NL158022B - Werkwijze voor het vervaardigen van een halfgeleiderinrichting. - Google Patents
Werkwijze voor het vervaardigen van een halfgeleiderinrichting.Info
- Publication number
- NL158022B NL158022B NL7415531.A NL7415531A NL158022B NL 158022 B NL158022 B NL 158022B NL 7415531 A NL7415531 A NL 7415531A NL 158022 B NL158022 B NL 158022B
- Authority
- NL
- Netherlands
- Prior art keywords
- manufacturing
- semiconductor device
- semiconductor
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28575—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising AIIIBV compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02387—Group 13/15 materials
- H01L21/02395—Arsenides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02455—Group 13/15 materials
- H01L21/02463—Arsenides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02494—Structure
- H01L21/02496—Layer structure
- H01L21/02502—Layer structure consisting of two layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/02546—Arsenides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/0257—Doping during depositing
- H01L21/02573—Conductivity type
- H01L21/02576—N-type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/0257—Doping during depositing
- H01L21/02573—Conductivity type
- H01L21/02579—P-type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02623—Liquid deposition
- H01L21/02625—Liquid deposition using melted materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02623—Liquid deposition
- H01L21/02628—Liquid deposition using solutions
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
- Semiconductor Lasers (AREA)
- Led Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US421026A US3914785A (en) | 1973-12-03 | 1973-12-03 | Germanium doped GaAs layer as an ohmic contact |
Publications (2)
Publication Number | Publication Date |
---|---|
NL7415531A NL7415531A (nl) | 1975-06-05 |
NL158022B true NL158022B (nl) | 1978-09-15 |
Family
ID=23668885
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL7415531.A NL158022B (nl) | 1973-12-03 | 1974-11-28 | Werkwijze voor het vervaardigen van een halfgeleiderinrichting. |
Country Status (10)
Country | Link |
---|---|
US (1) | US3914785A (sv) |
JP (1) | JPS5087579A (sv) |
BE (1) | BE822655A (sv) |
CA (1) | CA1034469A (sv) |
DE (1) | DE2457130A1 (sv) |
FR (1) | FR2253279B1 (sv) |
GB (1) | GB1479154A (sv) |
IT (1) | IT1024956B (sv) |
NL (1) | NL158022B (sv) |
SE (1) | SE402839B (sv) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4048627A (en) * | 1975-11-17 | 1977-09-13 | Rca Corporation | Electroluminescent semiconductor device having a restricted current flow |
US4074305A (en) * | 1976-11-16 | 1978-02-14 | Bell Telephone Laboratories, Incorporated | Gaas layers as contacts to thin film semiconductor layers |
US4081824A (en) * | 1977-03-24 | 1978-03-28 | Bell Telephone Laboratories, Incorporated | Ohmic contact to aluminum-containing compound semiconductors |
US4186410A (en) * | 1978-06-27 | 1980-01-29 | Bell Telephone Laboratories, Incorporated | Nonalloyed ohmic contacts to n-type Group III(a)-V(a) semiconductors |
US4188710A (en) * | 1978-08-11 | 1980-02-19 | The United States Of America As Represented By The Secretary Of The Navy | Ohmic contacts for group III-V n-type semiconductors using epitaxial germanium films |
US4301188A (en) * | 1979-10-01 | 1981-11-17 | Bell Telephone Laboratories, Incorporated | Process for producing contact to GaAs active region |
US4523212A (en) * | 1982-03-12 | 1985-06-11 | The United States Of America As Represented By The Secretary Of The Air Force | Simultaneous doped layers for semiconductor devices |
US4593307A (en) * | 1983-06-30 | 1986-06-03 | International Business Machines Corporation | High temperature stable ohmic contact to gallium arsenide |
JPH0722141B2 (ja) * | 1984-03-07 | 1995-03-08 | 住友電気工業株式会社 | 半導体素子の製造方法 |
US4583110A (en) * | 1984-06-14 | 1986-04-15 | International Business Machines Corporation | Intermetallic semiconductor ohmic contact |
US4853346A (en) * | 1987-12-31 | 1989-08-01 | International Business Machines Corporation | Ohmic contacts for semiconductor devices and method for forming ohmic contacts |
JPH01280368A (ja) * | 1988-05-06 | 1989-11-10 | Sharp Corp | 化合物半導体発光素子 |
US5061972A (en) * | 1988-12-14 | 1991-10-29 | Cree Research, Inc. | Fast recovery high temperature rectifying diode formed in silicon carbide |
US5144410A (en) * | 1989-03-29 | 1992-09-01 | Vitesse Semiconductor Corporation | Ohmic contact for III-V semiconductor devices |
JP3959434B2 (ja) * | 1995-08-29 | 2007-08-15 | 昭和電工株式会社 | 発光ダイオード素子 |
JP4050128B2 (ja) * | 2002-10-24 | 2008-02-20 | 松下電器産業株式会社 | ヘテロ接合電界効果型トランジスタ及びその製造方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4921992B1 (sv) * | 1969-06-30 | 1974-06-05 | ||
JPS5129636B1 (sv) * | 1970-12-25 | 1976-08-26 | ||
US3770518A (en) * | 1971-01-28 | 1973-11-06 | Varian Associates | Method of making gallium arsenide semiconductive devices |
-
1973
- 1973-12-03 US US421026A patent/US3914785A/en not_active Expired - Lifetime
-
1974
- 1974-09-05 CA CA208,555A patent/CA1034469A/en not_active Expired
- 1974-11-22 SE SE7414708A patent/SE402839B/sv unknown
- 1974-11-27 BE BE150906A patent/BE822655A/xx unknown
- 1974-11-28 NL NL7415531.A patent/NL158022B/xx unknown
- 1974-12-02 FR FR7439368A patent/FR2253279B1/fr not_active Expired
- 1974-12-02 IT IT70501/74A patent/IT1024956B/it active
- 1974-12-02 JP JP49137088A patent/JPS5087579A/ja active Pending
- 1974-12-03 GB GB52162/74A patent/GB1479154A/en not_active Expired
- 1974-12-03 DE DE19742457130 patent/DE2457130A1/de active Pending
Also Published As
Publication number | Publication date |
---|---|
USB421026I5 (sv) | 1975-01-28 |
SE402839B (sv) | 1978-07-17 |
FR2253279B1 (sv) | 1978-04-14 |
FR2253279A1 (sv) | 1975-06-27 |
NL7415531A (nl) | 1975-06-05 |
US3914785A (en) | 1975-10-21 |
IT1024956B (it) | 1978-07-20 |
JPS5087579A (sv) | 1975-07-14 |
DE2457130A1 (de) | 1975-06-12 |
GB1479154A (en) | 1977-07-06 |
CA1034469A (en) | 1978-07-11 |
SE7414708L (sv) | 1975-06-04 |
BE822655A (fr) | 1975-03-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
VJC | Lapsed due to non-payment of the due maintenance fee for the patent or patent application | ||
NL80 | Information provided on patent owner name for an already discontinued patent |
Owner name: WESTERN ELECT |