MY157203A - Aqueous acidic solution and etching solution and method for texturing the surface of single crystal and polycrystal silicon substrates - Google Patents

Aqueous acidic solution and etching solution and method for texturing the surface of single crystal and polycrystal silicon substrates

Info

Publication number
MY157203A
MY157203A MYPI2013000526A MYPI2013000526A MY157203A MY 157203 A MY157203 A MY 157203A MY PI2013000526 A MYPI2013000526 A MY PI2013000526A MY PI2013000526 A MYPI2013000526 A MY PI2013000526A MY 157203 A MY157203 A MY 157203A
Authority
MY
Malaysia
Prior art keywords
aqueous acidic
solution
single crystal
silicon substrates
polycrystal silicon
Prior art date
Application number
MYPI2013000526A
Other languages
English (en)
Inventor
Braun Simon
Klipp Andreas
Röger-Göpfert Cornelia
Bittner Christian
Shen Meichin
Lin Chengwei
Original Assignee
Basf Se
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Basf Se filed Critical Basf Se
Publication of MY157203A publication Critical patent/MY157203A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/30604—Chemical etching
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00—Etching, surface-brightening or pickling compositions
    • C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
    • C09K13/08—Etching, surface-brightening or pickling compositions containing an inorganic acid containing a fluorine compound
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0236—Special surface textures
    • H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/30604—Chemical etching
    • H01L21/30608—Anisotropic liquid etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Electromagnetism (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Weting (AREA)
  • Photovoltaic Devices (AREA)
MYPI2013000526A 2010-09-01 2011-08-25 Aqueous acidic solution and etching solution and method for texturing the surface of single crystal and polycrystal silicon substrates MY157203A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US37895010P 2010-09-01 2010-09-01

Publications (1)

Publication Number Publication Date
MY157203A true MY157203A (en) 2016-05-13

Family

ID=45772219

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2013000526A MY157203A (en) 2010-09-01 2011-08-25 Aqueous acidic solution and etching solution and method for texturing the surface of single crystal and polycrystal silicon substrates

Country Status (9)

Country Link
US (1) US8901000B2 (zh)
EP (1) EP2611881A4 (zh)
JP (1) JP5941915B2 (zh)
KR (1) KR20130114086A (zh)
CN (1) CN103080273A (zh)
MY (1) MY157203A (zh)
SG (1) SG187756A1 (zh)
TW (1) TW201213510A (zh)
WO (1) WO2012029000A1 (zh)

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CN103430102B (zh) 2011-03-18 2017-02-08 巴斯夫欧洲公司 制造具有带50nm及更小行间距尺寸的图案化材料层的集成电路装置、光学装置、微型电机和机械精密装置的方法
KR20140138581A (ko) * 2011-08-22 2014-12-04 1366 테크놀로지 인코포레이티드 실리콘 웨이퍼들의 산성 습식 화학 에칭을 위한 제형
TW201348406A (zh) * 2012-05-18 2013-12-01 Air Prod & Chem 紋理化矽晶圓的組合物及方法
CN103681958B (zh) * 2013-10-16 2017-05-17 常州时创能源科技有限公司 一种多晶硅片制绒方法
JP6433674B2 (ja) * 2014-04-07 2018-12-05 株式会社トクヤマ 多結晶シリコンの洗浄方法
CN105040108B (zh) * 2015-08-21 2017-11-17 浙江启鑫新能源科技股份有限公司 多晶硅太阳能电池的制绒方法
US10292384B2 (en) * 2015-12-18 2019-05-21 International Business Machines Corporation Nanostructures fabricated by metal assisted chemical etching for antibacterial applications
CN109668532B (zh) * 2019-01-25 2021-04-13 北京航天时代激光导航技术有限责任公司 一种基片表面检测方法及装置
CN109989063B (zh) * 2019-03-14 2020-10-27 西安交通大学 一种合金表面微织构的制备方法
US11518937B2 (en) * 2019-12-25 2022-12-06 Tokyo Ohka Kogyo Co., Ltd. Etching solution and method for manufacturing semiconductor element
CN111092137A (zh) * 2019-12-26 2020-05-01 晋能清洁能源科技股份公司 一种多晶硅片制绒的制绒液及使用其制绒的方法
WO2021176903A1 (ja) * 2020-03-04 2021-09-10 富士フイルム株式会社 処理液

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JPH0353083A (ja) * 1989-07-20 1991-03-07 Morita Kagaku Kogyo Kk 半導体素子の金属汚染を防止する方法
JPH0641770A (ja) * 1992-07-27 1994-02-15 Daikin Ind Ltd シリコンウエハ表面の処理方法
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Also Published As

Publication number Publication date
EP2611881A1 (en) 2013-07-10
JP5941915B2 (ja) 2016-06-29
WO2012029000A1 (en) 2012-03-08
CN103080273A (zh) 2013-05-01
US8901000B2 (en) 2014-12-02
EP2611881A4 (en) 2017-08-30
US20130171765A1 (en) 2013-07-04
SG187756A1 (en) 2013-03-28
JP2013538007A (ja) 2013-10-07
TW201213510A (en) 2012-04-01
KR20130114086A (ko) 2013-10-16

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