SE324684B - - Google Patents
Info
- Publication number
- SE324684B SE324684B SE17139/66A SE1713966A SE324684B SE 324684 B SE324684 B SE 324684B SE 17139/66 A SE17139/66 A SE 17139/66A SE 1713966 A SE1713966 A SE 1713966A SE 324684 B SE324684 B SE 324684B
- Authority
- SE
- Sweden
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/354—Introduction of auxiliary energy into the plasma
- C23C14/355—Introduction of auxiliary energy into the plasma using electrons, e.g. triode sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| BE21744 | 1965-12-17 | ||
| CH1750265A CH456294A (de) | 1965-12-17 | 1965-12-18 | Anordnung zur Zerstäubung von Stoffen mittels einer elektrischen Niederspannungsentladung |
| DE19742459030 DE2459030B2 (de) | 1965-12-17 | 1974-12-13 | Sicherheitsverschluss fuer behaelter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE324684B true SE324684B (xx) | 1970-06-08 |
Family
ID=27158372
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE9930/66A SE320247B (xx) | 1965-12-17 | 1966-07-20 | |
| SE17139/66A SE324684B (xx) | 1965-12-17 | 1966-12-14 | |
| SE7513992A SE423520B (sv) | 1965-12-17 | 1975-12-11 | Sekerhetstillslutning for behallare |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE9930/66A SE320247B (xx) | 1965-12-17 | 1966-07-20 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE7513992A SE423520B (sv) | 1965-12-17 | 1975-12-11 | Sekerhetstillslutning for behallare |
Country Status (17)
| Country | Link |
|---|---|
| US (3) | US3540993A (xx) |
| JP (1) | JPS5184381A (xx) |
| AR (1) | AR207605A1 (xx) |
| BE (2) | BE673939A (xx) |
| CH (3) | CH456294A (xx) |
| DD (1) | DD122355A5 (xx) |
| DE (3) | DE1515296A1 (xx) |
| DK (2) | DK129950B (xx) |
| ES (1) | ES330812A1 (xx) |
| FR (3) | FR1505170A (xx) |
| GB (3) | GB1162832A (xx) |
| IT (1) | IT1051344B (xx) |
| LU (1) | LU51389A1 (xx) |
| NL (3) | NL6600953A (xx) |
| NO (1) | NO116568B (xx) |
| SE (3) | SE320247B (xx) |
| SU (1) | SU569277A3 (xx) |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1765850A1 (de) * | 1967-11-10 | 1971-10-28 | Euratom | Verfahren und Vorrichtung zum Aufbringen von duennen Schichten |
| US3669871A (en) * | 1969-09-10 | 1972-06-13 | Ibm | Sputtering apparatus having a concave source cathode |
| BE766345A (fr) * | 1971-04-27 | 1971-09-16 | Universitaire De L Etat A Mons | Dispositif pour fabriquer des couches minces de substances minerales. |
| US3856654A (en) * | 1971-08-26 | 1974-12-24 | Western Electric Co | Apparatus for feeding and coating masses of workpieces in a controlled atmosphere |
| CH551497A (de) * | 1971-10-06 | 1974-07-15 | Balzers Patent Beteilig Ag | Anordnung zur zerstaeubung von stoffen mittels einer elektrischen niederspannungsentladung. |
| AU507748B2 (en) * | 1976-06-10 | 1980-02-28 | University Of Sydney, The | Reactive sputtering |
| DE2735525A1 (de) * | 1977-08-06 | 1979-02-22 | Leybold Heraeus Gmbh & Co Kg | Katodenanordnung mit target fuer zerstaeubungsanlagen zum aufstaeuben dielektrischer oder amagnetischer schichten auf substrate |
| JPS57174467A (en) * | 1981-04-20 | 1982-10-27 | Inoue Japax Res Inc | Ion working device |
| DE3206421A1 (de) * | 1982-02-23 | 1983-09-01 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum herstellen von schichten aus hochschmelzenden metallen bzw. metallverbindungen durch abscheidung aus der dampfphase |
