MY129185A - Method of manufacturing cerium-based polishing agent - Google Patents
Method of manufacturing cerium-based polishing agentInfo
- Publication number
- MY129185A MY129185A MYPI20021762A MYPI20021762A MY129185A MY 129185 A MY129185 A MY 129185A MY PI20021762 A MYPI20021762 A MY PI20021762A MY PI20021762 A MYPI20021762 A MY PI20021762A MY 129185 A MY129185 A MY 129185A
- Authority
- MY
- Malaysia
- Prior art keywords
- cerium
- raw material
- rare earth
- manufacturing
- polishing agent
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 3
- 238000005498 polishing Methods 0.000 title abstract 2
- 229910052684 Cerium Inorganic materials 0.000 title 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 title 1
- 239000002994 raw material Substances 0.000 abstract 4
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 abstract 2
- 238000010298 pulverizing process Methods 0.000 abstract 2
- 229910052761 rare earth metal Inorganic materials 0.000 abstract 2
- 150000002910 rare earth metals Chemical class 0.000 abstract 2
- 239000007864 aqueous solution Substances 0.000 abstract 1
- 239000011362 coarse particle Substances 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 229910001404 rare earth metal oxide Inorganic materials 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1409—Abrasive particles per se
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
- C01F17/00—Compounds of rare earth metals
- C01F17/20—Compounds containing only rare earth metals as the metal element
- C01F17/206—Compounds containing only rare earth metals as the metal element oxide or hydroxide being the only anion
- C01F17/224—Oxides or hydroxides of lanthanides
- C01F17/235—Cerium oxides or hydroxides
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1409—Abrasive particles per se
- C09K3/1418—Abrasive particles per se obtained by division of a mass agglomerated by sintering
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/62—Submicrometer sized, i.e. from 0.1-1 micrometer
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/80—Compositional purity
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001160644A JP4002740B2 (ja) | 2001-05-29 | 2001-05-29 | セリウム系研摩材の製造方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| MY129185A true MY129185A (en) | 2007-03-30 |
Family
ID=19004023
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MYPI20021762A MY129185A (en) | 2001-05-29 | 2002-05-15 | Method of manufacturing cerium-based polishing agent |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6905527B2 (enExample) |
| EP (1) | EP1391494A1 (enExample) |
| JP (1) | JP4002740B2 (enExample) |
| KR (1) | KR100509267B1 (enExample) |
| CN (1) | CN1239666C (enExample) |
| MY (1) | MY129185A (enExample) |
| TW (1) | TWI293981B (enExample) |
| WO (1) | WO2002097004A1 (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6863825B2 (en) | 2003-01-29 | 2005-03-08 | Union Oil Company Of California | Process for removing arsenic from aqueous streams |
| US20070258875A1 (en) * | 2004-09-03 | 2007-11-08 | Showa Denko K.K. | Mixed Rare Earth Oxide, Mixed Rare Earth Fluoride, Cerium-Based Abrasive Using the Materials and Production Processes Thereof |
| JP2006206870A (ja) * | 2004-12-28 | 2006-08-10 | Mitsui Mining & Smelting Co Ltd | セリウム系研摩材用原料及びセリウム系研摩材用原料の製造方法、並びに、セリウム系研摩材及びセリウム系研摩材の製造方法 |
| US8361419B2 (en) | 2005-09-20 | 2013-01-29 | Lg Chem, Ltd. | Cerium carbonate powder, method for preparing the same, cerium oxide powder made therefrom, method for preparing the same, and CMP slurry comprising the same |
