EP1218264A4 - Transportmodul mit türverriegelung - Google Patents
Transportmodul mit türverriegelungInfo
- Publication number
- EP1218264A4 EP1218264A4 EP00950296A EP00950296A EP1218264A4 EP 1218264 A4 EP1218264 A4 EP 1218264A4 EP 00950296 A EP00950296 A EP 00950296A EP 00950296 A EP00950296 A EP 00950296A EP 1218264 A4 EP1218264 A4 EP 1218264A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- transport module
- latching door
- latching
- door
- transport
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67373—Closed carriers characterised by locking systems
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14283199P | 1999-07-08 | 1999-07-08 | |
US142831P | 1999-07-08 | ||
PCT/US2000/018511 WO2001004022A1 (en) | 1999-07-08 | 2000-07-06 | Transport module with latching door |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1218264A1 EP1218264A1 (de) | 2002-07-03 |
EP1218264A4 true EP1218264A4 (de) | 2007-09-26 |
Family
ID=22501466
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP00950296A Withdrawn EP1218264A4 (de) | 1999-07-08 | 2000-07-06 | Transportmodul mit türverriegelung |
Country Status (8)
Country | Link |
---|---|
EP (1) | EP1218264A4 (de) |
JP (1) | JP4549595B2 (de) |
KR (1) | KR100747041B1 (de) |
CN (1) | CN1169696C (de) |
AU (1) | AU6341900A (de) |
DE (1) | DE10084776T5 (de) |
MY (1) | MY128807A (de) |
WO (1) | WO2001004022A1 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002093622A2 (en) * | 2001-05-17 | 2002-11-21 | Ebara Corporation | Substrate transport container |
US6749067B2 (en) * | 2002-01-16 | 2004-06-15 | Entegris, Inc. | Wafer carrier door with form fitting mechanism cover |
US7325698B2 (en) | 2004-04-18 | 2008-02-05 | Entegris, Inc. | Wafer container door with particulate collecting structure |
JP4573566B2 (ja) | 2004-04-20 | 2010-11-04 | 信越ポリマー株式会社 | 収納容器 |
CN1313331C (zh) * | 2004-08-30 | 2007-05-02 | 财团法人工业技术研究院 | 洁净容器结构 |
JP4540529B2 (ja) | 2005-04-18 | 2010-09-08 | 信越ポリマー株式会社 | 収納容器 |
JP6544128B2 (ja) * | 2015-08-07 | 2019-07-17 | シンフォニアテクノロジー株式会社 | 収納容器の蓋体及び収納容器 |
CN114628292B (zh) * | 2022-05-16 | 2022-07-29 | 上海果纳半导体技术有限公司武汉分公司 | 晶圆传输盒 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0899202A1 (de) * | 1997-09-01 | 1999-03-03 | Shin-Etsu Polymer Co., Ltd. | Versandbehälter |
WO1999033726A1 (en) * | 1997-12-24 | 1999-07-08 | Asyst Technologies, Inc. | Smif pod door and port door removal and return system |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5173273A (en) * | 1990-10-11 | 1992-12-22 | Brewer Charles A | Cassette for dental instruments |
US5915562A (en) * | 1996-07-12 | 1999-06-29 | Fluoroware, Inc. | Transport module with latching door |
US5711427A (en) * | 1996-07-12 | 1998-01-27 | Fluoroware, Inc. | Wafer carrier with door |
JP3722604B2 (ja) * | 1997-11-13 | 2005-11-30 | 大日本スクリーン製造株式会社 | 基板処理装置 |
-
2000
- 2000-07-06 CN CNB008115826A patent/CN1169696C/zh not_active Expired - Lifetime
- 2000-07-06 WO PCT/US2000/018511 patent/WO2001004022A1/en active Application Filing
- 2000-07-06 AU AU63419/00A patent/AU6341900A/en not_active Abandoned
- 2000-07-06 JP JP2001509652A patent/JP4549595B2/ja not_active Expired - Lifetime
- 2000-07-06 DE DE10084776T patent/DE10084776T5/de not_active Withdrawn
- 2000-07-06 EP EP00950296A patent/EP1218264A4/de not_active Withdrawn
- 2000-07-06 KR KR1020027000227A patent/KR100747041B1/ko active IP Right Grant
- 2000-07-07 MY MYPI20003119A patent/MY128807A/en unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0899202A1 (de) * | 1997-09-01 | 1999-03-03 | Shin-Etsu Polymer Co., Ltd. | Versandbehälter |
WO1999033726A1 (en) * | 1997-12-24 | 1999-07-08 | Asyst Technologies, Inc. | Smif pod door and port door removal and return system |
Non-Patent Citations (1)
Title |
---|
See also references of WO0104022A1 * |
Also Published As
Publication number | Publication date |
---|---|
DE10084776T5 (de) | 2005-12-01 |
EP1218264A1 (de) | 2002-07-03 |
AU6341900A (en) | 2001-01-30 |
JP2003504886A (ja) | 2003-02-04 |
MY128807A (en) | 2007-02-28 |
JP4549595B2 (ja) | 2010-09-22 |
KR100747041B1 (ko) | 2007-08-07 |
CN1378515A (zh) | 2002-11-06 |
WO2001004022B1 (en) | 2001-02-15 |
KR20020063155A (ko) | 2002-08-01 |
WO2001004022A1 (en) | 2001-01-18 |
CN1169696C (zh) | 2004-10-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20020102 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE |
|
AX | Request for extension of the european patent |
Free format text: AL;LT;LV;MK;RO;SI |
|
RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: ENTEGRIS, INC. |
|
RBV | Designated contracting states (corrected) |
Designated state(s): DE FR GB IE NL |
|
A4 | Supplementary search report drawn up and despatched |
Effective date: 20070828 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: H01L 21/00 20060101AFI20070822BHEP |
|
17Q | First examination report despatched |
Effective date: 20090311 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20090722 |