MXPA05007160A - Chip calorifico con capa de carbono similar al diamante con impurezas y capa de cavitacion superpuesta. - Google Patents

Chip calorifico con capa de carbono similar al diamante con impurezas y capa de cavitacion superpuesta.

Info

Publication number
MXPA05007160A
MXPA05007160A MXPA05007160A MXPA05007160A MXPA05007160A MX PA05007160 A MXPA05007160 A MX PA05007160A MX PA05007160 A MXPA05007160 A MX PA05007160A MX PA05007160 A MXPA05007160 A MX PA05007160A MX PA05007160 A MXPA05007160 A MX PA05007160A
Authority
MX
Mexico
Prior art keywords
layer
doped diamond
carbon
carbon layer
cavitation
Prior art date
Application number
MXPA05007160A
Other languages
English (en)
Inventor
V Bell Byron
Original Assignee
Lexmark Int Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lexmark Int Inc filed Critical Lexmark Int Inc
Publication of MXPA05007160A publication Critical patent/MXPA05007160A/es

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used

Landscapes

  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

Un chip calorifico de cabezal de impresion de inyeccion de tinta tiene un substrato de silicio con una pila calorifica formada de una pluralidad de capas de pelicula delgadas en la misma para eyectar una gota de tinta durante su uso. Las capas de pelicula delgada incluyen: una capa de barrera termica en el substrato de silicio; una capa de reostato en la capa de barrera termica; una capa de carbono similar al diamante con impurezas en la capa de reostato; y una capa de cavitacion en capa de carbono similar al diamante con impurezas. La capa de carbono similar al diamante con impurezas preferentemente incluye silicio, pero tambien puede incluir nitrogeno, titanio, tantalo, combinaciones de los mismos u otro. Cuando incluye silicio, una concentracion de silicio preferida fluctua desde 20 hasta 25 del porcentaje atomico. Una capa de cavitacion preferida incluye una capa de carbono similar al diamante sin impurezas, tantalo o una capa de titanio. La capa de carbono similar al diamante con impurezas fluctua en grosor desde 500 hasta 3000 angstroms. La capa de cavitacion fluctua desde 500 hasta 6000 angstroms. Tambien se revelan cabezales de impresion e impresoras de inyeccion de tinta.
MXPA05007160A 2002-12-30 2003-12-24 Chip calorifico con capa de carbono similar al diamante con impurezas y capa de cavitacion superpuesta. MXPA05007160A (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/334,109 US6805431B2 (en) 2002-12-30 2002-12-30 Heater chip with doped diamond-like carbon layer and overlying cavitation layer
PCT/US2003/041245 WO2004060676A2 (en) 2002-12-30 2003-12-24 Heater chip with doped diamond-like carbon layer and overlying cavitation layer

Publications (1)

Publication Number Publication Date
MXPA05007160A true MXPA05007160A (es) 2005-09-21

Family

ID=32654930

Family Applications (1)

Application Number Title Priority Date Filing Date
MXPA05007160A MXPA05007160A (es) 2002-12-30 2003-12-24 Chip calorifico con capa de carbono similar al diamante con impurezas y capa de cavitacion superpuesta.

Country Status (10)

