JPH1128657A - Dressing method and device of polishing tool - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a technology which can remove solid articles such as chips and abrasive grains from the surface of a polishing tool efficiently. SOLUTION: A scraper 56 is provided movable forward and rearward to two carriers each other of plural carriers 1 which are engaged to a solar gear 1 and an internal gear 16. To the scraper 56, scraper blades 61 and 62 which are contacted to a polishing mat are provided, and the solid articles attached to the polishing mat are exhausted to the outer side or the inner side in the diameter direction of the polishing mat being guided by the scraper blades 61 and 62.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dressing technique for a polishing tool for performing a polishing process on a polished surface of a polishing tool for polishing a workpiece.

[0002]

2. Description of the Related Art In a state in which a polishing liquid mixed with abrasive grains is interposed between a polishing surface of a polishing tool and a workpiece, the workpiece and the polishing tool are slid while applying pressure to the workpiece and the polishing tool. The polishing technique for finishing the surface of the work with high precision is also called lapping or polishing.

A polishing apparatus for simultaneously polishing both surfaces of an aluminum substrate for a magnetic disk by using such a polishing technique comprises a lower platen having an annular polishing mat provided on an upper surface and an annular polishing mat provided on a lower surface. An upper surface plate is provided, and a sun gear having an outer diameter smaller than the inner diameter of the polishing mat is rotatably provided at a rotation center portion of the lower surface plate, and an outer diameter of the polishing mat. An internal gear having an inner diameter larger than that of the polishing mat is fixed to the outside of the polishing mat.

[0004] A plurality of carriers arranged between the polishing mat of the upper surface plate and the polishing mat of the lower surface plate are mounted on the polishing mat of the lower surface plate while meshing with the sun gear and the internal gear. Each carrier has a circular holding hole for accommodating a work.

When the sun gear is rotated, the carrier meshing with the sun gear and the internal gear revolves around the sun gear while rotating around itself, and the work held by the carrier has a polishing mat with upper and lower platens on both sides. The workpiece moves while being in contact with the polished surface, and both surfaces of the work are finished simultaneously.

As the polishing operation is continued, alumina-based abrasive particles mixed in the polishing liquid, that is, solids such as slurry and cuttings of the work enter into the fibers of the polishing mat, causing the polishing mat to be clogged and polishing. There is a disadvantage that the ability is reduced.

[0007] Therefore, in order to eliminate clogging of the polishing mat, there has been proposed a technique for performing a dressing process, that is, dressing, for removing solids such as abrasive grains and cuttings using a nylon brush (for example, Japanese Patent Laid-Open Publication No. HEI 9-163572). Kaihei 6-1556
No. 0).

[0008]

However, when the surface treatment is performed by using a brush, the contact area of the entire brush simultaneously coming into contact with the surface of the polishing mat is small, so that chips and abrasive grains can be reliably removed. Not only is it impossible, but it takes a long time for the find process. In addition, when a brush is used, directionality cannot be given to the abrasive grains and chips, so that the abrasive grains and chips cannot be swept to the outer peripheral side or the inner peripheral side of the polishing mat. Powder and the like could not be completely removed.

An object of the present invention is to provide a technique capable of efficiently removing solids such as chips and abrasive grains from the surface of a polishing tool.

The above and other objects and novel features of the present invention will become apparent from the description of the present specification and the accompanying drawings.

[0011]

SUMMARY OF THE INVENTION Among the inventions disclosed in the present application, the outline of a representative one will be briefly described.
It is as follows.

That is, a dressing method for a polishing tool according to the present invention comprises a lower platen provided with an annular lower polishing tool and rotating in a horizontal plane, and a lower platen provided with an annular upper polishing tool. A dressing method of a polishing tool for dressing the surface of the polishing tool in a polishing apparatus having an upper platen and a rotating, a step of entering a scraper between the lower platen and the upper platen, Contacting a scraper blade provided on the scraper with one of the lower polishing tool and the upper polishing tool, and rotating a platen having the polishing tool contacted by the scraper blade, A step of sliding the polishing tool on the scraper blade in a direction inclined with respect to the direction of rotation of the board, and a solid adhered to the polishing tool,
Discharging the abrasive tool radially outward or inward by the scraper blade.