| GB2138410B (en) * | 1983-04-22 | 1986-07-16 | Metal Closures Group Plc | Safety closure with click mechanism |
| US4559121A (en) * | 1983-09-12 | 1985-12-17 | Vac-Tec Systems, Inc. | Method and apparatus for evaporation arc stabilization for permeable targets |
| US4559125A (en) * | 1983-09-12 | 1985-12-17 | Vac-Tec Systems, Inc. | Apparatus for evaporation arc stabilization during the initial clean-up of an arc target |
| US4491509A (en) * | 1984-03-09 | 1985-01-01 | At&T Technologies, Inc. | Methods of and apparatus for sputtering material onto a substrate |
| US4489834A (en) * | 1984-07-02 | 1984-12-25 | Thackrey James D | Counting cap for medicine bottles |
| IT1181798B (it) * | 1984-12-13 | 1987-09-30 | Taplast Di Evans Santagiuliana | Tappo per bottiglie con sigillo e apertura di sicurezza realizzato preferibilmente in materia plastica |
| DE3503398A1 (de) * | 1985-02-01 | 1986-08-07 | W.C. Heraeus Gmbh, 6450 Hanau | Sputteranlage zum reaktiven beschichten eines substrates mit hartstoffen |
| US5020681A (en) * | 1990-02-01 | 1991-06-04 | Owens-Illinois Closure Inc. | Child resistant closure |
| CA2113903A1 (en) * | 1991-07-30 | 1993-02-18 | Brian Leslie Ogden | Cap for a container |
| CH687111A5 (de) * | 1992-05-26 | 1996-09-13 | Balzers Hochvakuum | Verfahren zum Erzeugen einer Niederspannungsentladung, Vakuumbehandlungsanlage hierfuer sowie Anwendung des Verfahrens. |
| JPH07257425A (ja) * | 1994-03-18 | 1995-10-09 | Honda Motor Co Ltd | 自動車用車体のサブフレーム取付け構造 |
| DE19625577A1 (de) | 1996-06-27 | 1998-01-02 | Vaw Motor Gmbh | Aluminium-Gußteil und Verfahren zu seiner Herstellung |
| US5917285A (en) * | 1996-07-24 | 1999-06-29 | Georgia Tech Research Corporation | Apparatus and method for reducing operating voltage in gas discharge devices |
| US6217715B1 (en) * | 1997-02-06 | 2001-04-17 | Applied Materials, Inc. | Coating of vacuum chambers to reduce pump down time and base pressure |
| IT1291620B1 (it) * | 1997-04-18 | 1999-01-11 | Phaba Srl | Chiusura antibambino per flaconi in genere ad azionamento facilitato e a sicurezza incrementata |
| US6382444B1 (en) * | 1999-03-17 | 2002-05-07 | Sentinel Packaging Systems, Inc. | Tamper-evident plastic closure system with snap-on band |
| US6551471B1 (en) | 1999-11-30 | 2003-04-22 | Canon Kabushiki Kaisha | Ionization film-forming method and apparatus |
| FR2814724B1 (fr) * | 2000-10-04 | 2003-04-04 | Airsec Sa | Dispositif de fermeture de securite a l'epreuve d'enfants par vissage d'un conteneur muni d'une embouchure a filet de vis |
| US7141145B2 (en) * | 2003-10-02 | 2006-11-28 | Seagate Technology Llc | Gas injection for uniform composition reactively sputter-deposited thin films |
| US20050145086A1 (en) * | 2004-01-05 | 2005-07-07 | Mohr Monte D. | Combination pencil sharpener bottle cap |
| IT1394229B1 (it) * | 2009-04-16 | 2012-06-01 | Tapi S R L | Tappo a vite per contenitori per liquidi |
| SI3260390T1 (sl) * | 2016-06-22 | 2020-07-31 | Clariant Healthcare Packaging (France) Sas | Zunanji pokrovček za zaporko, ki je varna za otroke, zaporka, ki je varna za otroke, vsebnik s tako zaporko in njegova uporaba |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2069835A (en) * | 1935-04-25 | 1937-02-09 | Bell Telephone Labor Inc | Coating apparatus |
| BE417869A (xx) * | 1935-10-12 | |||
| NL50072C (xx) * | 1935-12-28 | |||
