NL1013530C2 - Excimeerlaserinrichting en gas voor excimeerlaser. - Google Patents
Excimeerlaserinrichting en gas voor excimeerlaser. Download PDFInfo
- Publication number
- NL1013530C2 NL1013530C2 NL1013530A NL1013530A NL1013530C2 NL 1013530 C2 NL1013530 C2 NL 1013530C2 NL 1013530 A NL1013530 A NL 1013530A NL 1013530 A NL1013530 A NL 1013530A NL 1013530 C2 NL1013530 C2 NL 1013530C2
- Authority
- NL
- Netherlands
- Prior art keywords
- gas
- excimer laser
- xenon
- xenon gas
- added
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
- H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31769298 | 1998-11-09 | ||
JP31769298 | 1998-11-09 |
Publications (2)
Publication Number | Publication Date |
---|---|
NL1013530A1 NL1013530A1 (nl) | 2000-05-10 |
NL1013530C2 true NL1013530C2 (nl) | 2001-10-24 |
Family
ID=18090969
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL1013530A NL1013530C2 (nl) | 1998-11-09 | 1999-11-09 | Excimeerlaserinrichting en gas voor excimeerlaser. |
Country Status (4)
Country | Link |
---|---|
US (1) | US7006548B1 (ko) |
KR (1) | KR100731948B1 (ko) |
NL (1) | NL1013530C2 (ko) |
TW (1) | TW425741B (ko) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4650881B2 (ja) * | 2005-04-20 | 2011-03-16 | 株式会社小松製作所 | エキシマレーザ装置とレーザガス交換方法と部分ガス交換量演算方法 |
TWI608680B (zh) * | 2015-08-24 | 2017-12-11 | 曼瑟森三汽油公司 | 用於高能雷射系統中之可再回收、再平衡及再循環雷射氣體混合物之系統 |
WO2019207643A1 (ja) * | 2018-04-24 | 2019-10-31 | ギガフォトン株式会社 | レーザガス再生装置及び電子デバイスの製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5307364A (en) * | 1993-05-24 | 1994-04-26 | Spectra Gases, Inc. | Addition of oxygen to a gas mix for use in an excimer laser |
US5450436A (en) * | 1992-11-20 | 1995-09-12 | Kabushiki Kaisha Komatsu Seisakusho | Laser gas replenishing apparatus and method in excimer laser system |
US5463650A (en) * | 1992-07-17 | 1995-10-31 | Kabushiki Kaisha Komatsu Seisakusho | Apparatus for controlling output of an excimer laser device |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3829551A (en) * | 1973-03-27 | 1974-08-13 | Atomic Energy Commission | Atmosphere purification of xenon,radon & radon daughter elements |
GB8927209D0 (en) * | 1989-12-01 | 1990-01-31 | British Aerospace | Apparatus for controlling the composition of a laser gas or gas mixture |
JP3824092B2 (ja) * | 1993-12-24 | 2006-09-20 | 株式会社小松製作所 | エキシマレ−ザ装置のガス補給方法 |
JP2816813B2 (ja) * | 1994-04-12 | 1998-10-27 | 株式会社小松製作所 | エキシマレーザ装置 |
US5982800A (en) * | 1997-04-23 | 1999-11-09 | Cymer, Inc. | Narrow band excimer laser |
US6014398A (en) * | 1997-10-10 | 2000-01-11 | Cymer, Inc. | Narrow band excimer laser with gas additive |
US6018537A (en) | 1997-07-18 | 2000-01-25 | Cymer, Inc. | Reliable, modular, production quality narrow-band high rep rate F2 laser |
US6188710B1 (en) * | 1997-10-10 | 2001-02-13 | Cymer, Inc. | Narrow band gas discharge laser with gas additive |
US6490307B1 (en) * | 1999-03-17 | 2002-12-03 | Lambda Physik Ag | Method and procedure to automatically stabilize excimer laser output parameters |
-
1999
- 1999-10-21 KR KR1019990045777A patent/KR100731948B1/ko not_active IP Right Cessation
- 1999-10-22 TW TW088118283A patent/TW425741B/zh not_active IP Right Cessation
- 1999-11-04 US US09/434,024 patent/US7006548B1/en not_active Expired - Lifetime
- 1999-11-09 NL NL1013530A patent/NL1013530C2/nl not_active IP Right Cessation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5463650A (en) * | 1992-07-17 | 1995-10-31 | Kabushiki Kaisha Komatsu Seisakusho | Apparatus for controlling output of an excimer laser device |
US5450436A (en) * | 1992-11-20 | 1995-09-12 | Kabushiki Kaisha Komatsu Seisakusho | Laser gas replenishing apparatus and method in excimer laser system |
US5307364A (en) * | 1993-05-24 | 1994-04-26 | Spectra Gases, Inc. | Addition of oxygen to a gas mix for use in an excimer laser |
Non-Patent Citations (1)
Title |
---|
TAYLOR R S ET AL: "Transmission properties of spark preionization radiation in rare-gas halide laser gas mixes", IEEE JOURNAL OF QUANTUM ELECTRONICS, DEC. 1995, IEEE, USA, vol. 31, no. 12, pages 2195 - 2207, XP002173818, ISSN: 0018-9197 * |
Also Published As
Publication number | Publication date |
---|---|
NL1013530A1 (nl) | 2000-05-10 |
KR20000035059A (ko) | 2000-06-26 |
KR100731948B1 (ko) | 2007-06-25 |
TW425741B (en) | 2001-03-11 |
US7006548B1 (en) | 2006-02-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AD1A | A request for search or an international type search has been filed | ||
RD2N | Patents in respect of which a decision has been taken or a report has been made (novelty report) |
Effective date: 20010820 |
|
PD2B | A search report has been drawn up | ||
PD | Change of ownership |
Owner name: GIGAPHOTON INC.; JP Free format text: DETAILS ASSIGNMENT: VERANDERING VAN EIGENAAR(S), OVERDRACHT; FORMER OWNER NAME: KOMATSU LTD. Effective date: 20160729 |
|
MM | Lapsed because of non-payment of the annual fee |
Effective date: 20181201 |