MX2011003339A - Evaporador para materiales organicos. - Google Patents

Evaporador para materiales organicos.

Info

Publication number
MX2011003339A
MX2011003339A MX2011003339A MX2011003339A MX2011003339A MX 2011003339 A MX2011003339 A MX 2011003339A MX 2011003339 A MX2011003339 A MX 2011003339A MX 2011003339 A MX2011003339 A MX 2011003339A MX 2011003339 A MX2011003339 A MX 2011003339A
Authority
MX
Mexico
Prior art keywords
chamber
organic material
nozzle
melamine
substrate
Prior art date
Application number
MX2011003339A
Other languages
English (en)
Spanish (es)
Inventor
Stefan Hein
Gerd Hoffmann
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of MX2011003339A publication Critical patent/MX2011003339A/es

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01B—BOILING; BOILING APPARATUS ; EVAPORATION; EVAPORATION APPARATUS
    • B01B1/00—Boiling; Boiling apparatus for physical or chemical purposes ; Evaporation in general
    • B01B1/005—Evaporation for physical or chemical purposes; Evaporation apparatus therefor, e.g. evaporation of liquids for gas phase reactions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/60—Deposition of organic layers from vapour phase
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2252/00—Sheets
    • B05D2252/02—Sheets of indefinite length
MX2011003339A 2008-09-29 2009-09-29 Evaporador para materiales organicos. MX2011003339A (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP08165434A EP2168643A1 (fr) 2008-09-29 2008-09-29 Évaporateur pour matériaux organiques
PCT/IB2009/006990 WO2010035130A2 (fr) 2008-09-29 2009-09-29 Évaporateur pour matériaux organiques

Publications (1)

Publication Number Publication Date
MX2011003339A true MX2011003339A (es) 2011-08-03

Family

ID=40640318

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2011003339A MX2011003339A (es) 2008-09-29 2009-09-29 Evaporador para materiales organicos.

Country Status (8)

Country Link
US (1) US20100080901A1 (fr)
EP (1) EP2168643A1 (fr)
JP (1) JP5703224B2 (fr)
CN (1) CN102165091B (fr)
MX (1) MX2011003339A (fr)
RU (1) RU2524521C2 (fr)
TW (1) TWI467040B (fr)
WO (1) WO2010035130A2 (fr)

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JP5179739B2 (ja) * 2006-09-27 2013-04-10 東京エレクトロン株式会社 蒸着装置、蒸着装置の制御装置、蒸着装置の制御方法および蒸着装置の使用方法
US9093646B2 (en) 2010-12-14 2015-07-28 Sharp Kabushiki Kaisha Vapor deposition method and method for manufacturing organic electroluminescent display device
JP5410618B2 (ja) * 2010-12-21 2014-02-05 シャープ株式会社 蒸着装置、蒸着方法、並びに、有機エレクトロルミネッセンス表示装置の製造方法
JP5330608B2 (ja) 2010-12-24 2013-10-30 シャープ株式会社 蒸着装置、蒸着方法、並びに、有機エレクトロルミネッセンス表示装置の製造方法
JP5367195B2 (ja) * 2011-03-15 2013-12-11 シャープ株式会社 蒸着装置、蒸着方法、及び有機ｅｌ表示装置の製造方法
JP2013100581A (ja) * 2011-11-09 2013-05-23 Ulvac Japan Ltd 蒸着装置及び蒸着方法
EP2746423B1 (fr) * 2012-12-20 2019-12-18 Applied Materials, Inc. Système de dépôt, appareil de dépôt et procédé de fonctionnement
US20150079283A1 (en) * 2013-09-13 2015-03-19 LGS Innovations LLC Apparatus and method to deposit doped films
FR3024162A1 (fr) * 2014-07-28 2016-01-29 Nexcis Dispositif et procede pour la formation d'une couche mince sur un substrat
CN107217233A (zh) * 2017-04-24 2017-09-29 无锡市司马特贸易有限公司 聚合物真空镀膜机
US11946131B2 (en) * 2017-05-26 2024-04-02 Universal Display Corporation Sublimation cell with time stability of output vapor pressure
KR20200057028A (ko) * 2017-09-20 2020-05-25 어플라이드 머티어리얼스, 인코포레이티드 기판 상의 세라믹 층의 두께를 제어하기 위한 방법 및 처리 시스템
WO2020082282A1 (fr) * 2018-10-25 2020-04-30 China Triumph International Engineering Co., Ltd. Appareil de dépôt en phase vapeur et utilisation de celui-ci
KR20220067947A (ko) * 2020-11-18 2022-05-25 주식회사 엘지화학 유기발광다이오드의 증착장치
CN116964240A (zh) * 2021-02-16 2023-10-27 应用材料公司 坩埚、蒸发源、蒸发方法、蒸发系统和制造装置的方法

