KR100747041B1 - 잠금 문을 가진 이송 모듈 - Google Patents
잠금 문을 가진 이송 모듈 Download PDFInfo
- Publication number
- KR100747041B1 KR100747041B1 KR1020027000227A KR20027000227A KR100747041B1 KR 100747041 B1 KR100747041 B1 KR 100747041B1 KR 1020027000227 A KR1020027000227 A KR 1020027000227A KR 20027000227 A KR20027000227 A KR 20027000227A KR 100747041 B1 KR100747041 B1 KR 100747041B1
- Authority
- KR
- South Korea
- Prior art keywords
- door
- locking
- container
- delete delete
- wafer
- Prior art date
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67373—Closed carriers characterised by locking systems
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14283199P | 1999-07-08 | 1999-07-08 | |
US60/142,831 | 1999-07-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20020063155A KR20020063155A (ko) | 2002-08-01 |
KR100747041B1 true KR100747041B1 (ko) | 2007-08-07 |
Family
ID=22501466
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020027000227A KR100747041B1 (ko) | 1999-07-08 | 2000-07-06 | 잠금 문을 가진 이송 모듈 |
Country Status (8)
Country | Link |
---|---|
EP (1) | EP1218264A4 (de) |
JP (1) | JP4549595B2 (de) |
KR (1) | KR100747041B1 (de) |
CN (1) | CN1169696C (de) |
AU (1) | AU6341900A (de) |
DE (1) | DE10084776T5 (de) |
MY (1) | MY128807A (de) |
WO (1) | WO2001004022A1 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002093622A2 (en) * | 2001-05-17 | 2002-11-21 | Ebara Corporation | Substrate transport container |
US6749067B2 (en) * | 2002-01-16 | 2004-06-15 | Entegris, Inc. | Wafer carrier door with form fitting mechanism cover |
US7325698B2 (en) | 2004-04-18 | 2008-02-05 | Entegris, Inc. | Wafer container door with particulate collecting structure |
JP4573566B2 (ja) | 2004-04-20 | 2010-11-04 | 信越ポリマー株式会社 | 収納容器 |
CN1313331C (zh) * | 2004-08-30 | 2007-05-02 | 财团法人工业技术研究院 | 洁净容器结构 |
JP4540529B2 (ja) | 2005-04-18 | 2010-09-08 | 信越ポリマー株式会社 | 収納容器 |
JP6544128B2 (ja) * | 2015-08-07 | 2019-07-17 | シンフォニアテクノロジー株式会社 | 収納容器の蓋体及び収納容器 |
CN114628292B (zh) * | 2022-05-16 | 2022-07-29 | 上海果纳半导体技术有限公司武汉分公司 | 晶圆传输盒 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5173273A (en) * | 1990-10-11 | 1992-12-22 | Brewer Charles A | Cassette for dental instruments |
US5711427A (en) * | 1996-07-12 | 1998-01-27 | Fluoroware, Inc. | Wafer carrier with door |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5915562A (en) * | 1996-07-12 | 1999-06-29 | Fluoroware, Inc. | Transport module with latching door |
JP3476052B2 (ja) * | 1997-09-01 | 2003-12-10 | 信越ポリマー株式会社 | 輸送容器 |
JP3722604B2 (ja) * | 1997-11-13 | 2005-11-30 | 大日本スクリーン製造株式会社 | 基板処理装置 |
US6704998B1 (en) * | 1997-12-24 | 2004-03-16 | Asyst Technologies, Inc. | Port door removal and wafer handling robotic system |
-
2000
- 2000-07-06 CN CNB008115826A patent/CN1169696C/zh not_active Expired - Lifetime
- 2000-07-06 WO PCT/US2000/018511 patent/WO2001004022A1/en active Application Filing
- 2000-07-06 AU AU63419/00A patent/AU6341900A/en not_active Abandoned
- 2000-07-06 JP JP2001509652A patent/JP4549595B2/ja not_active Expired - Lifetime
- 2000-07-06 DE DE10084776T patent/DE10084776T5/de not_active Withdrawn
- 2000-07-06 EP EP00950296A patent/EP1218264A4/de not_active Withdrawn
- 2000-07-06 KR KR1020027000227A patent/KR100747041B1/ko active IP Right Grant
- 2000-07-07 MY MYPI20003119A patent/MY128807A/en unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5173273A (en) * | 1990-10-11 | 1992-12-22 | Brewer Charles A | Cassette for dental instruments |
US5711427A (en) * | 1996-07-12 | 1998-01-27 | Fluoroware, Inc. | Wafer carrier with door |
Also Published As
Publication number | Publication date |
---|---|
DE10084776T5 (de) | 2005-12-01 |
EP1218264A1 (de) | 2002-07-03 |
AU6341900A (en) | 2001-01-30 |
JP2003504886A (ja) | 2003-02-04 |
MY128807A (en) | 2007-02-28 |
JP4549595B2 (ja) | 2010-09-22 |
CN1378515A (zh) | 2002-11-06 |
EP1218264A4 (de) | 2007-09-26 |
WO2001004022B1 (en) | 2001-02-15 |
KR20020063155A (ko) | 2002-08-01 |
WO2001004022A1 (en) | 2001-01-18 |
CN1169696C (zh) | 2004-10-06 |
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