Country Link
US (1) US6805431B2 (es)
EP (1) EP1592559A4 (es)
JP (1) JP2006512234A (es)
CN (1) CN100402294C (es)
AU (1) AU2003297528A1 (es)
BR (1) BR0317889A (es)
CA (1) CA2512165A1 (es)
MX (1) MXPA05007160A (es)
TW (1) TW200510184A (es)
WO (1) WO2004060676A2 (es)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100560717B1 (ko) * 2004-03-11 2006-03-13 삼성전자주식회사 잉크젯 헤드 기판, 잉크젯 헤드 및 잉크젯 헤드 기판의제조방법
US20060081239A1 (en) * 2004-10-15 2006-04-20 Alley Rodney L Thermally efficient drop generator
US7214324B2 (en) * 2005-04-15 2007-05-08 Delphi Technologies, Inc. Technique for manufacturing micro-electro mechanical structures
US7452058B2 (en) * 2006-06-29 2008-11-18 Lexmark International, Inc. Substantially planar ejection actuators and methods relating thereto
US7673972B2 (en) * 2007-01-08 2010-03-09 Lexmark International, Inc. Micro-fluid ejection devices, methods for making micro-fluid ejection heads, and micro-fluid ejection head having high resistance thin film heaters
US7862156B2 (en) * 2007-07-26 2011-01-04 Hewlett-Packard Development Company, L.P. Heating element
WO2009091390A1 (en) * 2008-01-14 2009-07-23 Lexmark International, Inc. Micro-fluid ejection devices, methods for making micro-fluid ejection heads, and micro-fluid ejection heads having high resistance thin film heaters
US20100123758A1 (en) * 2008-11-14 2010-05-20 Steven Wayne Bergstedt Micro-fluid ejection device with on-chip self-managed thermal control system
US8960886B2 (en) 2009-06-29 2015-02-24 Videojet Technologies Inc. Thermal inkjet print head with solvent resistance
JP5698739B2 (ja) * 2009-06-29 2015-04-08 ヴィデオジェット テクノロジーズ インコーポレイテッド 耐溶媒性サーマルインクジェット印刷ヘッド
US20120091121A1 (en) * 2010-10-19 2012-04-19 Zachary Justin Reitmeier Heater stack for inkjet printheads
JP6128935B2 (ja) * 2012-05-22 2017-05-17 キヤノン株式会社 液体吐出ヘッド用基板、及び液体吐出ヘッド
JP6310327B2 (ja) * 2014-05-27 2018-04-11 株式会社エンプラス 流体取扱装置
AU2015348738B2 (en) * 2014-11-19 2018-03-01 Memjet Technology Limited Inkjet nozzle device having improved lifetime
CN108330065A (zh) * 2017-01-20 2018-07-27 上海新微技术研发中心有限公司 一种基于细胞打印喷头阵列的细胞筛选装置和细胞筛选方法
CN107746186B (zh) * 2017-10-17 2021-02-05 信利光电股份有限公司 一种高硬度耐磨玻璃盖板及其制备方法
CN113873738B (zh) * 2021-09-26 2024-01-12 中国工程物理研究院激光聚变研究中心 一种自支撑碳基电容器靶及其制备方法

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3011919A1 (de) * 1979-03-27 1980-10-09 Canon Kk Verfahren zur herstellung eines aufzeichnungskopfes
US4335389A (en) * 1979-03-27 1982-06-15 Canon Kabushiki Kaisha Liquid droplet ejecting recording head
US4663640A (en) 1984-07-20 1987-05-05 Canon Kabushiki Kaisha Recording head
US4990939A (en) * 1988-09-01 1991-02-05 Ricoh Company, Ltd. Bubble jet printer head with improved operational speed
US4956653A (en) 1989-05-12 1990-09-11 Eastman Kodak Company Bubble jet print head having improved multi-layer protective structure for heater elements
JP2662446B2 (ja) * 1989-12-11 1997-10-15 キヤノン株式会社 記録ヘッド及び記録ヘッド用素子基板
US5786068A (en) 1991-05-03 1998-07-28 Advanced Refractory Technologies, Inc. Electrically tunable coatings
JPH0673966B2 (ja) * 1992-07-29 1994-09-21 ティーディーケイ株式会社 サーマルヘッド
US5348909A (en) 1993-03-26 1994-09-20 Lexmark International, Inc. Manufacture of printhead with diamond resistors
GB9309346D0 (en) 1993-05-06 1993-06-16 Kobe Steel Europ Ltd Preparation of nucleated silicon surfaces
GB9318985D0 (en) 1993-09-14 1993-10-27 Xaar Ltd Passivation of ceramic piezoelectric ink jet print heads
US5559367A (en) 1994-07-12 1996-09-24 International Business Machines Corporation Diamond-like carbon for use in VLSI and ULSI interconnect systems
US6031250A (en) 1995-12-20 2000-02-29 Advanced Technology Materials, Inc. Integrated circuit devices and methods employing amorphous silicon carbide resistor materials
US6080470A (en) 1996-06-17 2000-06-27 Dorfman; Benjamin F. Hard graphite-like material bonded by diamond-like framework
US5744865A (en) 1996-10-22 1998-04-28 Texas Instruments Incorporated Highly thermally conductive interconnect structure for intergrated circuits
US5933166A (en) 1997-02-03 1999-08-03 Xerox Corporation Ink-jet printhead allowing selectable droplet size
DE69803365T2 (de) 1997-02-04 2002-10-31 Bekaert Sa Nv Beschichtung enthaltend filme aus diamantartigem kohlenstoff und diamantartigem nanokomposit
JPH10217522A (ja) 1997-02-07 1998-08-18 Fuji Photo Film Co Ltd サーマルヘッドおよびサーマルヘッドの製造方法
US6209991B1 (en) 1997-03-04 2001-04-03 Hewlett-Packard Company Transition metal carbide films for applications in ink jet printheads
DE19730083A1 (de) 1997-07-14 1999-01-21 Rossendorf Forschzent Verfahren zur gezielten Herstellung von n-leitenden Bereichen in Diamantschichten mittels Ionenimplantation
US6030904A (en) 1997-08-21 2000-02-29 International Business Machines Corporation Stabilization of low-k carbon-based dielectrics
US6659596B1 (en) 1997-08-28 2003-12-09 Hewlett-Packard Development Company, L.P. Ink-jet printhead and method for producing the same
US6505914B2 (en) 1997-10-02 2003-01-14 Merckle Gmbh Microactuator based on diamond
US5981000A (en) 1997-10-14 1999-11-09 International Business Machines Corporation Method for fabricating a thermally stable diamond-like carbon film
US6046758A (en) 1998-03-10 2000-04-04 Diamonex, Incorporated Highly wear-resistant thermal print heads with silicon-doped diamond-like carbon protective coatings
US6414338B1 (en) 1998-11-30 2002-07-02 Sandia National Laboratories n-Type diamond and method for producing same
US6315393B1 (en) 1999-04-30 2001-11-13 Hewlett-Packard Company Ink-jet printhead
US6139131A (en) 1999-08-30 2000-10-31 Hewlett-Packard Company High drop generator density printhead
JP4666739B2 (ja) * 1999-10-05 2011-04-06 キヤノン株式会社 インクジェット記録ヘッド用基体、インクジェット記録ヘッド、インクジェット記録ユニット、インクジェット記録装置、インクジェット記録ヘッド用基体の製造方法及びインクジェット記録ヘッドの製造方法
JP4271339B2 (ja) 2000-03-31 2009-06-03 富士フイルム株式会社 サーマルヘッドの製造方法
US6387719B1 (en) * 2001-02-28 2002-05-14 Lexmark International, Inc. Method for improving adhesion
KR100425306B1 (ko) * 2001-10-12 2004-03-30 삼성전자주식회사 버블젯 방식의 잉크젯 프린트헤드
US6637866B1 (en) * 2002-06-07 2003-10-28 Lexmark International, Inc. Energy efficient heater stack using DLC island

