MD4882B1 - Procedee de obţinere a ţintelor ceramice şi a straturilor subţiri de ZnO:Ga:Cl la temperaturi scăzute - Google Patents
Procedee de obţinere a ţintelor ceramice şi a straturilor subţiri de ZnO:Ga:Cl la temperaturi scăzute Download PDFInfo
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- MD4882B1 MD4882B1 MDA20200024A MD20200024A MD4882B1 MD 4882 B1 MD4882 B1 MD 4882B1 MD A20200024 A MDA20200024 A MD A20200024A MD 20200024 A MD20200024 A MD 20200024A MD 4882 B1 MD4882 B1 MD 4882B1
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Abstract
Invenţia se referă la procedeele de obţinere a materialelor semiconductoare şi poate fi utilizată în tehnologia semiconductoarelor.Procedeul de obţinere a ţintelor ceramice de ZnO:Ga:Cl la temperaturi scăzute constă în sinterizarea pulberilor de ZnO şi Ga2O3 într-un volum închis la temperatura de 900…1150°C. Sinterizarea se efectuează prin reacţii chimice de transport, utilizând HCl în calitate de agent de transport, cu presiunea iniţială de 0,101…0,608 MPa, totodată suplimentar se utilizează pulberi de Ga2O3 cu concentraţia de 1…5 mol% şi mărimea granulelor nu mai mare de 300 µm pentru obţinerea ţintelor ceramice de ZnO:Ga:Cl, impurităţile de Cl având concentraţia de 1·1018…5·1019 cm-3.Procedeul de obţinere a straturilor subţiri de ceramică de ZnO:Ga:Cl la temperaturi scăzute constă în vacuumarea camerei magnetronului până la presiunea de 133,32÷666,61·10-5 Pa, injectarea gazului Ar cu presiunea de 0,00013÷0,0013 MPa, pulverizarea magnetron la temperatura de depunere de 80…300°C a ţintelor ceramice de ZnO:Ga:Cl obţinute prin procedeul descris mai sus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MDA20200024A MD4882C1 (ro) | 2020-03-27 | 2020-03-27 | Procedee de obţinere a ţintelor ceramice şi a straturilor subţiri de ZnO:Ga:Cl la temperaturi scăzute |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MDA20200024A MD4882C1 (ro) | 2020-03-27 | 2020-03-27 | Procedee de obţinere a ţintelor ceramice şi a straturilor subţiri de ZnO:Ga:Cl la temperaturi scăzute |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| MD20200024A2 MD20200024A2 (ro) | 2021-09-30 |
| MD4882B1 true MD4882B1 (ro) | 2024-01-31 |
| MD4882C1 MD4882C1 (ro) | 2024-08-31 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MDA20200024A MD4882C1 (ro) | 2020-03-27 | 2020-03-27 | Procedee de obţinere a ţintelor ceramice şi a straturilor subţiri de ZnO:Ga:Cl la temperaturi scăzute |
Country Status (1)
| Country | Link |
|---|---|
| MD (1) | MD4882C1 (ro) |
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2020
- 2020-03-27 MD MDA20200024A patent/MD4882C1/ro not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| MD20200024A2 (ro) | 2021-09-30 |
| MD4882C1 (ro) | 2024-08-31 |
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| FG4A | Patent for invention issued | ||
| KA4A | Patent for invention lapsed due to non-payment of fees (with right of restoration) |