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Publication number Priority date Publication date Assignee Title
EP0147536B1 (fr) * 1983-10-07 1990-02-07 Johannes Zimmer Appareil pour étendre régulièrement un écoulement liquide sur une largeur donnée
GB8708436D0 (en) * 1987-04-08 1987-05-13 British Telecomm Reagent source
RU2031187C1 (ru) * 1991-06-06 1995-03-20 Индивидуальное частное предприятие "Электрон-Вега" Испаритель
RU2051200C1 (ru) * 1991-10-01 1995-12-27 Владимир Григорьевич Белов Устройство для нанесения полимерных пленок в вакууме
EP0962260B1 (fr) * 1998-05-28 2005-01-05 Ulvac, Inc. Système d'évaporation de produit organique
EP1482067B1 (fr) 1998-05-28 2007-04-11 Ulvac, Inc. Appareil d'évaporation sous vide
US6275649B1 (en) 1998-06-01 2001-08-14 Nihon Shinku Gijutsu Kabushiki Kaisha Evaporation apparatus
US6503564B1 (en) 1999-02-26 2003-01-07 3M Innovative Properties Company Method of coating microstructured substrates with polymeric layer(s), allowing preservation of surface feature profile
JP4599727B2 (ja) * 2001-02-21 2010-12-15 株式会社デンソー 蒸着装置
ITMI20011216A1 (it) * 2001-06-08 2002-12-08 Eurotecnica Dev And Licensing Procedimento migliorato per la produzione con alte rese di melanina
US7112351B2 (en) 2002-02-26 2006-09-26 Sion Power Corporation Methods and apparatus for vacuum thin film deposition
JP2004055401A (ja) * 2002-07-22 2004-02-19 Sony Corp 有機膜形成装置
US7192486B2 (en) * 2002-08-15 2007-03-20 Applied Materials, Inc. Clog-resistant gas delivery system
JP4041005B2 (ja) * 2003-04-02 2008-01-30 長州産業株式会社 薄膜堆積用分子線源とそれを使用した薄膜堆積方法
US20050271893A1 (en) * 2004-06-04 2005-12-08 Applied Microstructures, Inc. Controlled vapor deposition of multilayered coatings adhered by an oxide layer
DE10330401B3 (de) * 2003-07-04 2005-02-24 Applied Films Gmbh & Co. Kg Verfahren und Vorrichtung zum bereichsweisen Auftragen von Trennmitteln
US7288286B2 (en) * 2004-09-21 2007-10-30 Eastman Kodak Company Delivering organic powder to a vaporization zone
KR100958778B1 (ko) * 2004-10-22 2010-05-18 황창훈 유기 박막 증착 공정용 증발원 연속 공급장치
US7431807B2 (en) * 2005-01-07 2008-10-07 Universal Display Corporation Evaporation method using infrared guiding heater
JP5179739B2 (ja) * 2006-09-27 2013-04-10 東京エレクトロン株式会社 蒸着装置、蒸着装置の制御装置、蒸着装置の制御方法および蒸着装置の使用方法
JP5506147B2 (ja) * 2007-10-18 2014-05-28 キヤノン株式会社 成膜装置及び成膜方法
JP2009228091A (ja) * 2008-03-25 2009-10-08 Canon Inc 蒸着装置

Also Published As

Publication number Publication date
CN102165091A (zh) 2011-08-24
RU2524521C2 (ru) 2014-07-27
JP5703224B2 (ja) 2015-04-15
EP2168643A1 (fr) 2010-03-31
TW201020330A (en) 2010-06-01
US20100080901A1 (en) 2010-04-01
WO2010035130A2 (fr) 2010-04-01
RU2011116917A (ru) 2012-11-10
TWI467040B (zh) 2015-01-01
CN102165091B (zh) 2013-08-14
WO2010035130A3 (fr) 2010-06-17
JP2012504188A (ja) 2012-02-16

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