MX347686B - Celda transductora, micro-labrada, capacitiva, pre-colapsada con capa de tensión. - Google Patents

Celda transductora, micro-labrada, capacitiva, pre-colapsada con capa de tensión.

Info

Publication number
MX347686B
MX347686B MX2014004910A MX2014004910A MX347686B MX 347686 B MX347686 B MX 347686B MX 2014004910 A MX2014004910 A MX 2014004910A MX 2014004910 A MX2014004910 A MX 2014004910A MX 347686 B MX347686 B MX 347686B
Authority
MX
Mexico
Prior art keywords
membrane
stress layer
capacitive micro
transducer cell
substrate
Prior art date
Application number
MX2014004910A
Other languages
English (en)
Spanish (es)
Other versions
MX2014004910A (es
Inventor
Dirksen Peter
Dekker Ronald
Adrianus Henneken Vincent
Marcelis Bout
Douglas Fraser John
Leeuwestein Adriaan
Original Assignee
Koninklijke Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Nv filed Critical Koninklijke Philips Nv
Publication of MX2014004910A publication Critical patent/MX2014004910A/es
Publication of MX347686B publication Critical patent/MX347686B/es

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • G01H9/008—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means by using ultrasonic waves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Measuring Fluid Pressure (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
MX2014004910A 2011-10-28 2012-10-26 Celda transductora, micro-labrada, capacitiva, pre-colapsada con capa de tensión. MX347686B (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161552482P 2011-10-28 2011-10-28
PCT/IB2012/055919 WO2013061298A2 (en) 2011-10-28 2012-10-26 Pre-collapsed capacitive micro-machined transducer cell with stress layer

Publications (2)

Publication Number Publication Date
MX2014004910A MX2014004910A (es) 2014-05-28
MX347686B true MX347686B (es) 2017-05-09

Family

ID=47505271

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2014004910A MX347686B (es) 2011-10-28 2012-10-26 Celda transductora, micro-labrada, capacitiva, pre-colapsada con capa de tensión.

Country Status (8)

Country Link
US (1) US9534949B2 (https=)
EP (1) EP2771132B1 (https=)
JP (1) JP6210992B2 (https=)
CN (1) CN103917304B (https=)
BR (1) BR112014009659A2 (https=)
MX (1) MX347686B (https=)
RU (1) RU2603518C2 (https=)
WO (1) WO2013061298A2 (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6069798B2 (ja) 2011-12-20 2017-02-01 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 超音波トランスデューサデバイス及びこれを製造する方法
US9624091B2 (en) 2013-05-31 2017-04-18 Robert Bosch Gmbh Trapped membrane
DE102013223695B4 (de) * 2013-11-20 2016-09-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum herstellen eines kapazitiven ultraschallwandlers und anordnung einer mehrzahl von kapazitiven ultraschallwandlern
EP3110628B1 (en) * 2014-02-28 2019-07-03 The Regents of the University of California Variable thickness diaphragm for a wideband robust piezoelectric micromachined ultrasonic transducer (pmut)
WO2016083273A1 (en) * 2014-11-25 2016-06-02 Koninklijke Philips N.V. Ultrasound system and method
CN105792084B (zh) * 2016-04-26 2020-02-21 瑞声声学科技(深圳)有限公司 Mems麦克风及其制造方法
CN110325293B (zh) * 2016-12-22 2021-06-22 皇家飞利浦有限公司 电容式射频微机电开关的系统和操作方法
RU2672099C2 (ru) * 2016-12-23 2018-11-12 Евгений Анатольевич Обжиров Электрическая машина емкостная (эме) с ячейками внутреннего сжатия
CN110662949B (zh) * 2017-06-21 2021-06-18 松下知识产权经营株式会社 物理量传感器
DE102019203829B4 (de) * 2019-03-20 2020-12-31 Vitesco Technologies GmbH Verfahren zum Herstellen einer Fluidsensorvorrichtung und Fluidsensorvorrichtung
US11904357B2 (en) * 2020-05-22 2024-02-20 GE Precision Healthcare LLC Micromachined ultrasonic transducers with non-coplanar actuation and displacement

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5619476A (en) * 1994-10-21 1997-04-08 The Board Of Trustees Of The Leland Stanford Jr. Univ. Electrostatic ultrasonic transducer
EP1028466B1 (en) 1999-02-09 2006-08-02 STMicroelectronics S.r.l. Method for manufacturing integrated devices including electromechanical microstructures, without residual stress
US20030022412A1 (en) 2001-07-25 2003-01-30 Motorola, Inc. Monolithic semiconductor-piezoelectric device structures and electroacoustic charge transport devices
US7489593B2 (en) 2004-11-30 2009-02-10 Vermon Electrostatic membranes for sensors, ultrasonic transducers incorporating such membranes, and manufacturing methods therefor
US10092270B2 (en) * 2007-09-17 2018-10-09 Koninklijke Philips Electronics N.V. Pre-collapsed CMUT with mechanical collapse retention
CN101969856B (zh) * 2007-09-17 2013-06-05 皇家飞利浦电子股份有限公司 预塌陷的电容微机械超声传感器的制造及其应用
WO2009041675A1 (en) * 2007-09-25 2009-04-02 Canon Kabushiki Kaisha Electrostatic transducer and manufacturing method therefor
US7745248B2 (en) 2007-10-18 2010-06-29 The Board Of Trustees Of The Leland Stanford Junior University Fabrication of capacitive micromachined ultrasonic transducers by local oxidation
CN101896288B (zh) * 2007-12-14 2013-03-27 皇家飞利浦电子股份有限公司 包括经成型衬底的可以塌陷模式工作的cmut
EP2145696A1 (en) * 2008-07-15 2010-01-20 UAB Minatech Capacitive micromachined ultrasonic transducer and its fabrication method
JP2010061976A (ja) * 2008-09-03 2010-03-18 Toshiba Corp スイッチ及びｅｓｄ保護素子
WO2010032156A2 (en) * 2008-09-16 2010-03-25 Koninklijke Philips Electronics N.V. Capacitive micromachined ultrasound transducer
US8402831B2 (en) * 2009-03-05 2013-03-26 The Board Of Trustees Of The Leland Standford Junior University Monolithic integrated CMUTs fabricated by low-temperature wafer bonding
MX343897B (es) * 2011-10-28 2016-11-28 Koninklijke Philips Nv Celda de transductor micro-mecanizado capacitivo pre-colapsado con enchufe.
CN103958079B (zh) * 2011-11-17 2016-08-24 皇家飞利浦有限公司 具有环形塌陷区域的预塌陷电容式微机械换能器元件
JP6069798B2 (ja) * 2011-12-20 2017-02-01 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 超音波トランスデューサデバイス及びこれを製造する方法

Also Published As

Publication number Publication date
US9534949B2 (en) 2017-01-03
EP2771132B1 (en) 2018-08-29
JP2015501594A (ja) 2015-01-15
RU2014121392A (ru) 2015-12-10
WO2013061298A2 (en) 2013-05-02
WO2013061298A3 (en) 2013-09-19
RU2603518C2 (ru) 2016-11-27
US20140251014A1 (en) 2014-09-11
BR112014009659A2 (pt) 2017-05-09
CN103917304A (zh) 2014-07-09
MX2014004910A (es) 2014-05-28
EP2771132A2 (en) 2014-09-03
CN103917304B (zh) 2016-08-17
JP6210992B2 (ja) 2017-10-11

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