NL1000454C2 - Inrichting voor het bepalen van de richting en snelheid van een luchtstroom. - Google Patents

Inrichting voor het bepalen van de richting en snelheid van een luchtstroom.

Info

Publication number
NL1000454C2
NL1000454C2 NL1000454A NL1000454A NL1000454C2 NL 1000454 C2 NL1000454 C2 NL 1000454C2 NL 1000454 A NL1000454 A NL 1000454A NL 1000454 A NL1000454 A NL 1000454A NL 1000454 C2 NL1000454 C2 NL 1000454C2
Authority
NL
Netherlands
Prior art keywords
chip
pct
measuring
air flow
determining
Prior art date
Application number
NL1000454A
Other languages
English (en)
Dutch (nl)
Inventor
Huibert Jan Verhoeven
Johan Hendrik Huijsing
Arend Hagedoorn
Original Assignee
Mierij Meteo Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to NL1000454A priority Critical patent/NL1000454C2/xx
Application filed by Mierij Meteo Bv filed Critical Mierij Meteo Bv
Priority to AT96920053T priority patent/ATE278968T1/de
Priority to US08/981,127 priority patent/US6035711A/en
Priority to PCT/NL1996/000212 priority patent/WO1996038731A1/en
Priority to JP8535982A priority patent/JPH11505929A/ja
Priority to ES96920053T priority patent/ES2225885T3/es
Priority to DK96920053T priority patent/DK0888556T3/da
Priority to AU58462/96A priority patent/AU5846296A/en
Priority to DE69633575T priority patent/DE69633575T2/de
Priority to EP96920053A priority patent/EP0888556B1/en
Application granted granted Critical
Publication of NL1000454C2 publication Critical patent/NL1000454C2/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P13/00—Indicating or recording presence, absence, or direction, of movement
    • G01P13/02—Indicating direction only, e.g. by weather vane

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Measuring Volume Flow (AREA)
  • Regulation And Control Of Combustion (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Looms (AREA)
  • Control Of Positive-Displacement Air Blowers (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Motor Or Generator Cooling System (AREA)
  • Indicating Or Recording The Presence, Absence, Or Direction Of Movement (AREA)
NL1000454A 1995-05-30 1995-05-30 Inrichting voor het bepalen van de richting en snelheid van een luchtstroom. NL1000454C2 (nl)

Priority Applications (10)

Application Number Priority Date Filing Date Title
NL1000454A NL1000454C2 (nl) 1995-05-30 1995-05-30 Inrichting voor het bepalen van de richting en snelheid van een luchtstroom.
US08/981,127 US6035711A (en) 1995-05-30 1996-05-29 Device for determining the direction and speed of an air flow
PCT/NL1996/000212 WO1996038731A1 (en) 1995-05-30 1996-05-29 Device for determining the direction and speed of an air flow
JP8535982A JPH11505929A (ja) 1995-05-30 1996-05-29 気流の方向及び速度測定装置
AT96920053T ATE278968T1 (de) 1995-05-30 1996-05-29 Vorrichtung zur bestimmung der richtung und geschwindigkeit einer luftströmung
ES96920053T ES2225885T3 (es) 1995-05-30 1996-05-29 Dispositivo para determinar la direccion y velocidad de un flujo de aire.
DK96920053T DK0888556T3 (da) 1995-05-30 1996-05-29 Indretning til fastlæggelse af en luftströms retning og hastighed
AU58462/96A AU5846296A (en) 1995-05-30 1996-05-29 Device for determining the direction and speed of an air flo w
DE69633575T DE69633575T2 (de) 1995-05-30 1996-05-29 Vorrichtung zur bestimmung der richtung und geschwindigkeit einer luftströmung
EP96920053A EP0888556B1 (en) 1995-05-30 1996-05-29 Device for determining the direction and speed of an air flow

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL1000454A NL1000454C2 (nl) 1995-05-30 1995-05-30 Inrichting voor het bepalen van de richting en snelheid van een luchtstroom.

Publications (1)

Publication Number Publication Date
NL1000454C2 true NL1000454C2 (nl) 1996-12-03

Family

ID=19761086

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1000454A NL1000454C2 (nl) 1995-05-30 1995-05-30 Inrichting voor het bepalen van de richting en snelheid van een luchtstroom.