The dressing apparatus for a polishing tool according to the present invention comprises a lower polishing tool provided on the upper surface of a lower platen that rotates in a horizontal plane, and an upper platen that rotates in opposition to the lower platen. An upper polishing tool provided on the lower surface of the lower platen, a sun gear that rotates around a rotation center of the lower platen, an internal gear fixed outside the lower polishing tool, and the sun gear, respectively. A plurality of carriers that are placed on the lower polishing tool in a state in which they mesh with the internal gear and have a plurality of holding holes for holding a workpiece, and two adjacent ones of the plurality of carriers. A scraper movably disposed outside the internal gear between a forward position between the carriers and a retracted position retracted from the forward position, with respect to a rotational direction of the polishing tool; Extending in an inclined direction, and A scraper blade that comes into contact with the polishing tool is provided on the scraper, and solid matter attached to the polishing tool is guided by the scraper blade and discharged radially outward or inward of the polishing tool. I do.

According to the present invention, the scraper blade slides and slides in contact with the surface of the polishing tool, and the scraper blade contacts the entire surface of the polishing tool. Can be discharged to the outside. Discharge of solids is facilitated by supplying a cleaning liquid to the scraper blade.

[0015]

Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1 is a view showing a polishing apparatus to which a dressing apparatus according to an embodiment of the present invention is assembled.

The polishing apparatus 10 has a lower surface plate 11 which rotates in a horizontal plane as indicated by an arrow. The lower surface plate 11 has a disk-shaped bracket 11a, an annular surface plate main body 11b mounted thereon, and an annular lower polishing mat 12 mounted thereon. Adjustable and movable. Above the lower platen 11, an upper platen 13 rotating opposite thereto is disposed, and the upper platen 13 is a disc-shaped bracket 13a.
And an annular platen body 13b attached to the lower surface
And an annular upper polishing mat 1 attached to the lower surface
As shown by an arrow, the lower platen 11 rotates in a direction opposite to the rotation direction of the lower platen 11 and is movable up and down.

A sun gear 15 whose outer diameter is smaller than the inner diameter of the lower polishing mat 12 is provided at the center of rotation of the lower platen 11.
Is provided rotatably in the same direction as the lower surface plate 11 as indicated by an arrow, and an annular internal gear 16 having a diameter larger than the outer diameter of the lower polishing mat 12 is attached to the lower surface plate. 11 are fixedly arranged.

Between the sun gear 15 and the internal gear 16,
In the illustrated case, ten work carriers, that is, carriers 17 are arranged, and each carrier 17 has an external gear formed on an outer peripheral portion. Each carrier 17 is formed with five circular holding holes 18 for accommodating a magnetic disk aluminum substrate W as a work, and the thickness of the carrier 17 is formed smaller than the thickness of the work W. ing. In the illustrated case, the ratio between the pitch circle diameters of the sun gear 15, the internal gear 16 and the carrier 17 is 2.5: 4.5: 1.
Any ratio, such as 5: 1 or 2: 4: 1, can be set.

When the sun gear 15 is rotated in a state where each carrier 17 is engaged with the sun gear 15 and the internal gear 16, since the internal gear 16 is fixed, each carrier 17 rotates while rotating. The work W revolves around the sun gear 15, and the work W moves in the horizontal direction while being in contact with the upper and lower polishing mats 14 and 12 in the horizontal plane by the carrier 17.

FIG. 2 is a view showing an apparatus main body for driving the lower platen 11 of the polishing apparatus 10, in which a mechanism for rotating the lower platen 11 and a mechanism for moving up and down are incorporated. ing.

As shown in the figure, a cylindrical driving body 25 is rotatably mounted by a bearing on a support 24 provided on the pedestal 23. The driving body 25 has a hollow hole at an upper end portion. A hollow drive shaft 26 fixed to the lower surface plate 11 is provided. In order to transmit the rotation of the driving body 25 to the driving shaft 26 and to make the driving shaft 26 freely movable in the vertical direction with respect to the driving body 25, a slide key 27 is provided between the driving shaft 26 and the driving body 25. Is provided. A rotating shaft 28 fixed at the upper end to the sun gear 15 is rotatably provided in the hollow hole of the drive shaft 26, and the rotating shaft 28 is supported by a bearing at the lower end.

