MX2016012398A - Modificacion de las propiedades opticas de un elemento informatico integrado mediante implantacion de iones. - Google Patents
Modificacion de las propiedades opticas de un elemento informatico integrado mediante implantacion de iones.Info
- Publication number
- MX2016012398A MX2016012398A MX2016012398A MX2016012398A MX2016012398A MX 2016012398 A MX2016012398 A MX 2016012398A MX 2016012398 A MX2016012398 A MX 2016012398A MX 2016012398 A MX2016012398 A MX 2016012398A MX 2016012398 A MX2016012398 A MX 2016012398A
- Authority
- MX
- Mexico
- Prior art keywords
- engineering
- computational element
- integrated computational
- optical properties
- ion implantation
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title abstract 4
- 238000005468 ion implantation Methods 0.000 title abstract 2
- 239000000463 material Substances 0.000 abstract 5
- 238000010884 ion-beam technique Methods 0.000 abstract 2
- 238000005259 measurement Methods 0.000 abstract 2
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0042—Controlling partial pressure or flow rate of reactive or inert gases with feedback of measurements
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/221—Ion beam deposition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/48—Ion implantation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0683—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating measurement during deposition or removal of the layer
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
- H01L21/67213—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process comprising at least one ion or electron beam chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
- H01L22/34—Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- High Energy & Nuclear Physics (AREA)
- Fluid Mechanics (AREA)
- Optics & Photonics (AREA)
- Automation & Control Theory (AREA)
- Inorganic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Se proporcionan sistemas y métodos para la modificación de las propiedades ópticas de un dispositivo de elementos informáticos integrados mediante el uso de implantación de iones durante la fabricación. Un sistema descrito en la presente incluye una cámara, una fuente de material contenida dentro de la cámara, una fuente iónica configurada para proporcionar un haz de iones de energía elevada, un portador de sustrato para brindar soporte a una pila de múltiples capas de materiales que conforman el dispositivo de elementos informáticos integrados, un sistema de medición y una unidad informática. La fuente de material proporciona una capa de material a la pila de múltiples capas, y al menos una parte del haz de iones se deposita en la capa de material de acuerdo con un valor óptico proporcionado por el sistema de medición.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US2014/035240 WO2015163875A1 (en) | 2014-04-24 | 2014-04-24 | Engineering the optical properties of an integrated computational element by ion implantation |
Publications (2)
Publication Number | Publication Date |
---|---|
MX2016012398A true MX2016012398A (es) | 2016-12-16 |
MX360069B MX360069B (es) | 2018-10-22 |
Family
ID=54332907
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MX2016012398A MX360069B (es) | 2014-04-24 | 2014-04-24 | Modificacion de las propiedades opticas de un elemento informatico integrado mediante implantacion de iones. |
Country Status (4)
Country | Link |
---|---|
US (2) | US9905425B2 (es) |
EP (1) | EP2948978A4 (es) |
MX (1) | MX360069B (es) |
WO (1) | WO2015163875A1 (es) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015163875A1 (en) | 2014-04-24 | 2015-10-29 | Halliburton Energy Services, Inc. | Engineering the optical properties of an integrated computational element by ion implantation |
US10622268B2 (en) * | 2015-12-08 | 2020-04-14 | Infineon Technologies Ag | Apparatus and method for ion implantation |
ES2622461B1 (es) * | 2015-12-30 | 2018-04-24 | Consejo Superior De Investigaciones Cientificas | Procedimiento de deposición de capas delgadas de estequiometría controlada sobre sustratos mediante pulverización catódica reactiva a ángulo rasante |
US10163669B2 (en) * | 2016-01-29 | 2018-12-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Metrology system and measurement method using the same |
US20210063314A1 (en) * | 2018-05-17 | 2021-03-04 | Halliburton Energy Services, Inc. | Use of a backside roughened sample for multiple optical measurements to improve thin film fabrications |
WO2020005203A1 (en) * | 2018-06-25 | 2020-01-02 | Halliburton Energy Services, Inc. | In situ density control during fabrication of thin film materials |
CN109448889A (zh) * | 2018-12-05 | 2019-03-08 | 业成科技(成都)有限公司 | 自修复导电结构及其制备方法 |
CN109900213A (zh) * | 2019-03-18 | 2019-06-18 | 上海智觅智能科技有限公司 | 一种检测防晒霜厚度的传感器电路 |
