NL130959C - - Google Patents

Info

Publication number: NL130959C
Authority: NL; Netherlands

Application number

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1965-12-17

Publication of NL130959C publication Critical patent/NL130959C/xx

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/354—Introduction of auxiliary energy into the plasma
- C23C14/355—Introduction of auxiliary energy into the plasma using electrons, e.g. triode sputtering
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
Plasma & Fusion (AREA)
Materials Engineering (AREA)
Chemical Kinetics & Catalysis (AREA)
Analytical Chemistry (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Physical Vapour Deposition (AREA)
Closures For Containers (AREA)
Electrostatic Spraying Apparatus (AREA)
Other Surface Treatments For Metallic Materials (AREA)
Physical Or Chemical Processes And Apparatus (AREA)

NL130959D 1965-12-17 NL130959C (de)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
BE21744		1965-12-17
CH1750265A CH456294A (de)	1965-12-17	1965-12-18	Anordnung zur Zerstäubung von Stoffen mittels einer elektrischen Niederspannungsentladung
DE19742459030 DE2459030B2 (de)	1965-12-17	1974-12-13	Sicherheitsverschluss fuer behaelter

Publications (1)

Publication Number	Publication Date
NL130959C true NL130959C (de)

Family

ID=27158372

Family Applications (3)

Application Number	Title	Priority Date	Filing Date
NL130959D NL130959C (de)	1965-12-17
NL6600953A NL6600953A (de)	1965-12-17	1966-01-25
NL666610803A NL149234B (nl)	1965-12-17	1966-08-01	Werkwijze en inrichting voor het afzetten van dunne lagen geleidend of halfgeleidend materiaal op het oppervlak van een lichaam.

Family Applications After (2)

Application Number	Title	Priority Date	Filing Date
NL6600953A NL6600953A (de)	1965-12-17	1966-01-25
NL666610803A NL149234B (nl)	1965-12-17	1966-08-01	Werkwijze en inrichting voor het afzetten van dunne lagen geleidend of halfgeleidend materiaal op het oppervlak van een lichaam.

Country Status (17)

Country	Link
US (3)	US3540993A (de)
JP (1)	JPS5184381A (de)
AR (1)	AR207605A1 (de)
BE (2)	BE673939A (de)
CH (3)	CH456294A (de)
DD (1)	DD122355A5 (de)
DE (3)	DE1515296A1 (de)
DK (2)	DK129950B (de)
ES (1)	ES330812A1 (de)
FR (3)	FR1505170A (de)
GB (3)	GB1162832A (de)
IT (1)	IT1051344B (de)
LU (1)	LU51389A1 (de)
NL (3)	NL6600953A (de)
NO (1)	NO116568B (de)
SE (3)	SE320247B (de)
SU (1)	SU569277A3 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE1765850A1 (de) *	1967-11-10	1971-10-28	Euratom	Verfahren und Vorrichtung zum Aufbringen von duennen Schichten
US3669871A (en) *	1969-09-10	1972-06-13	Ibm	Sputtering apparatus having a concave source cathode
BE766345A (fr) *	1971-04-27	1971-09-16	Universitaire De L Etat A Mons	Dispositif pour fabriquer des couches minces de substances minerales.
US3856654A (en) *	1971-08-26	1974-12-24	Western Electric Co	Apparatus for feeding and coating masses of workpieces in a controlled atmosphere
CH551497A (de) *	1971-10-06	1974-07-15	Balzers Patent Beteilig Ag	Anordnung zur zerstaeubung von stoffen mittels einer elektrischen niederspannungsentladung.
AU507748B2 (en) *	1976-06-10	1980-02-28	University Of Sydney, The	Reactive sputtering
DE2735525A1 (de) *	1977-08-06	1979-02-22	Leybold Heraeus Gmbh & Co Kg	Katodenanordnung mit target fuer zerstaeubungsanlagen zum aufstaeuben dielektrischer oder amagnetischer schichten auf substrate
JPS57174467A (en) *	1981-04-20	1982-10-27	Inoue Japax Res Inc	Ion working device
DE3206421A1 (de) *	1982-02-23	1983-09-01	Siemens AG, 1000 Berlin und 8000 München	Verfahren zum herstellen von schichten aus hochschmelzenden metallen bzw. metallverbindungen durch abscheidung aus der dampfphase
GB2138410B (en) *	1983-04-22	1986-07-16	Metal Closures Group Plc	Safety closure with click mechanism
US4559121A (en) *	1983-09-12	1985-12-17	Vac-Tec Systems, Inc.	Method and apparatus for evaporation arc stabilization for permeable targets
US4559125A (en) *	1983-09-12	1985-12-17	Vac-Tec Systems, Inc.	Apparatus for evaporation arc stabilization during the initial clean-up of an arc target
US4491509A (en) *	1984-03-09	1985-01-01	At&T Technologies, Inc.	Methods of and apparatus for sputtering material onto a substrate
US4489834A (en) *	1984-07-02	1984-12-25	Thackrey James D	Counting cap for medicine bottles
IT1181798B (it) *	1984-12-13	1987-09-30	Taplast Di Evans Santagiuliana	Tappo per bottiglie con sigillo e apertura di sicurezza realizzato preferibilmente in materia plastica
DE3503398A1 (de) *	1985-02-01	1986-08-07	W.C. Heraeus Gmbh, 6450 Hanau	Sputteranlage zum reaktiven beschichten eines substrates mit hartstoffen
US5020681A (en) *	1990-02-01	1991-06-04	Owens-Illinois Closure Inc.	Child resistant closure
AU662349B2 (en) *	1991-07-30	1995-08-31	Warner-Lambert Company	Tamper-evident cap for a container
CH687111A5 (de) *	1992-05-26	1996-09-13	Balzers Hochvakuum	Verfahren zum Erzeugen einer Niederspannungsentladung, Vakuumbehandlungsanlage hierfuer sowie Anwendung des Verfahrens.
JPH07257425A (ja) *	1994-03-18	1995-10-09	Honda Motor Co Ltd	自動車用車体のサブフレーム取付け構造
DE19625577A1 (de) *	1996-06-27	1998-01-02	Vaw Motor Gmbh	Aluminium-Gußteil und Verfahren zu seiner Herstellung
US5917285A (en) *	1996-07-24	1999-06-29	Georgia Tech Research Corporation	Apparatus and method for reducing operating voltage in gas discharge devices
US6217715B1 (en) *	1997-02-06	2001-04-17	Applied Materials, Inc.	Coating of vacuum chambers to reduce pump down time and base pressure
IT1291620B1 (it) *	1997-04-18	1999-01-11	Phaba Srl	Chiusura antibambino per flaconi in genere ad azionamento facilitato e a sicurezza incrementata
US6382444B1 (en) *	1999-03-17	2002-05-07	Sentinel Packaging Systems, Inc.	Tamper-evident plastic closure system with snap-on band
US6551471B1 (en)	1999-11-30	2003-04-22	Canon Kabushiki Kaisha	Ionization film-forming method and apparatus
FR2814724B1 (fr) *	2000-10-04	2003-04-04	Airsec Sa	Dispositif de fermeture de securite a l'epreuve d'enfants par vissage d'un conteneur muni d'une embouchure a filet de vis
US7141145B2 (en) *	2003-10-02	2006-11-28	Seagate Technology Llc	Gas injection for uniform composition reactively sputter-deposited thin films
US20050145086A1 (en) *	2004-01-05	2005-07-07	Mohr Monte D.	Combination pencil sharpener bottle cap
IT1394229B1 (it) *	2009-04-16	2012-06-01	Tapi S R L	Tappo a vite per contenitori per liquidi
EP3260390B1 (de) *	2016-06-22	2019-12-04	Clariant Healthcare Packaging (France) SAS	Aussenkappe für kindersicheren verschluss, kindersicherer verschluss, behälter mit solch einem verschluss und dessen verwendung