A pulley 29 is fixed to the driving body 25 for driving the lower platen 11 to rotate.
The lower surface plate 11 is driven to rotate in a predetermined direction by driving the timing belt wound around the lower surface by a motor. A pulley (not shown) is fixed to the lower end of the rotating shaft 28 in order to rotationally drive the sun gear 15.
Reference numeral 5 is driven by a drive source different from the lower surface plate 11.

In order to move the lower surface plate 11 in the vertical direction, a drive plate 31 is mounted on a drive shaft 26 via a bearing in a storage space formed in the support base 24. A ball nut 33 that meshes with a plurality of ball screws 32 rotatably mounted is provided on the drive plate 31. A drive gear 34 is connected to each of the ball screws 32, and the lower platen 11 is moved up and down with a predetermined stroke via the drive shaft 26 by rotating the drive gear 34 with a motor. .

FIG. 3 is a front sectional view showing the upper platen 13. The bracket 13a of the upper platen 13 has an annular outer peripheral member 35, an intermediate member 36 and a central member 37, which are integrated. The upper platen 13 has high rigidity without having a hollow hole as a whole.

A driving body 38 is disposed above the upper surface plate 13, and the driving body 38 is connected to the upper surface plate 13 by a driving rod 39 at an outer peripheral portion of the upper surface plate 13. The upper platen 13 is driven up and down by moving the driver 38 up and down, and the upper platen 13 is rotationally driven by rotating the driver 38. In this way, the upper platen 13 is driven via the plurality of drive rods 39 connected to the outer periphery thereof, and the upper platen 13 is driven.
Of the bracket 13a is set to have high rigidity by the outer peripheral member 35 to which the annular platen body 13b is attached and the other two members 36 and 37, so that the upper platen 13 is prevented from being deformed during polishing. In addition, the work W can be polished, that is, wrapped and polished with high accuracy without deforming the upper polishing mat 14.

FIGS. 4 to 9 show a dressing apparatus according to an embodiment of the present invention. A pedestal 40 is provided outside the polishing apparatus shown in FIGS.
A support table 41 is attached on the top so as to be vertically movable. In order to guide the vertical movement of the support 41, the support 41
The guide rod 42 attached to the base 40 is fitted to the sleeve 42a attached to the base 40 so as to be slidable in the vertical direction. The piston rod 43 of the pneumatic cylinder 43 attached to the pedestal 40 to move the support table 41 up and down.
a is connected to the support 41.

Two guide rails 44 are fixed to the upper surface of the support table 41 in parallel with each other, and a slide block 45a that slides along each guide rail 44 is attached to the first slide table 45. The first
The slide table 45 is reciprocally movable in a linear direction along each guide rail 44. A holder 46 is attached to the first slide table 45.

A slide block 47a that slides along the guide rails 44 is attached to the second slide table 47, and the second slide table 47 is reciprocally movable in a linear direction along each guide rail 44. Has become. As shown in FIGS. 6 and 7, an eccentric cam 49 having a roller 48 is provided on the second slide table 47.
Are rotatably mounted, and the roller 48 is a motor 50.
The position deviated by a predetermined distance from the rotation center of the shaft is the rotation center. A roller 48 is engaged with a bracket 51 attached to the holder 46,
When the motor 50 is driven, the first slide table 45 swings in a direction approaching and moving away from the second slide table 47.

In order to reciprocate the first slide table 45 together with the second slide table 47 along the guide rails 44, a rodless cylinder 52 which is operated by air pressure is attached to the support table 41. The second slide table 47 is connected to a slider driven by the second slide table 47. Therefore, when the rodless cylinder 52 is driven to move the second slide table 47 forward to the left from the position shown in FIG.
Will also move forward.

A pneumatic cylinder 54 for driving a lock pin 53 in the vertical direction is attached to the second slide table 47. As shown in FIG. 55 are attached. Accordingly, when the pneumatic cylinder 54 is operated in a state where the rodless cylinder 52 is driven to move the second slide table 47 together with the first slide table 45 to a predetermined forward position, the lock pin 53 The second slide table 47 is fitted into the hole.
Is locked to the support table 41.

