NL2002003A1 - Inrichting voor het genereren van EUV-straling. - Google Patents
Inrichting voor het genereren van EUV-straling.Info
- Publication number
- NL2002003A1 NL2002003A1 NL2002003A NL2002003A NL2002003A1 NL 2002003 A1 NL2002003 A1 NL 2002003A1 NL 2002003 A NL2002003 A NL 2002003A NL 2002003 A NL2002003 A NL 2002003A NL 2002003 A1 NL2002003 A1 NL 2002003A1
- Authority
- NL
- Netherlands
- Prior art keywords
- euv radiation
- generating euv
- generating
- radiation
- euv
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70916—Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70033—Production of exposure light, i.e. light sources by plasma extreme ultraviolet [EUV] sources
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70083—Non-homogeneous intensity distribution in the mask plane
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—X-ray radiation generated from plasma
- H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007051295 | 2007-10-22 | ||
DE102007051295A DE102007051295B4 (de) | 2007-10-22 | 2007-10-22 | Anordnung zur Erzeugung von EUV-Strahlung |
Publications (2)
Publication Number | Publication Date |
---|---|
NL2002003A1 true NL2002003A1 (nl) | 2009-04-23 |
NL2002003C2 NL2002003C2 (nl) | 2011-08-30 |
Family
ID=40459002
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL2002003A NL2002003C2 (nl) | 2007-10-22 | 2008-09-22 | Inrichting voor het genereren van euv-straling. |
Country Status (4)
Country | Link |
---|---|
US (1) | US9170505B2 (nl) |
JP (1) | JP4385079B2 (nl) |
DE (1) | DE102007051295B4 (nl) |
NL (1) | NL2002003C2 (nl) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5093267B2 (ja) * | 2010-03-11 | 2012-12-12 | ウシオ電機株式会社 | 集光鏡アッセンブリおよびこの集光鏡アッセンブリを用いた極端紫外光光源装置 |
CN103531263B (zh) * | 2013-11-04 | 2016-07-06 | 中国科学院光电研究院 | 一种使用电场降低碎屑的方法、装置和euv光源系统 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6827824B1 (en) * | 1996-04-12 | 2004-12-07 | Micron Technology, Inc. | Enhanced collimated deposition |
US7180081B2 (en) * | 2000-06-09 | 2007-02-20 | Cymer, Inc. | Discharge produced plasma EUV light source |
DE10237901B3 (de) * | 2002-08-16 | 2004-05-27 | Xtreme Technologies Gmbh | Anordnung zur Unterdrückung von Teilchenemission bei der Strahlungserzeugung einer Röntgenstrahlungsquelle |
DE10260458B3 (de) * | 2002-12-19 | 2004-07-22 | Xtreme Technologies Gmbh | Strahlungsquelle mit hoher durchschnittlicher EUV-Strahlungsleistung |
DE102005020521B4 (de) * | 2005-04-29 | 2013-05-02 | Xtreme Technologies Gmbh | Verfahren und Anordnung zur Unterdrückung von Debris bei der Erzeugung kurzwelliger Strahlung auf Basis eines Plasmas |
DE102005048670B3 (de) * | 2005-10-07 | 2007-05-24 | Xtreme Technologies Gmbh | Anordnung zur Unterdrückung von unerwünschten Spektralanteilen bei einer plasmabasierten EUV-Strahlungsquelle |
-
2007
- 2007-10-22 DE DE102007051295A patent/DE102007051295B4/de active Active
-
2008
- 2008-09-22 NL NL2002003A patent/NL2002003C2/nl active Search and Examination
- 2008-10-16 JP JP2008267370A patent/JP4385079B2/ja active Active
- 2008-10-20 US US12/254,272 patent/US9170505B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP2009105399A (ja) | 2009-05-14 |
DE102007051295A1 (de) | 2009-04-23 |
US9170505B2 (en) | 2015-10-27 |
JP4385079B2 (ja) | 2009-12-16 |
NL2002003C2 (nl) | 2011-08-30 |
DE102007051295B4 (de) | 2009-08-06 |
US20090101850A1 (en) | 2009-04-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AD1A | A request for search or an international type search has been filed | ||
SD | Assignments of patents |
Effective date: 20140214 |