US11315819B2 (en) | 2020-05-21 | 2022-04-26 | Applied Materials, Inc. | System apparatus and method for enhancing electrical clamping of substrates using photo-illumination |
US11538714B2 (en) * | 2020-05-21 | 2022-12-27 | Applied Materials, Inc. | System apparatus and method for enhancing electrical clamping of substrates using photo-illumination |
CN115516599A (zh) * | 2020-05-21 | 2022-12-23 | 应用材料股份有限公司 | 使用光照射来强化对衬底的电子夹持的系统装置以及方法 |
US11875967B2 (en) | 2020-05-21 | 2024-01-16 | Applied Materials, Inc. | System apparatus and method for enhancing electrical clamping of substrates using photo-illumination |
CN113811106B (zh) * | 2020-06-11 | 2023-06-27 | 维达力科技股份有限公司 | 壳体的制备方法、壳体以及应用 |
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US3542536A (en) * | 1967-09-01 | 1970-11-24 | Hazeltine Research Inc | Method of forming optical waveguide by irradiation of dielectric material |
US4001049A (en) * | 1975-06-11 | 1977-01-04 | International Business Machines Corporation | Method for improving dielectric breakdown strength of insulating-glassy-material layer of a device including ion implantation therein |
US4545646A (en) * | 1983-09-02 | 1985-10-08 | Hughes Aircraft Company | Process for forming a graded index optical material and structures formed thereby |
IT1211939B (it) * | 1987-11-27 | 1989-11-08 | Siv Soc Italiana Vetro | Procedimento per la fabbricazione di vetri con caratteristiche energetiche modificate e prodotto cosi'ottenuto |
US5354575A (en) * | 1993-04-16 | 1994-10-11 | University Of Maryland | Ellipsometric approach to anti-reflection coatings of semiconductor laser amplifiers |
FR2776375B1 (fr) * | 1998-03-18 | 2000-05-12 | Sgs Thomson Microelectronics | Methode de caracterisation d'un processus d'implantation ionique |
US6781692B1 (en) * | 2000-08-28 | 2004-08-24 | Therma-Wave, Inc. | Method of monitoring the fabrication of thin film layers forming a DWDM filter |
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GB2379735A (en) | 2001-09-14 | 2003-03-19 | Qinetiq Ltd | Method and apparatus for controlling the growth of thin film during deposition process by measuring the rate of change of optical thickness of the thin-film |
GB2385677A (en) * | 2002-02-22 | 2003-08-27 | Bookham Technology Plc | Refractive index control of optic waveguide |
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DE10258715B4 (de) * | 2002-12-10 | 2006-12-21 | Carl Zeiss Smt Ag | Verfahren zur Herstellung eines optischen Abbildungssystems |
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JP2006039303A (ja) * | 2004-07-28 | 2006-02-09 | Sumitomo Electric Ind Ltd | 光情報記録媒体およびその記録方法と製造方法 |
KR20070073740A (ko) | 2004-11-04 | 2007-07-10 | 아사히 가라스 가부시키가이샤 | 이온 빔 스퍼터링 장치 및 euv 리소그래피용 반사형마스크 블랭크의 다층막의 막형성 방법 |
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DE102007034289B3 (de) * | 2007-07-20 | 2009-01-29 | Helmholtz-Zentrum Berlin Für Materialien Und Energie Gmbh | Verfahren zur in-situ-Bestimmung der stofflichen Zusammensetzung von optisch dünnen Schichten, Anordnungen zur Durchführung und Anwendungen des Verfahrens |
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MX359718B (es) * | 2013-12-23 | 2018-10-08 | Halliburton Energy Services Inc | Sistemas y metodos para mejorar la fidelidad del espectro optico en elementos informaticos integrados. |
US9395721B2 (en) * | 2013-12-24 | 2016-07-19 | Halliburton Energy Services, Inc. | In-situ monitoring of fabrication of integrated computational elements |
MX359927B (es) * | 2013-12-24 | 2018-10-16 | Halliburton Energy Services Inc | Fabricacion de capas criticas de elementos computacionales integrados. |
WO2015163875A1 (en) | 2014-04-24 | 2015-10-29 | Halliburton Energy Services, Inc. | Engineering the optical properties of an integrated computational element by ion implantation |
MX2016013608A (es) * | 2014-05-08 | 2017-02-02 | Halliburton Energy Services Inc | Modo de transmision/reflexion optica en el control de la velocidad de deposicion in-situ para la fabricacion de elemento informatico integrado (ice). |
MX2016014265A (es) * | 2014-06-30 | 2017-02-06 | Halliburton Energy Services Inc | Sistema y metodo para depositar de elementos informaticos integrados (ice, por su sigla en ingles) utilizando una etapa de traslado. |
-
2014
- 2014-04-24 WO PCT/US2014/035240 patent/WO2015163875A1/en active Application Filing
- 2014-04-24 MX MX2016012398A patent/MX360069B/es active IP Right Grant
- 2014-04-24 EP EP14845029.9A patent/EP2948978A4/en not_active Withdrawn
- 2014-04-24 US US14/428,722 patent/US9905425B2/en not_active Expired - Fee Related
-
2018
- 2018-01-08 US US15/865,143 patent/US20180151368A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US20180151368A1 (en) | 2018-05-31 |
MX360069B (es) | 2018-10-22 |
EP2948978A4 (en) | 2015-12-16 |
WO2015163875A1 (en) | 2015-10-29 |
US20160260612A1 (en) | 2016-09-08 |
US9905425B2 (en) | 2018-02-27 |
EP2948978A1 (en) | 2015-12-02 |
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