A scraper 56 is attached to the holder 46 fixed to the first slide table 45. As shown in FIGS. 5, 8 and 9, the scraper 56 is formed of a plate-like member having mounting surfaces on both upper and lower surfaces and is attached to the holder 46. It has upper and lower blade holders 58, 59 respectively attached.

Each of the blade holders 58, 59 has one scraper blade 61, one upper and one lower.
62 is attached by a plurality of screw members. Each of the scraper blades 61 and 62 is formed of a rectangular metal plate, and is attached to the blade holders 58 and 59 with a width direction inclined at an inclination angle θ as shown in FIG. The surface of each of the scraper blades 61 and 62 that faces the polishing mats 12 and 14 faces the upstream portion when the polishing mats 12 and 14 rotate and move with respect to the scraper blades. . This inclination angle θ can be set to an arbitrary angle such as, for example, 30 degrees or 60 degrees.

Further, each of the scraper blades 61 and 62 has an edge portion inclined by a predetermined angle α with respect to the reciprocating direction of the scraper 56, and the inclination angle α
As shown in FIG. 5, the directions of the upper scraper blade 61 and the lower scraper blade 62 are opposite to each other. The upper scraper blade 61 is configured such that one blade contacts the entire width of the upper polishing pad 14, and the lower scraper blade 62 similarly contacts the entire width of the lower polishing pad 12. It has become.

The upper and lower blade holders 58, 59 include:
A number of nozzles 63 for supplying a cleaning liquid such as water to the polishing mats 12 and 14 are formed along the respective scraper blades 61 and 62, and each nozzle 63 has a flow formed on the main body 57. The cleaning liquid is supplied from the road.

As shown in FIG. 9, cleaning blocks 64 are attached to both sides of the main body 57, and nozzles 65 for jetting the cleaning liquid are provided respectively. , 14 may be sprayed.

Next, a procedure for removing the solid matter such as abrasive grains and cuttings that have penetrated the polishing mats 12 and 14 of the polishing apparatus by the above-described dressing apparatus, and performing the indexing process, ie, dressing, will be described.

After the polishing operation by the polishing apparatus 10 is completed, the upper platen 13 is raised to raise the polished workpiece W.
Is taken out of the carrier 17. In this state, the polishing surfaces of the respective polishing mats 12 and 14 are subjected to an indexing process, as shown in FIG. 5, by forming a plurality of carriers on a straight line connecting the rotation center of the sun gear 15 and the scraper 56. 1
The carrier 17 is positioned so that a gap between two adjacent carriers 17 is located. This positioning operation may be performed when the polishing operation is completed before the work W is taken out.

Next, the support table 41 is moved to the pneumatic cylinder 43.
After moving up by both slide tables 4
5 and 47 are moved leftward in FIG. 4 to move the scraper 56 forward. The scraper blades 61 and 62 in a state where the scraper 56 has been moved to the forward limit position are shown by two-dot chain lines in FIG. In this position, the lock pin 53 of the pneumatic cylinder 54 provided on the second slide table 47 is located directly above the fixed cylinder 55, and in this state, the pneumatic cylinder 54 is driven to move Lock pin 5
When the 3 is fitted, the second slide table 47 is locked to the support table 41.

In this state, when the support table 41 is moved downward by driving the pneumatic cylinder 43, the lower scraper blade 62 causes the polishing mat 12 exposed between the adjacent carriers 17 to move. At a predetermined pressure. Further, the upper platen 13 is moved downward to bring the surface of the upper polishing mat 14 into contact with the upper scraper blade 61 at a predetermined pressure. FIG. 8 shows this state.

In this state, when the lower surface plate 11 and the upper surface plate 13 are driven to rotate while the sun gear 15 is stopped, the carrier 17 is kept stationary, The polishing mats 12 and 14 move so as to slide on the edges of the upper and lower scraper blades 61 and 62, respectively. At this time, the cleaning liquid is ejected from each nozzle 63. Thereby, the scraper blade 6 is determined by the relationship between the rotation direction of the polishing mats 12, 14 and the inclination direction of the angle α of the scraper blades 61, 62.
The solids extruded into the polishing mats 12 and 1
4 is discharged radially outward or inward.

