materials, Inc. Carrier head with a removable retaining ring for a chemical mechanical polishing apparatus
US6422927B1 (en) 1998-12-30 2002-07-23 Applied Materials, Inc. Carrier head with controllable pressure and loading area for chemical mechanical polishing
US6386947B2 (en) 2000-02-29 2002-05-14 Applied Materials, Inc. Method and apparatus for detecting wafer slipouts
US6722965B2 (en) 2000-07-11 2004-04-20 Applied Materials Inc. Carrier head with flexible membranes to provide controllable pressure and loading area
US6857945B1 (en) 2000-07-25 2005-02-22 Applied Materials, Inc. Multi-chamber carrier head with a flexible membrane
US7198561B2 (en) 2000-07-25 2007-04-03 Applied Materials, Inc. Flexible membrane for multi-chamber carrier head
US7255771B2 (en) 2004-03-26 2007-08-14 Applied Materials, Inc. Multiple zone carrier head with flexible membrane

Also Published As

Publication number Publication date
DE8631087U1 (es) 1987-03-05

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Legal Events

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A1B A search report has been drawn up
BV The patent application has lapsed