MY187307A - Tape for semiconductor processing - Google Patents

Tape for semiconductor processing

Info

Publication number
MY187307A
MY187307A MYPI2019003947A MYPI2019003947A MY187307A MY 187307 A MY187307 A MY 187307A MY PI2019003947 A MYPI2019003947 A MY PI2019003947A MY PI2019003947 A MYPI2019003947 A MY PI2019003947A MY 187307 A MY187307 A MY 187307A
Authority
MY
Malaysia
Prior art keywords
tape
semiconductor processing
temporary adhesive
measured
value
Prior art date
Application number
MYPI2019003947A
Inventor
Kosuke Hashimoto
Akira Sendai
Toru Sano
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Priority claimed from PCT/JP2018/026882 external-priority patent/WO2019187186A1/en
Publication of MY187307A publication Critical patent/MY187307A/en

Links

Landscapes

  • Adhesive Tapes (AREA)
  • Dicing (AREA)
  • Adhesives Or Adhesive Processes (AREA)

Abstract

A tape for semiconductor processing that can be caused to shrink by heating sufficiently in a short time period and can retain a kerf width is provided. A tape for semiconductor processing 10 of the invention includes a temporary adhesive tape 15 having a substrate film 11; and a temporary adhesive layer 12 formed on at least one surface side of the substrate film 11, in which regarding the temporary adhesive tape 15, the sum of the average value of the differential value of the thermal deformation rate in the MD direction per 1?C between 40?C and 80?C measured at the time of raising temperature by means of a thermomechanical characteristics testing machine, and the average value of the differential value of the thermal deformation rate in the TD direction per 1?C between 40?C and 80?C measured at the time of raising temperature by means of a thermomechanical characteristics testing machine, is a negative value.
MYPI2019003947A 2018-03-28 2018-07-18 Tape for semiconductor processing MY187307A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018061062 2018-03-28
PCT/JP2018/026882 WO2019187186A1 (en) 2018-03-28 2018-07-18 Tape for semiconductor processing

Publications (1)

Publication Number Publication Date
MY187307A true MY187307A (en) 2021-09-21

Family

ID=67023746

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2019003947A MY187307A (en) 2018-03-28 2018-07-18 Tape for semiconductor processing

Country Status (2)

Country Link
JP (1) JP6535138B1 (en)
MY (1) MY187307A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7269096B2 (en) * 2019-05-29 2023-05-08 古河電気工業株式会社 glass processing tape

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2521459B2 (en) * 1987-02-23 1996-08-07 日東電工株式会社 Method of manufacturing semiconductor chip
JP4757442B2 (en) * 1997-02-10 2011-08-24 リンテック株式会社 Chip body adhesive sheet
JP2003342393A (en) * 2002-05-30 2003-12-03 Mitsubishi Polyester Film Copp Polyester soft film for dicing tape
JP5554118B2 (en) * 2010-03-31 2014-07-23 古河電気工業株式会社 Wafer processing tape
JP2012174945A (en) * 2011-02-23 2012-09-10 Furukawa Electric Co Ltd:The Processing method of semiconductor wafer
JP5801584B2 (en) * 2011-03-29 2015-10-28 リンテック株式会社 Dicing tape and chip-shaped part manufacturing method
US10008405B2 (en) * 2012-12-26 2018-06-26 Hitachi Chemical Company, Ltd Expansion method, method for manufacturing semiconductor device, and semiconductor device
CN107431002B (en) * 2015-03-24 2020-09-11 古河电气工业株式会社 Semiconductor processing belt
JP2017147293A (en) * 2016-02-16 2017-08-24 日立化成株式会社 Method for manufacturing semiconductor device by use of adhesive sheet and dicing tape

Also Published As

Publication number Publication date
JPWO2019187186A1 (en) 2020-04-30
JP6535138B1 (en) 2019-06-26

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