By ejecting the cleaning liquid from the nozzle 63, the discharge and movement of the solid by the scraper blades 61 and 62 are promoted, and the solid is smoothly guided to the outside of the polishing mats 12, 14. The polishing mats 12 and 14 can be uniformly spotted in a short time and without unevenness. In this finding process, the first slide table 45 may be reciprocated in the linear direction by driving the motor 50, that is, may be caused to swing.
The swing motion may not be performed.

In the above-described case, the upper polishing mat 12 and the lower polishing mat 14 are simultaneously laid out. However, after the upper polishing mat 12 is processed, the lower polishing mat 14 is processed. As described above, both polishing mats 12 and 14 may be separately processed.

FIG. 10 shows another type of scraper 56a.
It is a figure which shows in this scraper 56a,
The above-mentioned scraper 56 is used for the blade holders 58, 5
9 is fixed by a screw member, while the scraper blades 61 and 62 are attached by an elastic deformation member 66 so as to be vertically displaceable. This elastically deformable member 66 has disk portions 66a and 66b at both ends and a cylindrical portion 66c integrated with these disk portions and provided between them. The cylindrical portion 66c is formed of a spring material and has a spiral shape. Grooves are formed.

The elastic deformation member 66 has a disk portion 66a.
By means of the scraper blade 6 via the bracket 67
1, 62, and is connected to the main body 57 of the scraper 56a by a disk 66b. Cylindrical part 66
“c” has the same structure as the coil spring, and the respective scraper blades 61 and 62 are pressed against the polishing mats 12 and 14 by the elastic deformation member 66 by a predetermined spring force. However, a compression coil spring, a leaf spring, or the like may be used as the elastic deformation member 66.

A nozzle 68 for supplying a cleaning liquid to each of the scraper blades 61 and 62 is provided in the main body 57.
Is provided. In addition, this type of scraper 5
The cleaning block 64 shown in FIG. 9 may also be provided in 6a, and the cleaning liquid may be supplied from a nozzle 65 provided in the cleaning block.

FIGS. 11 to 15 show still another type of scraper 56b. This scraper 56
b has an upper blade holder 58 mounted on the upper side of the main body 57 and a lower blade holder 59 mounted on the lower side, as shown in FIG. Each of the blade holders 58 and 59 has a similar structure, and is made of metal in the illustrated case, but may be made of resin or synthetic rubber.

The upper blade holder 58 is shown in FIGS.
As shown in FIG. 14, a base 71 having a substantially rectangular shape is provided, and a strip-shaped wiping portion 72 is provided at a central portion of the surface along the longitudinal direction so as to protrude from the surface of the base 71. The scraper 56b is attached to the first slide table 45 so that the central axis of the wiping unit 72 coincides with the radial axis passing through the rotation center of the sun gear 15 and the polishing mat 12.

As shown in FIGS. 14 and 15, a plurality of scraper blades 73 are formed in the wiping unit 72 at predetermined intervals. As shown in FIG. 12, each of the scraper blades 73 has a side surface 72 of the wiping unit 72.
It extends in a direction inclined at an inclination angle β with respect to a, and in the case shown, this angle β is set to 30 °. As described above, since the scraper blade 73 is inclined with respect to the side surface 72a, the wiping portion 72 is
Polishing mats 12 and 14 at portions in contact with 2, 14
The scraper blade 73 extends in the direction of inclination with respect to the rotation direction of.

A guide groove 74 is formed between each of the scraper blades 73.
Is also the same as the inclination angle β of the scraper blade 73. As shown in FIG. 14, an R portion, that is, an arc-shaped portion 73a is formed at an edge portion of each scraper blade 73.

As shown in FIGS. 12 and 13, the scraper 56a is provided with a flow path 76 for supplying a cleaning liquid having an opening 75 in each guide groove 74. The flow path 76 is formed in the main body 57. A cleaning liquid, such as water, is supplied to the guide groove 74 from the outside by communicating with the formed flow path. Such a structure is the same for the lower blade holder 59.

