NL6800382A - - Google Patents

Info

Publication number
NL6800382A
NL6800382A NL6800382A NL6800382A NL6800382A NL 6800382 A NL6800382 A NL 6800382A NL 6800382 A NL6800382 A NL 6800382A NL 6800382 A NL6800382 A NL 6800382A NL 6800382 A NL6800382 A NL 6800382A
Authority
NL
Netherlands
Application number
NL6800382A
Other versions
NL168369C (nl
NL168369B (nl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6800382A publication Critical patent/NL6800382A/xx
Publication of NL168369B publication Critical patent/NL168369B/xx
Application granted granted Critical
Publication of NL168369C publication Critical patent/NL168369C/xx

Links

Classifications

    • H10P14/69215
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40Oxides
    • C23C16/401Oxides containing silicon
    • C23C16/402Silicon dioxide
    • H10P14/6328
    • H10P14/6334
    • H10P14/662
    • H10P14/6929
    • H10P14/69391

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Formation Of Insulating Films (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
NLAANVRAGE6800382,A 1967-01-13 1968-01-11 Werkwijze tot het vervaardigen van een halfgeleiderlichaam met oxydelaag en aldus vervaardigd halfgeleiderlichaam. NL168369C (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US60920067A 1967-01-13 1967-01-13

Publications (3)

Publication Number Publication Date
NL6800382A true NL6800382A (cg-RX-API-DMAC10.html) 1968-07-15
NL168369B NL168369B (nl) 1981-10-16
NL168369C NL168369C (nl) 1982-03-16

Family

ID=24439760

Family Applications (1)

Application Number Title Priority Date Filing Date
NLAANVRAGE6800382,A NL168369C (nl) 1967-01-13 1968-01-11 Werkwijze tot het vervaardigen van een halfgeleiderlichaam met oxydelaag en aldus vervaardigd halfgeleiderlichaam.

Country Status (8)

Country Link
JP (2) JPS4945627B1 (cg-RX-API-DMAC10.html)
BE (1) BE706603A (cg-RX-API-DMAC10.html)
CH (1) CH487506A (cg-RX-API-DMAC10.html)
DE (1) DE1621272C3 (cg-RX-API-DMAC10.html)
FR (1) FR1548847A (cg-RX-API-DMAC10.html)
GB (1) GB1173097A (cg-RX-API-DMAC10.html)
NL (1) NL168369C (cg-RX-API-DMAC10.html)
SE (1) SE365651B (cg-RX-API-DMAC10.html)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1255995A (en) * 1968-03-04 1971-12-08 Hitachi Ltd Semiconductor device and method of making same
JPS5356729U (cg-RX-API-DMAC10.html) * 1976-10-18 1978-05-15
JPS53129436U (cg-RX-API-DMAC10.html) * 1977-03-18 1978-10-14
JPS5477639U (cg-RX-API-DMAC10.html) * 1977-11-14 1979-06-02
DE3330864A1 (de) * 1983-08-26 1985-03-14 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zum aufbringen von siliziumoxidschichten auf halbleitersubstrate unter anwendung einer cvd-beschichtungstechnik
DE3330865A1 (de) * 1983-08-26 1985-03-14 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zum aufbringen von siliziumoxidschichten auf halbleitersubstraten unter anwendung einer cvd-beschichtungstechnik
GB2268327A (en) * 1992-06-30 1994-01-05 Texas Instruments Ltd Passivated gallium arsenide device

Also Published As

Publication number Publication date
GB1173097A (en) 1969-12-03
CH487506A (de) 1970-03-15
NL168369C (nl) 1982-03-16
NL168369B (nl) 1981-10-16
DE1621272B2 (de) 1977-03-31
FR1548847A (cg-RX-API-DMAC10.html) 1968-12-06
DE1621272C3 (de) 1979-08-23
DE1621272A1 (de) 1971-04-29
JPS4945628B1 (cg-RX-API-DMAC10.html) 1974-12-05
BE706603A (cg-RX-API-DMAC10.html) 1968-04-01
SE365651B (cg-RX-API-DMAC10.html) 1974-03-25
JPS4945627B1 (cg-RX-API-DMAC10.html) 1974-12-05

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Legal Events

Date Code Title Description
V1 Lapsed because of non-payment of the annual fee