NL194315B - Werkwijze voor het vervaardigen van een hoog-temperatuur supergeleidende veldeffecttransistor met een dikke supergeleidende kanaallaag. - Google Patents

Werkwijze voor het vervaardigen van een hoog-temperatuur supergeleidende veldeffecttransistor met een dikke supergeleidende kanaallaag.

Info

Publication number
NL194315B
NL194315B NL9402037A NL9402037A NL194315B NL 194315 B NL194315 B NL 194315B NL 9402037 A NL9402037 A NL 9402037A NL 9402037 A NL9402037 A NL 9402037A NL 194315 B NL194315 B NL 194315B
Authority
NL
Netherlands
Prior art keywords
manufacturing
field effect
effect transistor
channel layer
thick
Prior art date
Application number
NL9402037A
Other languages
English (en)
Other versions
NL194315C (nl
NL9402037A (nl
Inventor
Gun-Yong Sung
Jeong-Dae Suh
Original Assignee
Korea Electronics Telecomm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Korea Electronics Telecomm filed Critical Korea Electronics Telecomm
Publication of NL9402037A publication Critical patent/NL9402037A/nl
Publication of NL194315B publication Critical patent/NL194315B/nl
Application granted granted Critical
Publication of NL194315C publication Critical patent/NL194315C/nl

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00Superconducting devices
    • H10N60/20Permanent superconducting devices
    • H10N60/205Permanent superconducting devices having three or more electrodes, e.g. transistor-like structures 
    • H10N60/207Field effect devices
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00Superconductor technology: apparatus, material, process
    • Y10S505/70High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701Coated or thin film device, i.e. active or passive
NL9402037A 1994-11-21 1994-12-02 Werkwijze voor het vervaardigen van een hoog-temperatuur supergeleidende veldeffecttransistor met een dikke supergeleidende kanaallaag. NL194315C (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR19940030618 1994-11-21
KR1019940030618A KR0148598B1 (ko) 1994-11-21 1994-11-21 두꺼운 초전도채널층을 구비한 고온초전도 전계효과 트랜지스터의 제조방법

Publications (3)

Publication Number Publication Date
NL9402037A NL9402037A (nl) 1996-07-01
NL194315B true NL194315B (nl) 2001-08-01
NL194315C NL194315C (nl) 2001-12-04

Family

ID=19398505

Family Applications (1)

Application Number Title Priority Date Filing Date
NL9402037A NL194315C (nl) 1994-11-21 1994-12-02 Werkwijze voor het vervaardigen van een hoog-temperatuur supergeleidende veldeffecttransistor met een dikke supergeleidende kanaallaag.

Country Status (5)

Country Link
US (1) US5663081A (nl)
JP (1) JP2682810B2 (nl)
KR (1) KR0148598B1 (nl)
DE (1) DE4442688C1 (nl)
NL (1) NL194315C (nl)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5906965A (en) * 1996-01-19 1999-05-25 Superconductor Technologies, Inc. Thin film superconductor-insulator-superconductor multi-layer films and method for obtaining the same
JP3278638B2 (ja) 1998-09-01 2002-04-30 日本電気株式会社 高温超伝導ジョセフソン接合およびその製造方法
US20080299780A1 (en) * 2007-06-01 2008-12-04 Uv Tech Systems, Inc. Method and apparatus for laser oxidation and reduction
US8204564B2 (en) * 2007-11-07 2012-06-19 Brookhaven Science Associates, Llc High temperature interfacial superconductivity
KR100923947B1 (ko) 2007-12-10 2009-10-29 한국전자통신연구원 검출 소자 및 검출 시스템
US8242375B2 (en) * 2008-09-18 2012-08-14 United Technologies Corporation Conductive emissions protection

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4499119A (en) * 1983-07-06 1985-02-12 Sperry Corporation Method of manufacturing super-conductive tunnel junction devices with precise junction area control
US5218136A (en) * 1987-12-28 1993-06-08 Sumitomo Chemical Company, Limited Styryl compounds, process for preparing the same and photoresist compositions comprising the same
DE69132972T2 (de) * 1991-01-07 2003-03-13 Ibm Supraleitender Feldeffekttransistor mit inverser MISFET-Struktur und Verfahren zu dessen Herstellung
EP0684654A1 (en) * 1991-03-04 1995-11-29 Sumitomo Electric Industries, Limited A thin film of oxide superconductor possessing locally different crystal orientations and a process for preparing the same
JPH05304320A (ja) * 1991-03-27 1993-11-16 Semiconductor Energy Lab Co Ltd 超伝導薄膜トランジスタ及びその作製方法
EP0523275B1 (en) * 1991-07-19 1996-02-28 International Business Machines Corporation Enhanced superconducting field-effect transistor with inverted MISFET structure and method for making the same
DE69210150T2 (de) * 1991-08-26 1996-10-31 Sumitomo Electric Industries Supraleitende Einrichtung mit extrem dünnen supraleitenden Kanal aus oxydisch supraleitendem Material und Verfahren zu deren Herstellung
CA2084174C (en) * 1991-11-30 1997-07-29 Takao Nakamura Superconducting device having an extremely thin superconducting channel formed of oxide superconductor material and method for manufacturing thesame
CA2084983C (en) * 1991-12-10 1996-11-12 Takao Nakamura Superconducting device having an extremely thin superconducting channel formed of oxide superconductor material and method for manufacturing the same
CA2085290C (en) * 1991-12-13 1997-08-05 Takao Nakamura Superconducting device having an extremely thin superconducting channel formed of oxide superconductor material and method for manufacturing the same
EP0576363B1 (en) * 1992-06-24 1998-01-07 Sumitomo Electric Industries, Ltd. Method of manufacturing a superconducting device having a superconducting channel formed of oxide superconductor material

Also Published As

Publication number Publication date
NL194315C (nl) 2001-12-04
JP2682810B2 (ja) 1997-11-26
JPH08148729A (ja) 1996-06-07
KR0148598B1 (ko) 1998-10-15
NL9402037A (nl) 1996-07-01
DE4442688C1 (de) 1996-06-27
US5663081A (en) 1997-09-02

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Legal Events

Date Code Title Description
A1C A request for examination has been filed
V1 Lapsed because of non-payment of the annual fee

Effective date: 20100701