| JP4917098B2 (ja) | 2005-09-20 | 2012-04-18 | エルジー・ケム・リミテッド | 炭酸セリウム粉末及び製法、これから製造された酸化セリウム粉末及び製法、これを含むcmpスラリー |
| KR101450865B1 (ko) * | 2006-10-24 | 2014-10-14 | 동우 화인켐 주식회사 | 디스플레이용 유리패널의 연마를 위한 폐연마재의 재생방법 |
| US8066874B2 (en) | 2006-12-28 | 2011-11-29 | Molycorp Minerals, Llc | Apparatus for treating a flow of an aqueous solution containing arsenic |
| WO2008114972A1 (en) * | 2007-03-16 | 2008-09-25 | Lg Chem, Ltd. | Method for preparing cerium carbonate powder |
| CN101641289B (zh) | 2007-03-16 | 2012-11-21 | 株式会社Lg化学 | 用尿素制备碳酸铈粉末的方法 |
| US8252087B2 (en) | 2007-10-31 | 2012-08-28 | Molycorp Minerals, Llc | Process and apparatus for treating a gas containing a contaminant |
| US8349764B2 (en) | 2007-10-31 | 2013-01-08 | Molycorp Minerals, Llc | Composition for treating a fluid |
| US9233863B2 (en) | 2011-04-13 | 2016-01-12 | Molycorp Minerals, Llc | Rare earth removal of hydrated and hydroxyl species |
| CN103923602A (zh) * | 2013-01-15 | 2014-07-16 | 安阳市岷山有色金属有限责任公司 | 一种铈系研磨材料的制造方法 |
| JP6495316B2 (ja) | 2014-03-07 | 2019-04-03 | セキュア ナチュラル リソーシズ エルエルシーSecure Natural Resources Llc | 極めて優れたヒ素除去特性を備える酸化セリウム(iv) |
| CN104387989B (zh) * | 2014-11-04 | 2016-08-24 | 南昌大学 | 高密度碳酸稀土高温爆裂法制备超细高铈稀土抛光粉的方法 |
| CN111051463B (zh) * | 2017-09-11 | 2022-01-11 | 昭和电工株式会社 | 铈系研磨材料用原料的制造方法和铈系研磨材料的制造方法 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08267355A (ja) * | 1995-04-03 | 1996-10-15 | Fujimi Inkooporeetetsudo:Kk | 研磨剤微粉末の製造方法 |
| JP2991952B2 (ja) * | 1995-07-31 | 1999-12-20 | 多木化学株式会社 | 酸化第二セリウム及びその製造方法 |
| EP2164095A1 (en) * | 1996-09-30 | 2010-03-17 | Hitachi Chemical Co., Ltd. | Cerium oxide abrasive and method of polishing substrates |
| US5759917A (en) * | 1996-12-30 | 1998-06-02 | Cabot Corporation | Composition for oxide CMP |
| JPH11181404A (ja) * | 1997-12-18 | 1999-07-06 | Hitachi Chem Co Ltd | 酸化セリウム研磨剤および基板の研磨法 |
| KR100851451B1 (ko) * | 1998-12-25 | 2008-08-08 | 히다치 가세고교 가부시끼가이샤 | Cmp 연마제, cmp 연마제용 첨가액 및 기판의 연마방법 |
| US6428392B1 (en) * | 1999-03-23 | 2002-08-06 | Seimi Chemical Co., Ltd. | Abrasive |
| JP2001035818A (ja) | 1999-07-16 | 2001-02-09 | Seimi Chem Co Ltd | 半導体用研磨剤 |
| WO2002028979A1 (en) * | 2000-10-02 | 2002-04-11 | Mitsui Mining & Smelting Co.,Ltd. | Cerium based abrasive material and method for producing cerium based abrasive material |
| US6986798B2 (en) * | 2000-11-30 | 2006-01-17 | Showa Denko K.K. | Cerium-based abrasive, production process thereof |
-
2001
- 2001-05-29 JP JP2001160644A patent/JP4002740B2/ja not_active Expired - Fee Related
-
2002
- 2002-05-14 TW TW091110040A patent/TWI293981B/zh not_active IP Right Cessation
- 2002-05-15 MY MYPI20021762A patent/MY129185A/en unknown
- 2002-05-24 KR KR10-2003-7008652A patent/KR100509267B1/ko not_active Expired - Fee Related
- 2002-05-24 EP EP02726489A patent/EP1391494A1/en not_active Withdrawn
- 2002-05-24 WO PCT/JP2002/005051 patent/WO2002097004A1/ja not_active Ceased
- 2002-05-24 CN CNB028036336A patent/CN1239666C/zh not_active Expired - Fee Related
- 2002-05-24 US US10/433,967 patent/US6905527B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| TWI293981B (enExample) | 2008-03-01 |
| CN1489625A (zh) | 2004-04-14 |
| WO2002097004A1 (fr) | 2002-12-05 |
| EP1391494A1 (en) | 2004-02-25 |
| JP4002740B2 (ja) | 2007-11-07 |
| JP2002348563A (ja) | 2002-12-04 |
| KR20030093193A (ko) | 2003-12-06 |
| US6905527B2 (en) | 2005-06-14 |
| KR100509267B1 (ko) | 2005-08-18 |
| US20040219791A1 (en) | 2004-11-04 |
| CN1239666C (zh) | 2006-02-01 |
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