Country Status (10)

Country Link
US (1) US6035711A (es)
EP (1) EP0888556B1 (es)
JP (1) JPH11505929A (es)
AT (1) ATE278968T1 (es)
AU (1) AU5846296A (es)
DE (1) DE69633575T2 (es)
DK (1) DK0888556T3 (es)
ES (1) ES2225885T3 (es)
NL (1) NL1000454C2 (es)
WO (1) WO1996038731A1 (es)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040017357A1 (en) * 2000-08-29 2004-01-29 Masahiro Kinoshita Pointing device
US6502459B1 (en) * 2000-09-01 2003-01-07 Honeywell International Inc. Microsensor for measuring velocity and angular direction of an incoming air stream
JP3825242B2 (ja) * 2000-10-17 2006-09-27 株式会社山武 フローセンサ
EP1223411A1 (en) * 2001-01-12 2002-07-17 Lidact GmbH Universal sensor for measuring shear stress, mass flow or velocity of a fluid or gas, for determining a number of drops, or detecting drip or leakage
CH694974A5 (de) * 2001-04-23 2005-10-14 Sensirion Ag Flusssensor mit Substrat.
EP1840535B1 (en) * 2006-03-31 2011-01-12 Sensirion Holding AG Flow sensor with thermocouples
EP1965179B1 (en) * 2007-02-28 2017-04-12 Sensirion Holding AG Flow detector device with self check
DE202007003027U1 (de) * 2007-03-01 2007-06-21 Sensirion Ag Vorrichtung zur Handhabung von Fluiden mit einem Flußsensor
EP2187182B1 (en) * 2008-11-12 2015-08-05 Sensirion AG Method for operating a flow sensor being repetitively subjected to a thermal and/or chemical cleaning treatment, and flow measuring device
CN105527454B (zh) * 2016-01-19 2018-11-16 东南大学 一种高灵敏热式风速传感器及其封装方法
JP7383875B2 (ja) * 2019-01-23 2023-11-21 ミネベアミツミ株式会社 流向流速測定装置
US10775217B1 (en) * 2019-04-19 2020-09-15 Honeywell International Inc. Thermophile-based flow sensing device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60247170A (ja) * 1984-05-22 1985-12-06 Toshiba Corp 半導体流速検出器
EP0313120A1 (en) * 1987-09-18 1989-04-26 Bronkhorst High-Tech B.V. Direction-sensitive flow-rate indicator
EP0402977A1 (en) * 1989-06-13 1990-12-19 Bronkhorst High-Tech B.V. Device for determining the speed and direction of a flowing medium
EP0463549A1 (de) * 1990-06-22 1992-01-02 Sensycon Gesellschaft Für Industrielle Sensorsysteme Und Prozessleittechnik Mbh Flächenwiderstand für Anemometer

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE391036B (sv) * 1973-12-03 1977-01-31 Elektronik Konstruktions Ab Anordning for metning och/eller overvakning av ett strommande mediums stromningshastighet
DE2900220A1 (de) * 1979-01-04 1980-07-17 Bosch Gmbh Robert Vorrichtung zur messung der masse eines stroemenden mediums
NL177629C (nl) * 1979-07-09 1985-10-16 Brooks Instr Bv Richtingsgevoelige stroomsnelheidsmeter.

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60247170A (ja) * 1984-05-22 1985-12-06 Toshiba Corp 半導体流速検出器
EP0313120A1 (en) * 1987-09-18 1989-04-26 Bronkhorst High-Tech B.V. Direction-sensitive flow-rate indicator
EP0402977A1 (en) * 1989-06-13 1990-12-19 Bronkhorst High-Tech B.V. Device for determining the speed and direction of a flowing medium
EP0463549A1 (de) * 1990-06-22 1992-01-02 Sensycon Gesellschaft Für Industrielle Sensorsysteme Und Prozessleittechnik Mbh Flächenwiderstand für Anemometer

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 10, no. 119 (P - 453) 6 May 1986 (1986-05-06) *
PATENT ABSTRACTS OF JAPAN vol. 12, no. 319 (P - 751) 30 August 1988 (1988-08-30) *

Also Published As

Publication number Publication date
ES2225885T3 (es) 2005-03-16
ATE278968T1 (de) 2004-10-15
EP0888556A1 (en) 1999-01-07
DE69633575D1 (de) 2004-11-11
JPH11505929A (ja) 1999-05-25
US6035711A (en) 2000-03-14
DK0888556T3 (da) 2005-01-31
EP0888556B1 (en) 2004-10-06
DE69633575T2 (de) 2006-02-09
WO1996038731A1 (en) 1996-12-05
AU5846296A (en) 1996-12-18

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