As shown in FIG. 11, a plurality of nozzles 77 are mounted on both upper and lower surfaces of the main body 57 outside the blade holders 58 and 59, and a cleaning liquid is supplied from each of the nozzles 77. It has become so. In order to supply the cleaning liquid to the respective nozzles 77 and the flow path 76, as shown in FIG. 11, a flow path 78 is formed in the main body 57, and the flow path 78 has a hose or the like connected to the connection portion 78a. Is supplied with a cleaning liquid. However, the cleaning liquid may be supplied only from the opening 75 formed on the bottom surface of the guide groove 74 without providing the nozzle 77.

Each type of scraper 56a,
Also in the case of using the scraper 56b, the dressing of the polishing mats 12, 14 can be performed in the same procedure as in the case of using the scraper 56 described above.

Although the invention made by the present inventor has been specifically described based on the embodiments, the present invention is not limited to the above-described embodiments, and can be variously modified without departing from the gist thereof. Needless to say, there is.

For example, in the illustrated case, dressing is performed using a polishing mat attached to a polishing apparatus as a polishing tool, but the present invention can also be applied to a polishing apparatus having a polishing grindstone. In the illustrated case, the upper and lower blade holders 58, 59 are attached to one scraper 56, 56a, 56b, but the scraper having the upper blade holder 58 and the lower blade holder 59 are attached. And a separate scraper having an upper and lower polishing mat may be dressed at different positions in the circumferential direction.

It goes without saying that the number of carriers and the number of holding holes 18 formed in each carrier can be arbitrarily set as a polishing apparatus capable of performing a dressing operation.

Further, when the dressing operation is performed, the carrier is raised from the lower polishing mat.
Dressing may be performed such that the carrier does not contact the upper and lower polishing mats.

[0058]

Advantageous effects obtained by typical ones of the inventions disclosed in the present application will be briefly described.
It is as follows.

(1) The solids such as abrasive grains and cuttings that have bitten into the polishing tool are scraped out by the scraper blade and reliably discharged to the outside.

(2) The scraping out of the solids is promoted by flowing the cleaning liquid through the scraper blade, and the uniform polishing tool can be dressed uniformly in a short time.

(3) Since the dressing can be performed quickly in a short time, the work for polishing the work including the dressing can be performed quickly.

[Brief description of the drawings]

FIG. 1 is a partially cutaway perspective view showing a polishing apparatus to which a dressing apparatus according to an embodiment of the present invention is applied.

FIG. 2 is a cross-sectional view showing a lower portion of the polishing apparatus shown in FIG.

FIG. 3 is a sectional view showing an upper portion of the polishing apparatus shown in FIG. 1;

FIG. 4 is a front view showing a dressing device according to an embodiment of the present invention disposed adjacent to a polishing device.

FIG. 5 is a plan view of FIG. 4;

FIG. 6 is an enlarged right side view of FIG. 5;

FIG. 7 is an arrow view showing a portion along line 7-7 in FIG. 6;

FIG. 8 is a sectional view showing a state where dressing is performed.

FIG. 9 is a sectional view of a scraper.

FIG. 10 is a side view showing another type of scraper.

FIG. 11 is a partially cutaway perspective view showing another type of scraper.

FIG. 12 is a plan view showing the scraper shown in FIG. 11;

FIG. 13 is a sectional view taken along line 13-13 in FIG. 12;

FIG. 14 is an enlarged sectional view taken along line 14-14 in FIG.

FIG. 15 is an enlarged perspective view showing a part of the wiping portion of the scraper.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Polishing apparatus 11 Lower surface plate 12 Lower polishing mat 13 Upper surface plate 14 Upper polishing mat 15 Sun gear 16 Internal gear 17 Carrier 18 Holding hole 25 Driver 26 Drive shaft 28 Rotation shaft 40 Base 41 Support base 42 Guide rod 43 Pneumatic cylinder 44 Guide rail 45 First slide table 46 Holder 49 Eccentric cam 50 Motor 51 Bracket 52 Rodless cylinder 53 Lock pin 54 Pneumatic cylinder 55 Fixed cylindrical body 56, 56a, 56b Scraper 57 Main body 58, 59 Blade holder 61, 62 Scraper blade 63 Nozzle 64 Cleaning block 71 Base 72 Wiping part 73 Scraper blade 74 Guide groove 75 Opening

