EP1218264A4 - TRANSPORT MODULE WITH DOOR LOCKING - Google Patents

TRANSPORT MODULE WITH DOOR LOCKING

Info

Publication number
EP1218264A4
EP1218264A4 EP00950296A EP00950296A EP1218264A4 EP 1218264 A4 EP1218264 A4 EP 1218264A4 EP 00950296 A EP00950296 A EP 00950296A EP 00950296 A EP00950296 A EP 00950296A EP 1218264 A4 EP1218264 A4 EP 1218264A4
Authority
EP
European Patent Office
Prior art keywords
transport module
lock component
lock
component
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP00950296A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1218264A1 (en
Inventor
Gregory W Bores
Michael C Zabka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of EP1218264A1 publication Critical patent/EP1218264A1/en
Publication of EP1218264A4 publication Critical patent/EP1218264A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1914—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by locking systems

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
EP00950296A 1999-07-08 2000-07-06 TRANSPORT MODULE WITH DOOR LOCKING Withdrawn EP1218264A4 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14283199P 1999-07-08 1999-07-08
US142831P 1999-07-08
PCT/US2000/018511 WO2001004022A1 (en) 1999-07-08 2000-07-06 Transport module with latching door

Publications (2)

Publication Number Publication Date
EP1218264A1 EP1218264A1 (en) 2002-07-03
EP1218264A4 true EP1218264A4 (en) 2007-09-26

Family

ID=22501466

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00950296A Withdrawn EP1218264A4 (en) 1999-07-08 2000-07-06 TRANSPORT MODULE WITH DOOR LOCKING

Country Status (8)

Country Link
EP (1) EP1218264A4 (https=)
JP (1) JP4549595B2 (https=)
KR (1) KR100747041B1 (https=)
CN (1) CN1169696C (https=)
AU (1) AU6341900A (https=)
DE (1) DE10084776T5 (https=)
MY (1) MY128807A (https=)
WO (1) WO2001004022A1 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100449682C (zh) * 2001-05-17 2009-01-07 株式会社荏原制作所 衬底传送容器
US6749067B2 (en) * 2002-01-16 2004-06-15 Entegris, Inc. Wafer carrier door with form fitting mechanism cover
US7325698B2 (en) 2004-04-18 2008-02-05 Entegris, Inc. Wafer container door with particulate collecting structure
JP4573566B2 (ja) 2004-04-20 2010-11-04 信越ポリマー株式会社 収納容器
CN1313331C (zh) * 2004-08-30 2007-05-02 财团法人工业技术研究院 洁净容器结构
JP4540529B2 (ja) 2005-04-18 2010-09-08 信越ポリマー株式会社 収納容器
JP6544128B2 (ja) * 2015-08-07 2019-07-17 シンフォニアテクノロジー株式会社 収納容器の蓋体及び収納容器
CN114628292B (zh) * 2022-05-16 2022-07-29 上海果纳半导体技术有限公司武汉分公司 晶圆传输盒

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0899202A1 (en) * 1997-09-01 1999-03-03 Shin-Etsu Polymer Co., Ltd. A shipping container
WO1999033726A1 (en) * 1997-12-24 1999-07-08 Asyst Technologies, Inc. Smif pod door and port door removal and return system

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5173273A (en) * 1990-10-11 1992-12-22 Brewer Charles A Cassette for dental instruments
US5915562A (en) * 1996-07-12 1999-06-29 Fluoroware, Inc. Transport module with latching door
US5711427A (en) * 1996-07-12 1998-01-27 Fluoroware, Inc. Wafer carrier with door
JP3722604B2 (ja) * 1997-11-13 2005-11-30 大日本スクリーン製造株式会社 基板処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0899202A1 (en) * 1997-09-01 1999-03-03 Shin-Etsu Polymer Co., Ltd. A shipping container
WO1999033726A1 (en) * 1997-12-24 1999-07-08 Asyst Technologies, Inc. Smif pod door and port door removal and return system

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO0104022A1 *

Also Published As

Publication number Publication date
AU6341900A (en) 2001-01-30
MY128807A (en) 2007-02-28
DE10084776T5 (de) 2005-12-01
JP4549595B2 (ja) 2010-09-22
KR100747041B1 (ko) 2007-08-07
JP2003504886A (ja) 2003-02-04
EP1218264A1 (en) 2002-07-03
KR20020063155A (ko) 2002-08-01
WO2001004022A1 (en) 2001-01-18
CN1169696C (zh) 2004-10-06
CN1378515A (zh) 2002-11-06
WO2001004022B1 (en) 2001-02-15

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Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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17P Request for examination filed

Effective date: 20020102

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AX Request for extension of the european patent

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RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: ENTEGRIS, INC.

RBV Designated contracting states (corrected)

Designated state(s): DE FR GB IE NL

A4 Supplementary search report drawn up and despatched

Effective date: 20070828

RIC1 Information provided on ipc code assigned before grant

Ipc: H01L 21/00 20060101AFI20070822BHEP

17Q First examination report despatched

Effective date: 20090311

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20090722