NL8300941A - Werkwijze en inrichting voor het vervaardigen van een fotovoltaische inrichting. - Google Patents
Werkwijze en inrichting voor het vervaardigen van een fotovoltaische inrichting. Download PDFInfo
- Publication number
- NL8300941A NL8300941A NL8300941A NL8300941A NL8300941A NL 8300941 A NL8300941 A NL 8300941A NL 8300941 A NL8300941 A NL 8300941A NL 8300941 A NL8300941 A NL 8300941A NL 8300941 A NL8300941 A NL 8300941A
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- NL
- Netherlands
- Prior art keywords
- chamber
- chambers
- substrate material
- deposition
- substrate
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
- H01L31/206—Particular processes or apparatus for continuous treatment of the devices, e.g. roll-to roll processes, multi-chamber deposition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A40/00—Adaptation technologies in agriculture, forestry, livestock or agroalimentary production
- Y02A40/90—Adaptation technologies in agriculture, forestry, livestock or agroalimentary production in food processing or handling, e.g. food conservation
- Y02A40/963—Off-grid food refrigeration
- Y02A40/966—Powered by renewable energy sources
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Plasma & Fusion (AREA)
- Photovoltaic Devices (AREA)
- Chemical Vapour Deposition (AREA)
- Preparation Of Compounds By Using Micro-Organisms (AREA)
- Micro-Organisms Or Cultivation Processes Thereof (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US35982582 | 1982-03-19 | ||
| US06/359,825 US4492181A (en) | 1982-03-19 | 1982-03-19 | Apparatus for continuously producing tandem amorphous photovoltaic cells |
| US46062983 | 1983-01-24 | ||
| US06/460,629 US4485125A (en) | 1982-03-19 | 1983-01-24 | Method for continuously producing tandem amorphous photovoltaic cells |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL8300941A true NL8300941A (nl) | 1983-10-17 |
Family
ID=27000645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL8300941A NL8300941A (nl) | 1982-03-19 | 1983-03-15 | Werkwijze en inrichting voor het vervaardigen van een fotovoltaische inrichting. |
Country Status (19)
| Country | Link |
|---|---|
| US (1) | US4485125A (sv) |
| KR (1) | KR840004311A (sv) |
| AU (1) | AU1241483A (sv) |
| BR (1) | BR8301264A (sv) |
| CA (1) | CA1188398A (sv) |
| DE (1) | DE3309079A1 (sv) |
| EG (1) | EG15199A (sv) |
| ES (1) | ES520583A0 (sv) |
| FR (1) | FR2542137A1 (sv) |
| GB (1) | GB2117800B (sv) |
| GR (1) | GR82635B (sv) |
| IE (1) | IE54229B1 (sv) |
| IL (1) | IL68248A (sv) |
| IN (1) | IN157932B (sv) |
| IT (1) | IT1160801B (sv) |
| MX (1) | MX153415A (sv) |
| NL (1) | NL8300941A (sv) |
| PH (1) | PH19696A (sv) |
| SE (1) | SE8301364L (sv) |
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| DE3429899A1 (de) * | 1983-08-16 | 1985-03-07 | Canon K.K., Tokio/Tokyo | Verfahren zur bildung eines abscheidungsfilms |
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| JP2021527170A (ja) * | 2018-06-14 | 2021-10-11 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | フレキシブル基板を誘導するためのローラデバイス、フレキシブル基板を搬送するためのローラデバイスの使用、真空処理装置、及びフレキシブル基板を処理する方法 |
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| GB724799A (en) * | 1953-02-20 | 1955-02-23 | Ohio Commw Eng Co | Method and apparatus for continuously plating irregularly shaped objects |
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| US4015558A (en) * | 1972-12-04 | 1977-04-05 | Optical Coating Laboratory, Inc. | Vapor deposition apparatus |
| JPS55125680A (en) * | 1979-03-20 | 1980-09-27 | Yoshihiro Hamakawa | Photovoltaic element |
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-
1983
- 1983-01-24 US US06/460,629 patent/US4485125A/en not_active Expired - Lifetime
- 1983-03-10 PH PH28628A patent/PH19696A/en unknown
- 1983-03-11 AU AU12414/83A patent/AU1241483A/en not_active Abandoned
- 1983-03-11 IT IT20045/83A patent/IT1160801B/it active
- 1983-03-11 IN IN301/CAL/83A patent/IN157932B/en unknown
- 1983-03-14 EG EG83171A patent/EG15199A/xx active
- 1983-03-14 GB GB08306966A patent/GB2117800B/en not_active Expired
- 1983-03-14 FR FR8304135A patent/FR2542137A1/fr not_active Withdrawn
- 1983-03-14 DE DE19833309079 patent/DE3309079A1/de not_active Withdrawn
- 1983-03-14 SE SE8301364A patent/SE8301364L/sv not_active Application Discontinuation
- 1983-03-14 BR BR8301264A patent/BR8301264A/pt unknown
- 1983-03-14 ES ES520583A patent/ES520583A0/es active Granted
- 1983-03-14 MX MX196561A patent/MX153415A/es unknown
- 1983-03-14 IE IE541/83A patent/IE54229B1/en not_active IP Right Cessation
- 1983-03-15 NL NL8300941A patent/NL8300941A/nl not_active Application Discontinuation
- 1983-03-15 GR GR70787A patent/GR82635B/el unknown
- 1983-03-18 CA CA000423993A patent/CA1188398A/en not_active Expired
- 1983-03-19 KR KR1019830001119A patent/KR840004311A/ko not_active Application Discontinuation
- 1983-03-25 IL IL68248A patent/IL68248A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| PH19696A (en) | 1986-06-13 |
| US4485125A (en) | 1984-11-27 |
| EG15199A (en) | 1986-03-31 |
| GB8306966D0 (en) | 1983-04-20 |
| IE54229B1 (en) | 1989-07-19 |
| SE8301364L (sv) | 1983-09-20 |
| DE3309079A1 (de) | 1983-09-29 |
| SE8301364D0 (sv) | 1983-03-14 |
| GB2117800A (en) | 1983-10-19 |
| BR8301264A (pt) | 1983-11-22 |
| KR840004311A (ko) | 1984-10-10 |
| ES8403247A1 (es) | 1984-03-01 |
| CA1188398A (en) | 1985-06-04 |
| GB2117800B (en) | 1986-06-18 |
| IT8320045A1 (it) | 1984-09-11 |
| AU1241483A (en) | 1983-10-20 |
| IN157932B (sv) | 1986-07-26 |
| MX153415A (es) | 1986-10-07 |
| IT8320045A0 (it) | 1983-03-11 |
| IT1160801B (it) | 1987-03-11 |
| FR2542137A1 (fr) | 1984-09-07 |
| IE830541L (en) | 1983-09-19 |
| ES520583A0 (es) | 1984-03-01 |
| IL68248A (en) | 1986-08-31 |
| GR82635B (sv) | 1985-02-07 |
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