| DE672664C (de) * | 1936-06-17 | 1939-03-08 | Bernhard Berghaus | Verfahren zur Kathodenzerstaeubung mittels zusaetzlich geheizter Kathode |
| US2920002A (en) * | 1952-06-25 | 1960-01-05 | Auwarter Max | Process for the manufacture of thin films |
| US3021271A (en) * | 1959-04-27 | 1962-02-13 | Gen Mills Inc | Growth of solid layers on substrates which are kept under ion bombardment before and during deposition |
| US3250694A (en) * | 1962-10-17 | 1966-05-10 | Ibm | Apparatus for coating articles by cathode sputtering |
| US3305473A (en) * | 1964-08-20 | 1967-02-21 | Cons Vacuum Corp | Triode sputtering apparatus for depositing uniform coatings |
| US3386909A (en) * | 1964-12-08 | 1968-06-04 | Air Force Usa | Apparatus for depositing material on a filament from ionized coating material |
| US3369990A (en) * | 1964-12-31 | 1968-02-20 | Ibm | Cathodic sputtering apparatus including thermionic means for increasing sputtering efficiency |
| US3287243A (en) * | 1965-03-29 | 1966-11-22 | Bell Telephone Labor Inc | Deposition of insulating films by cathode sputtering in an rf-supported discharge |
| US3394829A (en) * | 1967-04-10 | 1968-07-30 | Harris M. Peterson | Safety cap |
| US3857505A (en) * | 1973-10-01 | 1974-12-31 | Owens Illinois Inc | Safety closure |
-
0
- FR FR1502647D patent/FR1502647A/fr not_active Expired
- NL NL130959D patent/NL130959C/xx active
-
1965
- 1965-12-17 BE BE673939A patent/BE673939A/xx not_active Expired
- 1965-12-18 CH CH1750265A patent/CH456294A/de unknown
-
1966
- 1966-01-25 NL NL6600953A patent/NL6600953A/xx unknown
- 1966-06-22 LU LU51389A patent/LU51389A1/xx unknown
- 1966-07-20 SE SE9930/66A patent/SE320247B/xx unknown
- 1966-08-01 NL NL666610803A patent/NL149234B/xx not_active IP Right Cessation
- 1966-08-18 NO NO164352A patent/NO116568B/no unknown
- 1966-09-01 GB GB39140/66A patent/GB1162832A/en not_active Expired
- 1966-09-01 ES ES330812A patent/ES330812A1/es not_active Expired
- 1966-09-09 DE DE19661515296 patent/DE1515296A1/de active Pending
- 1966-09-16 US US579917A patent/US3540993A/en not_active Expired - Lifetime
- 1966-11-03 CH CH1587966A patent/CH478255A/fr not_active IP Right Cessation
- 1966-11-16 DE DE1515294A patent/DE1515294C3/de not_active Expired
- 1966-11-30 GB GB53527/66A patent/GB1113579A/en not_active Expired
- 1966-12-12 DK DK643766AA patent/DK129950B/da unknown
- 1966-12-12 BE BE691083D patent/BE691083A/xx unknown
- 1966-12-14 SE SE17139/66A patent/SE324684B/xx unknown
- 1966-12-16 US US602398A patent/US3516919A/en not_active Expired - Lifetime
- 1966-12-19 FR FR87909A patent/FR1505170A/fr not_active Expired
-
1974
- 1974-12-13 DE DE19742459030 patent/DE2459030B2/de active Granted
-
1975
- 1975-01-01 AR AR261531A patent/AR207605A1/es active
- 1975-11-12 CH CH1469375A patent/CH593836A5/xx not_active IP Right Cessation
- 1975-11-28 GB GB48979/75A patent/GB1505170A/en not_active Expired
- 1975-12-02 US US05/637,082 patent/US3972436A/en not_active Expired - Lifetime
- 1975-12-05 IT IT69999/75A patent/IT1051344B/it active
- 1975-12-08 SU SU7502197001A patent/SU569277A3/ru active
- 1975-12-11 SE SE7513992A patent/SE423520B/xx unknown
- 1975-12-12 DK DK565675A patent/DK136767C/da active
- 1975-12-12 FR FR7538102A patent/FR2294100A1/fr active Granted
- 1975-12-12 DD DD190105A patent/DD122355A5/xx unknown
- 1975-12-12 JP JP50147478A patent/JPS5184381A/ja active Pending