NL7018708A - - Google Patents

Info

Publication number
NL7018708A
NL7018708A NL7018708A NL7018708A NL7018708A NL 7018708 A NL7018708 A NL 7018708A NL 7018708 A NL7018708 A NL 7018708A NL 7018708 A NL7018708 A NL 7018708A NL 7018708 A NL7018708 A NL 7018708A
Authority
NL
Netherlands
Application number
NL7018708A
Other versions
NL166576C (nl
NL166576B (nl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7018708A publication Critical patent/NL7018708A/xx
Publication of NL166576B publication Critical patent/NL166576B/xx
Application granted granted Critical
Publication of NL166576C publication Critical patent/NL166576C/xx

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N3/00—Scanning details of television systems; Combination thereof with generation of supply voltages
    • H04N3/10—Scanning details of television systems; Combination thereof with generation of supply voltages by means not exclusively optical-mechanical
    • H04N3/16—Scanning details of television systems; Combination thereof with generation of supply voltages by means not exclusively optical-mechanical by deflecting electron beam in cathode-ray tube, e.g. scanning corrections
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/70—Arrangements for deflecting ray or beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1472—Deflecting along given lines
    • H01J37/1474—Scanning means
    • H01J37/1475—Scanning means magnetic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
NL7018708.A 1969-12-25 1970-12-23 Afbuiginrichting voor de elektronenbundel in een elektronenmicroscoop. NL166576C (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP44104540A JPS4922351B1 (enrdf_load_stackoverflow) 1969-12-25 1969-12-25

Publications (3)

Publication Number Publication Date
NL7018708A true NL7018708A (enrdf_load_stackoverflow) 1971-06-29
NL166576B NL166576B (nl) 1981-03-16
NL166576C NL166576C (nl) 1981-08-17

Family

ID=14383310

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7018708.A NL166576C (nl) 1969-12-25 1970-12-23 Afbuiginrichting voor de elektronenbundel in een elektronenmicroscoop.

Country Status (5)

Country Link
US (1) US3749964A (enrdf_load_stackoverflow)
JP (1) JPS4922351B1 (enrdf_load_stackoverflow)
DE (1) DE2063598B2 (enrdf_load_stackoverflow)
GB (1) GB1340209A (enrdf_load_stackoverflow)
NL (1) NL166576C (enrdf_load_stackoverflow)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4209698A (en) * 1971-12-28 1980-06-24 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Transmission-type charged particle beam apparatus
US3914608A (en) * 1973-12-19 1975-10-21 Westinghouse Electric Corp Rapid exposure of micropatterns with a scanning electron microscope
JPS55121259A (en) * 1979-03-14 1980-09-18 Hitachi Ltd Elelctron microscope
DE2937136A1 (de) * 1979-09-13 1981-04-02 Siemens AG, 1000 Berlin und 8000 München Verfahren und vorrichtung zur schnellen ablenkung eines korpuskularstrahls
JPS57212754A (en) * 1981-06-24 1982-12-27 Hitachi Ltd Electron-beam controller for electron microscope
US4687936A (en) * 1985-07-11 1987-08-18 Varian Associates, Inc. In-line beam scanning system
JP2591548B2 (ja) * 1991-07-26 1997-03-19 富士通株式会社 荷電粒子線露光装置及び荷電粒子線露光方法
ES2198619T3 (es) * 1992-02-20 2004-02-01 Deutsche Thomson-Brandt Gmbh Unidad de desviacion para un tubo de imagen de un receptor de television.
JP2002170764A (ja) * 2000-12-04 2002-06-14 Nikon Corp 荷電粒子線露光装置、荷電粒子線露光装置の調整方法及び半導体デバイスの製造方法
JP5097512B2 (ja) * 2006-11-21 2012-12-12 株式会社日立ハイテクノロジーズ 荷電粒子ビーム用軌道補正器、及び荷電粒子ビーム装置
DE102015210941B9 (de) 2015-06-15 2019-09-19 Carl Zeiss Microscopy Gmbh Teilchenstrahlgerät und Verfahren zum Betrieb eines Teilchenstrahlgeräts
WO2018042505A1 (ja) * 2016-08-30 2018-03-08 株式会社 日立ハイテクノロジーズ 電磁偏向器、及び荷電粒子線装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USB326594I5 (enrdf_load_stackoverflow) * 1960-07-08
DE1227272B (de) * 1963-06-08 1966-10-20 Telefunken Patent Schaltungsanordnung zur Erzeugung eines Signals, z. B. eines Helltast-Ausloesesignals in Elektronenstrahlroehren, nach Ablauf eines Einstellvorganges
US3427494A (en) * 1965-10-28 1969-02-11 Ibm Corrected deflection circuit for cathode ray tube
DE1299088C2 (de) * 1966-06-10 1974-10-17 Siemens AG, Berlin und München, 8000 München Ablenkeinrichtung fuer den korpuskularstrahl in einem korpuskularstrahlgeraet, insbesondere elektronenmikroskop
US3417284A (en) * 1966-08-31 1968-12-17 Sperry Rand Corp Electromagnetic gross beam positioning system
US3500114A (en) * 1967-08-24 1970-03-10 Sony Corp Convergence system for a color picture tube
US3540032A (en) * 1968-01-12 1970-11-10 Ibm Display system using cathode ray tube deflection yoke non-linearity to obtain curved strokes
US3480827A (en) * 1969-01-14 1969-11-25 Ibm Flyback in double-yoke-drive cathode ray tubes

Also Published As

Publication number Publication date
JPS4922351B1 (enrdf_load_stackoverflow) 1974-06-07
DE2063598A1 (de) 1971-07-08
NL166576C (nl) 1981-08-17
DE2063598B2 (de) 1974-09-05
US3749964A (en) 1973-07-31
NL166576B (nl) 1981-03-16
GB1340209A (en) 1973-12-12

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Legal Events

Date Code Title Description
V4 Discontinued because of reaching the maximum lifetime of a patent