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US2069835A (en) *	1935-04-25	1937-02-09	Bell Telephone Labor Inc	Coating apparatus
NL46111C (de) *	1935-10-12
NL50072C (de) *	1935-12-28
DE672664C (de) *	1936-06-17	1939-03-08	Bernhard Berghaus	Verfahren zur Kathodenzerstaeubung mittels zusaetzlich geheizter Kathode
US2920002A (en) *	1952-06-25	1960-01-05	Auwarter Max	Process for the manufacture of thin films
US3021271A (en) *	1959-04-27	1962-02-13	Gen Mills Inc	Growth of solid layers on substrates which are kept under ion bombardment before and during deposition
US3250694A (en) *	1962-10-17	1966-05-10	Ibm	Apparatus for coating articles by cathode sputtering
US3305473A (en) *	1964-08-20	1967-02-21	Cons Vacuum Corp	Triode sputtering apparatus for depositing uniform coatings
US3386909A (en) *	1964-12-08	1968-06-04	Air Force Usa	Apparatus for depositing material on a filament from ionized coating material
US3369990A (en) *	1964-12-31	1968-02-20	Ibm	Cathodic sputtering apparatus including thermionic means for increasing sputtering efficiency
US3287243A (en) *	1965-03-29	1966-11-22	Bell Telephone Labor Inc	Deposition of insulating films by cathode sputtering in an rf-supported discharge
US3394829A (en) *	1967-04-10	1968-07-30	Harris M. Peterson	Safety cap
US3857505A (en) *	1973-10-01	1974-12-31	Owens Illinois Inc	Safety closure

