JPS4922351B1 - - Google Patents

Info

Publication number
JPS4922351B1
JPS4922351B1 JP44104540A JP10454069A JPS4922351B1 JP S4922351 B1 JPS4922351 B1 JP S4922351B1 JP 44104540 A JP44104540 A JP 44104540A JP 10454069 A JP10454069 A JP 10454069A JP S4922351 B1 JPS4922351 B1 JP S4922351B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP44104540A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP44104540A priority Critical patent/JPS4922351B1/ja
Priority to NL7018708.A priority patent/NL166576C/en
Priority to GB6128270A priority patent/GB1340209A/en
Priority to DE2063598A priority patent/DE2063598B2/en
Priority to US00101613A priority patent/US3749964A/en
Publication of JPS4922351B1 publication Critical patent/JPS4922351B1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N3/00—Scanning details of television systems; Combination thereof with generation of supply voltages
    • H04N3/10—Scanning details of television systems; Combination thereof with generation of supply voltages by means not exclusively optical-mechanical
    • H04N3/16—Scanning details of television systems; Combination thereof with generation of supply voltages by means not exclusively optical-mechanical by deflecting electron beam in cathode-ray tube, e.g. scanning corrections
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/70—Arrangements for deflecting ray or beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1472—Deflecting along given lines
    • H01J37/1474—Scanning means
    • H01J37/1475—Scanning means magnetic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
JP44104540A 1969-12-25 1969-12-25 Pending JPS4922351B1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP44104540A JPS4922351B1 (en) 1969-12-25 1969-12-25
NL7018708.A NL166576C (en) 1969-12-25 1970-12-23 DEFLECTOR FOR THE ELECTRON BEAM IN AN ELECTRON MICROSCOPE.
GB6128270A GB1340209A (en) 1969-12-25 1970-12-23 Electron microscope
DE2063598A DE2063598B2 (en) 1969-12-25 1970-12-23 Deflection device for the electron beam in an electron microscope
US00101613A US3749964A (en) 1969-12-25 1970-12-28 Electron beam device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP44104540A JPS4922351B1 (en) 1969-12-25 1969-12-25

Publications (1)

Publication Number Publication Date
JPS4922351B1 true JPS4922351B1 (en) 1974-06-07

Family

ID=14383310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP44104540A Pending JPS4922351B1 (en) 1969-12-25 1969-12-25

Country Status (5)

Country Link
US (1) US3749964A (en)
JP (1) JPS4922351B1 (en)
DE (1) DE2063598B2 (en)
GB (1) GB1340209A (en)
NL (1) NL166576C (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018042505A1 (en) * 2016-08-30 2018-03-08 株式会社 日立ハイテクノロジーズ Electromagnetic deflector, and charged particle ray device

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4209698A (en) * 1971-12-28 1980-06-24 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Transmission-type charged particle beam apparatus
US3914608A (en) * 1973-12-19 1975-10-21 Westinghouse Electric Corp Rapid exposure of micropatterns with a scanning electron microscope
JPS55121259A (en) * 1979-03-14 1980-09-18 Hitachi Ltd Elelctron microscope
DE2937136A1 (en) * 1979-09-13 1981-04-02 Siemens AG, 1000 Berlin und 8000 München METHOD AND DEVICE FOR QUICKLY DEFLECTING A BODY BEAM
JPS57212754A (en) * 1981-06-24 1982-12-27 Hitachi Ltd Electron-beam controller for electron microscope
US4687936A (en) * 1985-07-11 1987-08-18 Varian Associates, Inc. In-line beam scanning system
JP2591548B2 (en) * 1991-07-26 1997-03-19 富士通株式会社 Charged particle beam exposure apparatus and charged particle beam exposure method
ES2198619T3 (en) * 1992-02-20 2004-02-01 Deutsche Thomson-Brandt Gmbh DEVIATION UNIT FOR AN IMAGE TUBE OF A TELEVISION RECEIVER.
JP2002170764A (en) * 2000-12-04 2002-06-14 Nikon Corp Charged particle beam exposure system, its adjusting method, and method of manufacturing semiconductor device
US7947964B2 (en) * 2006-11-21 2011-05-24 Hitachi High-Technologies Corporation Charged particle beam orbit corrector and charged particle beam apparatus
DE102015210941B9 (en) * 2015-06-15 2019-09-19 Carl Zeiss Microscopy Gmbh Particle beam apparatus and method for operating a particle beam device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USB326594I5 (en) * 1960-07-08
DE1227272B (en) * 1963-06-08 1966-10-20 Telefunken Patent Circuit arrangement for generating a signal, e.g. B. a light button trigger signal in electron beam tubes, after a setting process
US3427494A (en) * 1965-10-28 1969-02-11 Ibm Corrected deflection circuit for cathode ray tube
DE1299088C2 (en) * 1966-06-10 1974-10-17 Siemens AG, Berlin und München, 8000 München DEFLECTION DEVICE FOR THE BODY BEAM IN A BODY BEAM DEVICE, IN PARTICULAR ELECTRON MICROSCOPE
US3417284A (en) * 1966-08-31 1968-12-17 Sperry Rand Corp Electromagnetic gross beam positioning system
US3500114A (en) * 1967-08-24 1970-03-10 Sony Corp Convergence system for a color picture tube
US3540032A (en) * 1968-01-12 1970-11-10 Ibm Display system using cathode ray tube deflection yoke non-linearity to obtain curved strokes
US3480827A (en) * 1969-01-14 1969-11-25 Ibm Flyback in double-yoke-drive cathode ray tubes

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018042505A1 (en) * 2016-08-30 2018-03-08 株式会社 日立ハイテクノロジーズ Electromagnetic deflector, and charged particle ray device

Also Published As

Publication number Publication date
GB1340209A (en) 1973-12-12
NL166576C (en) 1981-08-17
NL7018708A (en) 1971-06-29
DE2063598A1 (en) 1971-07-08
US3749964A (en) 1973-07-31
NL166576B (en) 1981-03-16
DE2063598B2 (en) 1974-09-05

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