NL7204859A - - Google Patents

Info

Publication number
NL7204859A
NL7204859A NL7204859A NL7204859A NL7204859A NL 7204859 A NL7204859 A NL 7204859A NL 7204859 A NL7204859 A NL 7204859A NL 7204859 A NL7204859 A NL 7204859A NL 7204859 A NL7204859 A NL 7204859A
Authority
NL
Netherlands
Application number
NL7204859A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to NL7204859A priority Critical patent/NL7204859A/xx
Priority to DE19732315130 priority patent/DE2315130A1/de
Priority to GB1691873A priority patent/GB1424224A/en
Priority to SE7304969A priority patent/SE386770B/xx
Priority to CA168,263A priority patent/CA984524A/en
Priority to IT4930373A priority patent/IT983000B/it
Priority to CH507173A priority patent/CH569275A5/xx
Priority to FR7313064A priority patent/FR2179978B1/fr
Publication of NL7204859A publication Critical patent/NL7204859A/xx
Priority to US479468A priority patent/US3917946A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes
    • H01J37/2955—Electron or ion diffraction tubes using scanning ray

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
NL7204859A 1972-04-12 1972-04-12 NL7204859A (ja)

Priority Applications (9)

Application Number Priority Date Filing Date Title
NL7204859A NL7204859A (ja) 1972-04-12 1972-04-12
DE19732315130 DE2315130A1 (de) 1972-04-12 1973-03-27 Elektronenoptische vorrichtung zur aufzeichnung ausgewaehlter beugungsmuster
GB1691873A GB1424224A (en) 1972-04-12 1973-04-09 Method and apparatus for the generation and recording of electron diffraction patterns
SE7304969A SE386770B (sv) 1972-04-12 1973-04-09 Forfarande och anordning for avbildning av en jemforelsevis liten del av ett prov i ett bildplan
CA168,263A CA984524A (en) 1972-04-12 1973-04-09 Electron-optical device for the recording of selected diffraction patterns
IT4930373A IT983000B (it) 1972-04-12 1973-04-09 Procedimento ed apparecchio per generare e registrare configura zioni di diffrazione di parti scelte di provini sotto osserva zione in microscopi elettronici
CH507173A CH569275A5 (ja) 1972-04-12 1973-04-09
FR7313064A FR2179978B1 (ja) 1972-04-12 1973-04-11
US479468A US3917946A (en) 1972-04-12 1974-06-14 Electron-optical device for the recording of selected diffraction patterns

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7204859A NL7204859A (ja) 1972-04-12 1972-04-12

Publications (1)

Publication Number Publication Date
NL7204859A true NL7204859A (ja) 1973-10-16

Family

ID=19815829

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7204859A NL7204859A (ja) 1972-04-12 1972-04-12

Country Status (8)

Country Link
CA (1) CA984524A (ja)
CH (1) CH569275A5 (ja)
DE (1) DE2315130A1 (ja)
FR (1) FR2179978B1 (ja)
GB (1) GB1424224A (ja)
IT (1) IT983000B (ja)
NL (1) NL7204859A (ja)
SE (1) SE386770B (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4210806A (en) * 1979-01-18 1980-07-01 International Business Machines Corporation High brightness electron probe beam and method
DE3636506A1 (de) * 1986-10-27 1988-04-28 Atomika Tech Physik Gmbh Spiralabtastverfahren
JPH0233843A (ja) * 1988-07-25 1990-02-05 Hitachi Ltd 走査電子顕微鏡

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1248201A (en) * 1967-07-03 1971-09-29 Nat Res Dev Electron microscopes
GB1284061A (en) * 1970-01-21 1972-08-02 Cambridge Scientific Instr Ltd Electron beam apparatus

Also Published As

Publication number Publication date
GB1424224A (en) 1976-02-11
CA984524A (en) 1976-02-24
FR2179978A1 (ja) 1973-11-23
SE386770B (sv) 1976-08-16
IT983000B (it) 1974-10-21
CH569275A5 (ja) 1975-11-14
DE2315130A1 (de) 1973-10-18
FR2179978B1 (ja) 1978-02-10

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