Claims (5)

[Claims] 1. A lower platen provided with an annular lower polishing tool and rotating in a horizontal plane, and an upper platen provided with an annular upper polishing tool and rotating opposite to the lower platen. A dressing method of a polishing tool for dressing a surface of the polishing tool in a polishing apparatus, comprising: a step of injecting a scraper between the lower surface plate and the upper surface plate; and a scraper blade provided on the scraper. A step of contacting any one of the lower polishing tool and the upper polishing tool, and rotating a platen having the polishing tool contacted by the scraper blade, in a direction inclined with respect to the rotation direction of the platen. Sliding the polishing tool on the scraper blade, and guiding the solid matter attached to the polishing tool by the scraper blade to the outside of the polishing tool in the radial direction. Or dressing method of the grinding tool, characterized in that it comprises a step of discharging inward. 2. A sun gear disposed on a lower polishing tool annularly provided on a lower surface plate rotating in a horizontal plane, and a sun gear rotatably disposed inside the polishing tool, and an outside of the polishing tool. A step of entering a scraper between a plurality of carriers respectively meshed with the internal gear fixed to the, and contact the lower scraper blade of the lower scraper blade provided on the lower side of the scraper, and A step of contacting an upper scraper blade provided on the upper side of the scraper with an upper polishing tool provided on an upper surface plate that rotates in opposition to the lower surface plate; and the lower surface with the sun gear stopped. By rotating the side platen and the upper platen, the lower scraper blade and the upper scraper blade are opposed to each other in the rotation direction of the upper and lower rotating platens. Step of sliding the lower polishing tool and the upper polishing tool by inclining, and solid matter adhering to the upper and lower polishing tools are guided by the lower scraper blade and the upper scraper blade. Discharging the polishing tool radially outward or inward of each of the polishing tools. 3. A dressing method for a polishing tool according to claim 1, wherein a cleaning liquid is supplied to said scraper blade to discharge said solid matter. 4. A lower polishing tool provided on an upper surface of a lower platen that rotates in a horizontal plane; and an upper polishing tool provided on a lower surface of an upper platen that rotates in opposition to the lower platen. A sun gear that rotates about the center of rotation of the lower surface plate, an internal gear fixed outside the lower polishing tool, and a state in which the sun gear and the internal gear mesh with each other. A plurality of carriers that are placed on the lower polishing tool and have a plurality of holding holes for holding a workpiece, and a forward position that enters between two adjacent carriers among the plurality of carriers. A scraper movably disposed outside the internal gear between a retreat position retracted from a forward position and a scraper extending in a direction inclined with respect to a rotation direction of the polishing tool, and The scraper blade in contact with A dressing device for a polishing tool, provided on the scraper, wherein the solid matter adhered to the polishing tool is guided by the scraper blade and discharged radially outward or inward of the polishing tool. 5. A lower polishing tool provided on an upper surface of a lower platen rotating in a horizontal plane, and an upper polishing tool provided on a lower surface of an upper platen rotating opposite to the lower platen. A sun gear that rotates about the center of rotation of the lower surface plate, an internal gear fixed outside the lower polishing tool, and a state in which the sun gear and the internal gear mesh with each other. A plurality of carriers mounted on the lower polishing tool and having a plurality of holding holes for holding a workpiece; and a forward position between two adjacent carriers among the plurality of carriers. And a scraper movably disposed outside the internal gear between the retracted position retracted from the forward position, and extending in a direction inclined with respect to the rotational direction of the lower polishing tool, And a lower disk that contacts the lower polishing tool. A rapper blade is provided below the scraper, an upper scraper blade extending in a direction inclined with respect to the rotation direction of the upper polishing tool, and being provided above the scraper and in contact with the upper polishing tool, The solid matter adhering to the side polishing tool and the upper polishing tool is guided by the lower scraper blade and the upper scraper blade, and simultaneously discharged radially outward or inward of the respective polishing tools. A dressing device for a polishing tool, wherein