GB1340209A - Electron microscope - Google Patents
Electron microscopeInfo
- Publication number
- GB1340209A GB1340209A GB6128270A GB6128270A GB1340209A GB 1340209 A GB1340209 A GB 1340209A GB 6128270 A GB6128270 A GB 6128270A GB 6128270 A GB6128270 A GB 6128270A GB 1340209 A GB1340209 A GB 1340209A
- Authority
- GB
- United Kingdom
- Prior art keywords
- coils
- deflecting
- components
- potentiometers
- axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N3/00—Scanning details of television systems; Combination thereof with generation of supply voltages
- H04N3/10—Scanning details of television systems; Combination thereof with generation of supply voltages by means not exclusively optical-mechanical
- H04N3/16—Scanning details of television systems; Combination thereof with generation of supply voltages by means not exclusively optical-mechanical by deflecting electron beam in cathode-ray tube, e.g. scanning corrections
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/70—Arrangements for deflecting ray or beam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/1472—Deflecting along given lines
- H01J37/1474—Scanning means
- H01J37/1475—Scanning means magnetic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Abstract
1340209 Electron microscopes NIHON DENSHI KK 23 Dec 1970 [25 Dec 1969] 61282/70 Heading H1D In an electron microscope provided with two sets of deflecting means for deflecting the beam off the axis and back again in order to vary the angle of incidence of the beam on the specimen to observe a dark field image and a diffraction pattern, the point of incidence may vary as the angle is varied due to the deflecting coils in one set not being positioned accurately orthogonal to each other and parallel to those of the other set. This is obviated by feeding each coil with at least two uni-directional current components which are independently adjustable. In one example the coils deflecting the beam off the axis are each fed with three components for adjusting the deflection, for compensating for positional errors, and for aligning the beam, whilst the coils returning the beam to the axis are supplied with two components. The separate components may be derived from potentiometers which may be manually adjustable, and the controls of different coils may be coupled together to effect dependent adjustments in predetermined manner. The outputs of the potentiometers may be fed through individual resistors to the input of a summing amplifier feeding the coil directly (Fig. 2, not shown) or through a transistor output circuit (Fig. 3, not shown). Alternatively the potentiometers may be connected to individual amplifiers, the outputs of which are summed (Figs. 4 and 5, not shown).
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP44104540A JPS4922351B1 (en) | 1969-12-25 | 1969-12-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1340209A true GB1340209A (en) | 1973-12-12 |
Family
ID=14383310
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB6128270A Expired GB1340209A (en) | 1969-12-25 | 1970-12-23 | Electron microscope |
Country Status (5)
Country | Link |
---|---|
US (1) | US3749964A (en) |
JP (1) | JPS4922351B1 (en) |
DE (1) | DE2063598B2 (en) |
GB (1) | GB1340209A (en) |
NL (1) | NL166576C (en) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4209698A (en) * | 1971-12-28 | 1980-06-24 | Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. | Transmission-type charged particle beam apparatus |
US3914608A (en) * | 1973-12-19 | 1975-10-21 | Westinghouse Electric Corp | Rapid exposure of micropatterns with a scanning electron microscope |
JPS55121259A (en) * | 1979-03-14 | 1980-09-18 | Hitachi Ltd | Elelctron microscope |
DE2937136A1 (en) * | 1979-09-13 | 1981-04-02 | Siemens AG, 1000 Berlin und 8000 München | METHOD AND DEVICE FOR QUICKLY DEFLECTING A BODY BEAM |
JPS57212754A (en) * | 1981-06-24 | 1982-12-27 | Hitachi Ltd | Electron-beam controller for electron microscope |
US4687936A (en) * | 1985-07-11 | 1987-08-18 | Varian Associates, Inc. | In-line beam scanning system |
JP2591548B2 (en) * | 1991-07-26 | 1997-03-19 | 富士通株式会社 | Charged particle beam exposure apparatus and charged particle beam exposure method |
ES2198619T3 (en) * | 1992-02-20 | 2004-02-01 | Deutsche Thomson-Brandt Gmbh | DEVIATION UNIT FOR AN IMAGE TUBE OF A TELEVISION RECEIVER. |
JP2002170764A (en) * | 2000-12-04 | 2002-06-14 | Nikon Corp | Charged particle beam exposure system, its adjusting method, and method of manufacturing semiconductor device |
US7947964B2 (en) * | 2006-11-21 | 2011-05-24 | Hitachi High-Technologies Corporation | Charged particle beam orbit corrector and charged particle beam apparatus |
DE102015210941B9 (en) * | 2015-06-15 | 2019-09-19 | Carl Zeiss Microscopy Gmbh | Particle beam apparatus and method for operating a particle beam device |
WO2018042505A1 (en) * | 2016-08-30 | 2018-03-08 | 株式会社 日立ハイテクノロジーズ | Electromagnetic deflector, and charged particle ray device |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USB326594I5 (en) * | 1960-07-08 | |||
DE1227272B (en) * | 1963-06-08 | 1966-10-20 | Telefunken Patent | Circuit arrangement for generating a signal, e.g. B. a light button trigger signal in electron beam tubes, after a setting process |
US3427494A (en) * | 1965-10-28 | 1969-02-11 | Ibm | Corrected deflection circuit for cathode ray tube |
DE1299088C2 (en) * | 1966-06-10 | 1974-10-17 | Siemens AG, Berlin und München, 8000 München | DEFLECTION DEVICE FOR THE BODY BEAM IN A BODY BEAM DEVICE, IN PARTICULAR ELECTRON MICROSCOPE |
US3417284A (en) * | 1966-08-31 | 1968-12-17 | Sperry Rand Corp | Electromagnetic gross beam positioning system |
US3500114A (en) * | 1967-08-24 | 1970-03-10 | Sony Corp | Convergence system for a color picture tube |
US3540032A (en) * | 1968-01-12 | 1970-11-10 | Ibm | Display system using cathode ray tube deflection yoke non-linearity to obtain curved strokes |
US3480827A (en) * | 1969-01-14 | 1969-11-25 | Ibm | Flyback in double-yoke-drive cathode ray tubes |
-
1969
- 1969-12-25 JP JP44104540A patent/JPS4922351B1/ja active Pending
-
1970
- 1970-12-23 DE DE2063598A patent/DE2063598B2/en not_active Ceased
- 1970-12-23 GB GB6128270A patent/GB1340209A/en not_active Expired
- 1970-12-23 NL NL7018708.A patent/NL166576C/en not_active IP Right Cessation
- 1970-12-28 US US00101613A patent/US3749964A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
NL166576C (en) | 1981-08-17 |
NL7018708A (en) | 1971-06-29 |
DE2063598A1 (en) | 1971-07-08 |
US3749964A (en) | 1973-07-31 |
NL166576B (en) | 1981-03-16 |
DE2063598B2 (en) | 1974-09-05 |
JPS4922351B1 (en) | 1974-06-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PE20 | Patent expired after termination of 20 years |