NL165604C - Veldmissie-elektonenmicroscoop. - Google Patents
Veldmissie-elektonenmicroscoop.Info
- Publication number
- NL165604C NL165604C NL7209179.A NL7209179A NL165604C NL 165604 C NL165604 C NL 165604C NL 7209179 A NL7209179 A NL 7209179A NL 165604 C NL165604 C NL 165604C
- Authority
- NL
- Netherlands
- Prior art keywords
- electronic microscope
- field mission
- mission electronic
- field
- microscope
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/248—Components associated with high voltage supply
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/29—Reflection microscopes
- H01J37/292—Reflection microscopes using scanning ray
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US4642570A | 1970-06-15 | 1970-06-15 | |
US17181571A | 1971-08-16 | 1971-08-16 |
Publications (3)
Publication Number | Publication Date |
---|---|
NL7209179A NL7209179A (nl) | 1973-02-20 |
NL165604B NL165604B (nl) | 1980-11-17 |
NL165604C true NL165604C (nl) | 1981-04-15 |
Family
ID=26723901
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL7108096.A NL161297C (nl) | 1970-06-15 | 1971-06-14 | Veldemissie-elektronenkanon. |
NL7209179.A NL165604C (nl) | 1970-06-15 | 1972-06-30 | Veldmissie-elektonenmicroscoop. |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL7108096.A NL161297C (nl) | 1970-06-15 | 1971-06-14 | Veldemissie-elektronenkanon. |
Country Status (7)
Country | Link |
---|---|
US (2) | US3678333A (nl) |
AU (1) | AU466190B2 (nl) |
CA (1) | CA950592A (nl) |
DE (2) | DE2129636C2 (nl) |
FR (2) | FR2099295A5 (nl) |
GB (2) | GB1355365A (nl) |
NL (2) | NL161297C (nl) |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5217392B1 (nl) * | 1970-09-18 | 1977-05-14 | ||
JPS5015109B1 (nl) * | 1970-12-24 | 1975-06-02 | ||
US3921078A (en) * | 1971-04-20 | 1975-11-18 | Jeol Ltd | Breakdown protection for field emission electron gun |
JPS5318862B1 (nl) * | 1971-07-19 | 1978-06-17 | ||
DE2151167C3 (de) * | 1971-10-14 | 1974-05-09 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Elektronenstrahl-Mikroanalysator mit Auger-Elektronen-Nachweis |
CA976594A (en) * | 1972-02-14 | 1975-10-21 | Vincent J. Coates | Field emission electron gun |
JPS5420828B2 (nl) * | 1972-06-09 | 1979-07-25 | ||
DE2234381C3 (de) * | 1972-07-10 | 1975-10-16 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Elektronenstrahl-Beleuchtungssystem |
US3809899A (en) * | 1972-08-17 | 1974-05-07 | Tektronix Inc | Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope |
NL7213355A (nl) * | 1972-10-03 | 1974-04-05 | ||
JPS49112565A (nl) * | 1973-02-23 | 1974-10-26 | ||
US3842272A (en) * | 1973-07-24 | 1974-10-15 | American Optical Corp | Scanning charged particle microprobe with external spurious electric field effect correction |
US4041316A (en) * | 1974-09-20 | 1977-08-09 | Hitachi, Ltd. | Field emission electron gun with an evaporation source |
US3946268A (en) * | 1974-10-21 | 1976-03-23 | American Optical Corporation | Field emission gun improvement |
DE2548831C2 (de) * | 1974-12-20 | 1985-11-14 | Nanometrics Inc., Sunnyvale, Calif. | Impulsgenerator für Rasteranzeigegeräte |
DE2819165A1 (de) * | 1978-05-02 | 1979-11-15 | Siemens Ag | Rasterelektronenmikroskop |
FR2527383A1 (fr) * | 1982-05-24 | 1983-11-25 | Univ Reims Champagne Ardenne | Canon a electrons avec cathode a emission de champ et lentille magnetique |
US4663525A (en) * | 1985-07-08 | 1987-05-05 | Nanometrics Incorporated | Method for electron gun alignment in electron microscopes |
WO1988002180A1 (en) * | 1986-09-18 | 1988-03-24 | Crewe Albert V | Differential pressure electron beam system, method and gun |
JPH0640475B2 (ja) * | 1988-01-25 | 1994-05-25 | 日本電子株式会社 | 電界放出型電子銃 |
US4833362A (en) * | 1988-04-19 | 1989-05-23 | Orchid One | Encapsulated high brightness electron beam source and system |
US5150001A (en) * | 1990-04-10 | 1992-09-22 | Orchid One Corporation | Field emission electron gun and method having complementary passive and active vacuum pumping |
EP0689225B1 (en) * | 1990-08-10 | 1999-12-22 | Koninklijke Philips Electronics N.V. | Charged particle beam device |
US5401973A (en) * | 1992-12-04 | 1995-03-28 | Atomic Energy Of Canada Limited | Industrial material processing electron linear accelerator |
US5698942A (en) * | 1996-07-22 | 1997-12-16 | University Of North Carolina | Field emitter flat panel display device and method for operating same |
JP3147227B2 (ja) * | 1998-09-01 | 2001-03-19 | 日本電気株式会社 | 冷陰極電子銃 |
DE60011031T2 (de) * | 2000-02-01 | 2005-06-23 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Optische Säule für Teilchenstrahlvorrichtung |
JP4262158B2 (ja) * | 2004-07-13 | 2009-05-13 | 株式会社日立ハイテクサイエンスシステムズ | 低真空走査電子顕微鏡 |