Also Published As

Publication number Publication date
EP1592559A2 (en) 2005-11-09
BR0317889A (pt) 2005-12-06
TW200510184A (en) 2005-03-16
US20040125174A1 (en) 2004-07-01
CN100402294C (zh) 2008-07-16
WO2004060676A3 (en) 2005-03-31
US6805431B2 (en) 2004-10-19
JP2006512234A (ja) 2006-04-13
WO2004060676A2 (en) 2004-07-22
AU2003297528A1 (en) 2004-07-29
CA2512165A1 (en) 2004-07-22
CN1738716A (zh) 2006-02-22
WO2004060676B1 (en) 2005-05-19
EP1592559A4 (en) 2008-10-08

Similar Documents

Publication Publication Date Title
TW200510184A (en) Heater chip with doped diamond-like carbon layer and overlying cavitation layer
US8141986B2 (en) Heating element
US7413289B2 (en) Low energy, long life micro-fluid ejection device
US6663228B2 (en) Ink-jet head base board, ink-jet head, and ink-jet apparatus
US9033470B2 (en) Fluid ejection assembly and related methods
CN102947099B (zh) 流体喷射装置
JP2007269011A5 (es)
WO2009015353A2 (en) Heating element
WO2006053221A2 (en) Ultra-low energy micro-fluid ejection device
TW200611829A (en) Thin film ink jet printhead adhesion enhancement
JP2005067203A (ja) インクジェットプリントヘッドの保護層，インクジェットプリントヘッド，およびインクジェットプリントヘッドの製造方法
JP2004216875A5 (es)
US20080094455A1 (en) Inkjet printhead heater and method of manufacture
US7470001B2 (en) Thermal inkjet printhead apparatus to regulate pressure exerted by bubbles in an ink chamber and method thereof
US20110285790A1 (en) Inkjet printhead having nozzle chambers with redundant ink inlets
CA2545241A1 (en) Microfluid ejection device having efficient logic and driver circuitry
JP4258141B2 (ja) サーマルインクジェットプリントヘッド
EP1872949A2 (en) Print Head and Fabrication Method Thereof
JPH106500A (ja) インクジェットヘッド及びその製造方法
JP2007223330A (ja) サーマルインクジェットプリントヘッド
JP2008229959A (ja) インクジェットヘッド用基体の製造方法
JPS63247057A (ja) 薄膜型インクジエツトヘツド
JPH07314690A (ja) インクジェットヘッド用基体、インクジェットヘッド、インクジェットペン、及びインクジェット装置

Legal Events

Date Code Title Description
FG Grant or registration