MY164088A - Carrier plate, method of manufacturing disc-shaped substrate, and double- sided machining device for machining both surfaces of disc-shaped substrate - Google Patents

Carrier plate, method of manufacturing disc-shaped substrate, and double- sided machining device for machining both surfaces of disc-shaped substrate

Info

Publication number
MY164088A
MY164088A MYPI2013701000A MYPI2013701000A MY164088A MY 164088 A MY164088 A MY 164088A MY PI2013701000 A MYPI2013701000 A MY PI2013701000A MY PI2013701000 A MYPI2013701000 A MY PI2013701000A MY 164088 A MY164088 A MY 164088A
Authority
MY
Malaysia
Prior art keywords
disc
shaped substrate
carrier plate
machining
double
Prior art date
Application number
MYPI2013701000A
Inventor
Nakanishi Yasuyuki
Yoshimura Katsuhiro
tanaka Mizuki
Original Assignee
Showa Denko Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko Kk filed Critical Showa Denko Kk
Publication of MY164088A publication Critical patent/MY164088A/en

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)

Abstract

AN OBJECT IS TO PROVIDE A CARRIER PLATE THAT CAN SUPPRESS THE INCREASE OF A DIFFERENCE IN POLISHING (GRINDING) DEPTH BETWEEN UPPER AND LOWER SURFACES OF A POLISHED (GROUND) DISC-SHAPED SUBSTRATE. THIS CARRIER PLATE (30, 31, 32, 33) IS A CARRIER PLATE THAT IS PROVIDED IN A DOUBLE-SIDED MACHINING DEVICE (60) POLISHING OR GRINDING BOTH UPPER AND LOWER SURFACES OF DISC-SHAPED SUBSTRATES (10), AND INCLUDES SUBSTRATE HOLDING HOLES (34) THAT HOLD THE DISC-SHAPED SUBSTRATES (10) AND STRIP-SHAPED BLADES (36) THAT ARE FORMED ON AT LEAST ONE SURFACE OF THE CARRIER PLATE (30, 31, 32, 33) SO AS TO PROTRUDE.
MYPI2013701000A 2012-06-19 2013-06-13 Carrier plate, method of manufacturing disc-shaped substrate, and double- sided machining device for machining both surfaces of disc-shaped substrate MY164088A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012137764A JP5613723B2 (en) 2012-06-19 2012-06-19 Carrier plate and disk-shaped substrate manufacturing method, disk-shaped substrate double-sided processing apparatus

Publications (1)

Publication Number Publication Date
MY164088A true MY164088A (en) 2017-11-30

Family

ID=50035837

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2013701000A MY164088A (en) 2012-06-19 2013-06-13 Carrier plate, method of manufacturing disc-shaped substrate, and double- sided machining device for machining both surfaces of disc-shaped substrate

Country Status (3)

Country Link
JP (1) JP5613723B2 (en)
MY (1) MY164088A (en)
SG (2) SG10201510276UA (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110752143A (en) * 2019-09-03 2020-02-04 福建晶安光电有限公司 Process for improving flatness of sapphire substrate
CN114521161B (en) * 2019-09-30 2023-06-20 Hoya株式会社 Auxiliary jig for substrate configuration and manufacturing method of substrate

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1128657A (en) * 1997-07-08 1999-02-02 Syst Seiko Kk Dressing method and device of polishing tool
JP2000198064A (en) * 1999-01-07 2000-07-18 Daido Steel Co Ltd Polishing machine carrier
JP2000237949A (en) * 1999-02-12 2000-09-05 Komag Inc Method and device for cleaning polishing pad
JP2000280167A (en) * 1999-03-30 2000-10-10 Kyocera Corp Carrier plate and double surface polishing device using the same
JP2004023038A (en) * 2002-06-20 2004-01-22 Sumitomo Mitsubishi Silicon Corp Grinding device of semiconductor wafer

Also Published As

Publication number Publication date
JP2014002818A (en) 2014-01-09
JP5613723B2 (en) 2014-10-29
SG10201510276UA (en) 2016-01-28
SG10202005438WA (en) 2020-07-29

Similar Documents

Publication Publication Date Title
PH12014000029A1 (en) Polishing apparatus, and method for polishing and manufacturing glass substrate
WO2009132003A3 (en) Methods and apparatus for low cost and high performance polishing tape for substrate bevel and edge polishing in semiconductor manufacturing
MY164985A (en) Method of manufacturing a glass substrate for a magnetic disk and method of manufacturing a magnetic disk
MY158752A (en) Method for manufacturing electronic grade synthetic quartz glass substrate
MY180842A (en) Wafer processing method
ATE516923T1 (en) METHOD AND DEVICE FOR POLISHING SEMICONDUCTOR DISCS ON BOTH SIDES
MY165019A (en) Method of manufacturing a glass substrate for a magnetic disk and method of manufacturing a magnetic disk
WO2011029106A3 (en) A slot wear indicator for a grinding tool
MY187526A (en) Chemical-mechanical processing slurry and methods for processing a nickel substrate surface
MY156911A (en) Insert carrier and method for the simultaneous double-side material-removing processing of semiconductor wafers
TWI256142B (en) Image sensor package, optical glass used thereby, and processing method thereof
MY183477A (en) Passivation of light-receiving surfaces of solar cells with crystalline silicon
MY195662A (en) Method for Manufacturing Magnetic-Disk Substrate, and Polishing Pad
MX352756B (en) Carrier device for handling a lens.
TW201611946A (en) Modifying substrate thickness profiles
WO2012005939A3 (en) Closed-loop control of cmp slurry flow
SG165292A1 (en) Method of manufacturing a substrate for a magnetic disk
MY170704A (en) Method of manufacturing glass substrate for magnetic disk
MX2013010357A (en) Coarse sandpaper with non-slip coating layer.
MY174537A (en) Grinding wheel
MY164088A (en) Carrier plate, method of manufacturing disc-shaped substrate, and double- sided machining device for machining both surfaces of disc-shaped substrate
IN2014DN10143A (en)
MY186027A (en) Cmp compositions and methods for polishing rigid disk surfaces
WO2015046543A8 (en) Method for manufacturing glass substrate for magnetic disk, method for manufacturing magnetic disk, and grinding tool
MY168037A (en) Method for manufacturing magnetic-disk glass substrate