JP2006216396A (ja) * | 2005-02-04 | 2006-08-17 | Hitachi High-Technologies Corp | 荷電粒子線装置 |
EP1983548A1 (en) * | 2007-04-20 | 2008-10-22 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Emitter chamber, charged particle apparatus and method for operating same |
US9189728B2 (en) | 2009-07-23 | 2015-11-17 | I-Property Holding Corp. | Method for the authentication of dosage forms |
US20130126731A1 (en) * | 2010-02-08 | 2013-05-23 | Hitachi High-Technologies Corporation | Charged Particle Microscope and Ion Microscope |
US8796638B2 (en) | 2011-06-08 | 2014-08-05 | Mks Instruments, Inc. | Mass spectrometry for a gas analysis with a two-stage charged particle deflector lens between a charged particle source and a charged particle analyzer both offset from a central axis of the deflector lens |
US8450681B2 (en) | 2011-06-08 | 2013-05-28 | Mks Instruments, Inc. | Mass spectrometry for gas analysis in which both a charged particle source and a charged particle analyzer are offset from an axis of a deflector lens, resulting in reduced baseline signal offsets |
US8796620B2 (en) * | 2011-06-08 | 2014-08-05 | Mks Instruments, Inc. | Mass spectrometry for gas analysis with a one-stage charged particle deflector lens between a charged particle source and a charged particle analyzer both offset from a central axis of the deflector lens |
US9224572B2 (en) * | 2012-12-18 | 2015-12-29 | General Electric Company | X-ray tube with adjustable electron beam |
WO2016063325A1 (ja) | 2014-10-20 | 2016-04-28 | 株式会社日立ハイテクノロジーズ | 走査電子顕微鏡 |
US9981293B2 (en) * | 2016-04-21 | 2018-05-29 | Mapper Lithography Ip B.V. | Method and system for the removal and/or avoidance of contamination in charged particle beam systems |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE735313C (de) * | 1937-06-30 | 1943-05-12 | Aeg | Einrichtung zur Erzeugung eines vorzugsweise intensitaetsgesteuerten Elektronenstrahles durch Feldemission einer mit einer Spitze versehenen kalten Kathode unter Verwendung eines elektronenoptischen Abbildungssystems |
US2243362A (en) * | 1938-08-20 | 1941-05-27 | Thomas W Sukumlyn | Electron microscope system |
US2363359A (en) * | 1941-05-01 | 1944-11-21 | Gen Electric | Electron microscope |
US2289071A (en) * | 1941-10-03 | 1942-07-07 | Gen Electric | Electron lens |
FR937296A (fr) * | 1947-06-21 | 1948-08-12 | Csf | Perfectionnements aux dispositifs de mise au point, pour microscope électronique |
BE481554A (nl) * | 1947-06-26 | |||
US3090882A (en) * | 1960-04-13 | 1963-05-21 | Rca Corp | Electron gun |
US3191028A (en) * | 1963-04-22 | 1965-06-22 | Albert V Crewe | Scanning electron microscope |
US3394874A (en) * | 1967-02-09 | 1968-07-30 | Gen Electrodynamics Corp | Ion pumping electron gun |
-
1970
- 1970-06-15 US US46425A patent/US3678333A/en not_active Expired - Lifetime
-
1971
- 1971-06-14 NL NL7108096.A patent/NL161297C/nl not_active IP Right Cessation
- 1971-06-14 FR FR7122754A patent/FR2099295A5/fr not_active Expired
- 1971-06-15 DE DE2129636A patent/DE2129636C2/de not_active Expired
- 1971-06-15 GB GB2800371A patent/GB1355365A/en not_active Expired
- 1971-08-16 US US00171815A patent/US3784815A/en not_active Expired - Lifetime
-
1972
- 1972-05-26 CA CA143,166,A patent/CA950592A/en not_active Expired
- 1972-06-07 AU AU43196/72A patent/AU466190B2/en not_active Expired
- 1972-06-30 NL NL7209179.A patent/NL165604C/nl not_active IP Right Cessation
- 1972-07-21 DE DE2235903A patent/DE2235903C2/de not_active Expired
- 1972-07-28 FR FR7228997A patent/FR2149412B1/fr not_active Expired
- 1972-08-16 GB GB3819272A patent/GB1378554A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
AU466190B2 (en) | 1973-12-13 |
CA950592A (en) | 1974-07-02 |
NL165604B (nl) | 1980-11-17 |
US3784815A (en) | 1974-01-08 |
AU4319672A (en) | 1973-12-13 |
FR2149412A1 (nl) | 1973-03-30 |
NL7108096A (nl) | 1971-12-17 |
DE2235903C2 (de) | 1986-04-17 |
NL161297B (nl) | 1979-08-15 |
US3678333A (en) | 1972-07-18 |
DE2129636C2 (de) | 1986-04-10 |
NL7209179A (nl) | 1973-02-20 |
DE2129636A1 (de) | 1971-12-23 |
DE2235903A1 (de) | 1973-03-01 |
GB1355365A (en) | 1974-06-05 |
FR2149412B1 (nl) | 1978-02-03 |
GB1378554A (en) | 1974-12-27 |
FR2099295A5 (nl) | 1972-03-10 |
NL161297C (nl) | 1980-01-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
BK | Erratum | ||
SNR | Assignments of patents or rights arising from examined patent applications |
Owner name: WARNER LAMBERT TECHNOLOGIES, INC. |
|
SNR | Assignments of patents or rights arising from examined patent applications |
Owner name: NANOMETRICS, INC. |
|
V4 | Discontinued because of reaching the maximum lifetime of a patent |