NL7605255A - Microwave discharge ion source - has ion beam with rectangular cross section, generated through extraction electrodes including rectangular slits - Google Patents

Microwave discharge ion source - has ion beam with rectangular cross section, generated through extraction electrodes including rectangular slits

Info

Publication number
NL7605255A
NL7605255A NL7605255A NL7605255A NL7605255A NL 7605255 A NL7605255 A NL 7605255A NL 7605255 A NL7605255 A NL 7605255A NL 7605255 A NL7605255 A NL 7605255A NL 7605255 A NL7605255 A NL 7605255A
Authority
NL
Netherlands
Prior art keywords
ion beam
section
rectangular cross
generated
extraction electrodes
Prior art date
Application number
NL7605255A
Other languages
Dutch (nl)
Other versions
NL169392B (en
NL169392C (en
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to NL7605255A priority Critical patent/NL169392C/en
Publication of NL7605255A publication Critical patent/NL7605255A/en
Publication of NL169392B publication Critical patent/NL169392B/en
Application granted granted Critical
Publication of NL169392C publication Critical patent/NL169392C/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

The ion source for emitting an efficient radiation of ion beam having a rectangular cross section includes a set of parallel electrodes to which a microwave power is supplied to generate a microwave electric field in an electrode gap. A DC magnetic field is applied in a direction along the opposing surfaces of the electrodes to provide a microwave discharge in the electrode gap in cooperation, with the microwave electric field crossing there. The electrode gap or discharge space has a rectangular cross section perpendicular to a direction along which ions are extracted as an ion beam. The ion beam having the rectangular cross section is generated through one or more extraction electrodes which include rectangular slits.
NL7605255A 1976-05-17 1976-05-17 ION SOURCE WITH MICROWAVE DISCHARGE. NL169392C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
NL7605255A NL169392C (en) 1976-05-17 1976-05-17 ION SOURCE WITH MICROWAVE DISCHARGE.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7605255A NL169392C (en) 1976-05-17 1976-05-17 ION SOURCE WITH MICROWAVE DISCHARGE.

Publications (3)

Publication Number Publication Date
NL7605255A true NL7605255A (en) 1977-11-21
NL169392B NL169392B (en) 1982-02-01
NL169392C NL169392C (en) 1982-07-01

Family

ID=19826212

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7605255A NL169392C (en) 1976-05-17 1976-05-17 ION SOURCE WITH MICROWAVE DISCHARGE.

Country Status (1)

Country Link
NL (1) NL169392C (en)

Also Published As

Publication number Publication date
NL169392B (en) 1982-02-01
NL169392C (en) 1982-07-01

Similar Documents

Publication Publication Date Title
SE8205250L (en) PLASMA PACKAGING FOR PLANNING TRANSFERS
ES366386A1 (en) Apparatus for generating fusion reactions
ES8701239A1 (en) Control of scale formation.
ES417248A1 (en) Electric device for the treatment of a gaseous fluid
GB1190451A (en) Ion Source for a Mass Spectrometer
JPS57177975A (en) Ion shower device
DE3688860T2 (en) Ion beam source excited by electron beam.
NL7605255A (en) Microwave discharge ion source - has ion beam with rectangular cross section, generated through extraction electrodes including rectangular slits
GB1152014A (en) Improvements in Ion Source Apparatus
GB1287291A (en) Improvements in or relating to ion sources
BR8203974A (en) PROCESS FOR THE MANUFACTURE OF AN OVERALL ELECTRODE BLADE FOR LOW VOLTAGE ELECTRIC CONDENSERS
GB1126102A (en) Mass spectrometer
JPS54156546A (en) Corona charger
EP0192251A3 (en) Electrode of vacuum circuit breaker
GB1298940A (en) Improvements in or relating to ion sources
JPS5246300A (en) Ionic source
JPS5628458A (en) Atomic spectrum generating lamp
JPS5681151A (en) Particle charging apparatus
SU519066A1 (en) Ion source
SU865043A1 (en) Multiple-channel ion source
SU947929A1 (en) Ion gun
SU1143279A1 (en) Ion beam-pumped laser
JPS5635775A (en) Ion beam etching method
GB2015241A (en) Isotopic separation
ES2022406B3 (en) GENERATOR OF NEGATIVE IONS IN GASEOUS ENVIRONMENT, OF GREAT POWER, IN THE FORM OF A HIGH INTENSITY ELECTRIC FIELD.

Legal Events

Date Code Title Description
V4 Lapsed because of reaching the maxim lifetime of a patent

Free format text: 960517