NL1007374A1 - Aftastende omgevings-elektronenmicroscoop. - Google Patents

Aftastende omgevings-elektronenmicroscoop.

Info

Publication number
NL1007374A1
NL1007374A1 NL1007374A NL1007374A NL1007374A1 NL 1007374 A1 NL1007374 A1 NL 1007374A1 NL 1007374 A NL1007374 A NL 1007374A NL 1007374 A NL1007374 A NL 1007374A NL 1007374 A1 NL1007374 A1 NL 1007374A1
Authority
NL
Netherlands
Prior art keywords
electron microscope
environmental electron
scanning environmental
scanning
microscope
Prior art date
Application number
NL1007374A
Other languages
English (en)
Other versions
NL1007374C2 (nl
Inventor
Keitaro Hara
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of NL1007374A1 publication Critical patent/NL1007374A1/nl
Application granted granted Critical
Publication of NL1007374C2 publication Critical patent/NL1007374C2/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/0203—Protection arrangements
    • H01J2237/0206—Extinguishing, preventing or controlling unwanted discharges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2602—Details
    • H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere
    • H01J2237/2608—Details operating at elevated pressures, e.g. atmosphere with environmental specimen chamber
NL1007374A 1996-10-29 1997-10-27 Aftastende omgevings-elektronenmicroscoop. NL1007374C2 (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP8286902A JPH10134751A (ja) 1996-10-29 1996-10-29 環境制御型の走査型電子顕微鏡
JP28690296 1996-10-29

Publications (2)

Publication Number Publication Date
NL1007374A1 true NL1007374A1 (nl) 1998-05-06
NL1007374C2 NL1007374C2 (nl) 2002-07-30

Family

ID=17710487

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1007374A NL1007374C2 (nl) 1996-10-29 1997-10-27 Aftastende omgevings-elektronenmicroscoop.

Country Status (2)

Country Link
JP (1) JPH10134751A (nl)
NL (1) NL1007374C2 (nl)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007021162A1 (en) * 2005-08-18 2007-02-22 Cebt Co. Ltd. Method for changing energy of electron beam in electron column
EP1816668A2 (en) * 2006-02-01 2007-08-08 FEI Company Particle-optical apparatus with a predetermined final vacuum pressure
EP2002459B1 (en) * 2006-03-31 2014-11-26 Fei Company Improved detector for charged particle beam instrument
JP5530664B2 (ja) * 2009-06-19 2014-06-25 日本電子株式会社 電子顕微鏡
JP5481401B2 (ja) 2011-01-14 2014-04-23 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
JP2013020918A (ja) * 2011-07-14 2013-01-31 Hitachi High-Technologies Corp 荷電粒子線装置
US9557253B2 (en) 2011-09-09 2017-01-31 Japan Science And Technology Agency Electron microscopic observation method for observing biological sample in shape as it is, and composition for evaporation suppression under vacuum, scanning electron microscope, and transmission electron microscope used in the method
JP6215557B2 (ja) * 2013-04-02 2017-10-18 株式会社日立ハイテクノロジーズ 電子顕微鏡

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5250808A (en) * 1987-05-21 1993-10-05 Electroscan Corporation Integrated electron optical/differential pumping/imaging signal system for an environmental scanning electron microscope
US5412211A (en) * 1993-07-30 1995-05-02 Electroscan Corporation Environmental scanning electron microscope

Also Published As

Publication number Publication date
JPH10134751A (ja) 1998-05-22
NL1007374C2 (nl) 2002-07-30

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Legal Events

Date Code Title Description
AD1A A request for search or an international type search has been filed
RD2N Patents in respect of which a decision has been taken or a report has been made (novelty report)

Effective date: 20020527

PD2B A search report has been drawn up
VD1 Lapsed due to non-payment of the annual fee

Effective date: 20030501