MY128807A - Transport module with latching door - Google Patents

Transport module with latching door

Info

Publication number
MY128807A
MY128807A MYPI20003119A MYPI20003119A MY128807A MY 128807 A MY128807 A MY 128807A MY PI20003119 A MYPI20003119 A MY PI20003119A MY PI20003119 A MYPI20003119 A MY PI20003119A MY 128807 A MY128807 A MY 128807A
Authority
MY
Malaysia
Prior art keywords
door
latching
frame
sliding plate
linkages
Prior art date
Application number
MYPI20003119A
Other languages
English (en)
Inventor
Gregory Bores
Michael C Zabka
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of MY128807A publication Critical patent/MY128807A/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1914—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by locking systems

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
MYPI20003119A 1999-07-08 2000-07-07 Transport module with latching door MY128807A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14283199P 1999-07-08 1999-07-08

Publications (1)

Publication Number Publication Date
MY128807A true MY128807A (en) 2007-02-28

Family

ID=22501466

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20003119A MY128807A (en) 1999-07-08 2000-07-07 Transport module with latching door

Country Status (8)

Country Link
EP (1) EP1218264A4 (https=)
JP (1) JP4549595B2 (https=)
KR (1) KR100747041B1 (https=)
CN (1) CN1169696C (https=)
AU (1) AU6341900A (https=)
DE (1) DE10084776T5 (https=)
MY (1) MY128807A (https=)
WO (1) WO2001004022A1 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100449682C (zh) * 2001-05-17 2009-01-07 株式会社荏原制作所 衬底传送容器
US6749067B2 (en) * 2002-01-16 2004-06-15 Entegris, Inc. Wafer carrier door with form fitting mechanism cover
US7325698B2 (en) 2004-04-18 2008-02-05 Entegris, Inc. Wafer container door with particulate collecting structure
JP4573566B2 (ja) 2004-04-20 2010-11-04 信越ポリマー株式会社 収納容器
CN1313331C (zh) * 2004-08-30 2007-05-02 财团法人工业技术研究院 洁净容器结构
JP4540529B2 (ja) 2005-04-18 2010-09-08 信越ポリマー株式会社 収納容器
JP6544128B2 (ja) * 2015-08-07 2019-07-17 シンフォニアテクノロジー株式会社 収納容器の蓋体及び収納容器
CN114628292B (zh) * 2022-05-16 2022-07-29 上海果纳半导体技术有限公司武汉分公司 晶圆传输盒

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5173273A (en) * 1990-10-11 1992-12-22 Brewer Charles A Cassette for dental instruments
US5915562A (en) * 1996-07-12 1999-06-29 Fluoroware, Inc. Transport module with latching door
US5711427A (en) * 1996-07-12 1998-01-27 Fluoroware, Inc. Wafer carrier with door
JP3476052B2 (ja) * 1997-09-01 2003-12-10 信越ポリマー株式会社 輸送容器
JP3722604B2 (ja) * 1997-11-13 2005-11-30 大日本スクリーン製造株式会社 基板処理装置
US6704998B1 (en) * 1997-12-24 2004-03-16 Asyst Technologies, Inc. Port door removal and wafer handling robotic system

Also Published As

Publication number Publication date
EP1218264A4 (en) 2007-09-26
AU6341900A (en) 2001-01-30
DE10084776T5 (de) 2005-12-01
JP4549595B2 (ja) 2010-09-22
KR100747041B1 (ko) 2007-08-07
JP2003504886A (ja) 2003-02-04
EP1218264A1 (en) 2002-07-03
KR20020063155A (ko) 2002-08-01
WO2001004022A1 (en) 2001-01-18
CN1169696C (zh) 2004-10-06
CN1378515A (zh) 2002-11-06
WO2001004022B1 (en) 2001-02-15

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