0
- NL NL130959D patent/NL130959C/xx active
- FR FR1502647D patent/FR1502647A/fr not_active Expired
1965
- 1965-12-17 BE BE673939A patent/BE673939A/xx not_active Expired
- 1965-12-18 CH CH1750265A patent/CH456294A/de unknown
1966
- 1966-01-25 NL NL6600953A patent/NL6600953A/xx unknown
- 1966-06-22 LU LU51389A patent/LU51389A1/xx unknown
- 1966-07-20 SE SE9930/66A patent/SE320247B/xx unknown
- 1966-08-01 NL NL666610803A patent/NL149234B/xx not_active IP Right Cessation
- 1966-08-18 NO NO164352A patent/NO116568B/no unknown
- 1966-09-01 GB GB39140/66A patent/GB1162832A/en not_active Expired
- 1966-09-01 ES ES330812A patent/ES330812A1/es not_active Expired
- 1966-09-09 DE DE19661515296 patent/DE1515296A1/de active Pending
- 1966-09-16 US US579917A patent/US3540993A/en not_active Expired - Lifetime
- 1966-11-03 CH CH1587966A patent/CH478255A/fr not_active IP Right Cessation
- 1966-11-16 DE DE1515294A patent/DE1515294C3/de not_active Expired
- 1966-11-30 GB GB53527/66A patent/GB1113579A/en not_active Expired
- 1966-12-12 DK DK643766AA patent/DK129950B/da unknown
- 1966-12-12 BE BE691083D patent/BE691083A/xx unknown
- 1966-12-14 SE SE17139/66A patent/SE324684B/xx unknown
- 1966-12-16 US US602398A patent/US3516919A/en not_active Expired - Lifetime
- 1966-12-19 FR FR87909A patent/FR1505170A/fr not_active Expired
1974
- 1974-12-13 DE DE19742459030 patent/DE2459030B2/de active Granted
1975
- 1975-01-01 AR AR261531A patent/AR207605A1/es active
- 1975-11-12 CH CH1469375A patent/CH593836A5/xx not_active IP Right Cessation
- 1975-11-28 GB GB48979/75A patent/GB1505170A/en not_active Expired
- 1975-12-02 US US05/637,082 patent/US3972436A/en not_active Expired - Lifetime
- 1975-12-05 IT IT69999/75A patent/IT1051344B/it active
- 1975-12-08 SU SU7502197001A patent/SU569277A3/ru active
- 1975-12-11 SE SE7513992A patent/SE423520B/xx unknown
- 1975-12-12 DK DK565675A patent/DK136767C/da active
- 1975-12-12 JP JP50147478A patent/JPS5184381A/ja active Pending
- 1975-12-12 DD DD190105A patent/DD122355A5/xx unknown
- 1975-12-12 FR FR7538102A patent/FR2294100A1/fr active Granted

Also Published As

Publication number	Publication date
ES330812A1 (es)	1969-08-16
DE1515296A1 (de)	1969-08-14
US3540993A (en)	1970-11-17
GB1162832A (en)	1969-08-27
NL149234B (nl)	1976-04-15
GB1505170A (en)	1978-03-30
NL6600953A (de)	1967-06-19
LU51389A1 (de)	1966-08-22
SU569277A3 (ru)	1977-08-15
DK136767B (da)	1977-11-21
CH593836A5 (de)	1977-12-15
DK129950C (de)	1975-05-20
DE1515294C3 (de)	1973-01-04
BE673939A (de)	1966-06-17
NL6610803A (de)	1967-06-19
DD122355A5 (de)	1976-10-05
US3516919A (en)	1970-06-23
GB1113579A (en)	1968-05-15
JPS5184381A (de)	1976-07-23
FR1502647A (de)	1968-02-07
SE423520B (sv)	1982-05-10
DK129950B (da)	1974-12-02
FR2294100B1 (de)	1982-03-19
DE1515294B2 (de)	1972-06-08
BE691083A (de)	1967-05-16
SE320247B (de)	1970-02-02
DE1515294A1 (de)	1969-08-14
DK136767C (da)	1978-05-08
FR1505170A (fr)	1967-12-08
FR2294100A1 (fr)	1976-07-09
AR207605A1 (es)	1976-10-15
IT1051344B (it)	1981-04-21
NO116568B (de)	1969-04-14
DE2459030B2 (de)	1976-11-11
DE2459030A1 (de)	1976-06-24
CH456294A (de)	1968-05-15
SE324684B (de)	1970-06-08
SE7513992L (sv)	1976-06-14
CH478255A (fr)	1969-09-15
DK565675A (da)	1976-06-14
US3972436A (en)	1976-08-03

Publication	Publication Date	Title
FR2294100B1 (de)	1982-03-19
BE673125A (de)	1966-06-01
JPS446939Y1 (de)	1969-03-14
JPS411505Y1 (de)	1966-02-04
JPS411153Y1 (de)	1966-02-01
JPS42272Y1 (de)	1967-01-10
JPS4329396Y1 (de)	1968-12-03
JPS5026172Y1 (de)	1975-08-05
BE674723A (de)	1966-05-16
BE674672A (de)	1966-05-03
BE674524A (de)	1966-04-15
NL6815865A (de)	1969-05-13
BE674477A (de)	1966-06-29
BE674278A (de)	1966-04-15
BE673980A (de)	1966-04-15
BE666175A (de)	1965-10-18
BE675890A (de)	1966-06-16
NL6606244A (de)	1966-11-07
BE674704A (de)	1966-07-04
BE673583A (de)	1966-04-01
BE674703A (de)	1966-07-04
BE672573A (de)
BE675889A (de)	1966-08-01
BE672238A (de)	1966-03-01
BE671856A (de)	1966-03-01