MD2714G2 - Process for obtaining porous semiconductor structures - Google Patents
Process for obtaining porous semiconductor structuresInfo
- Publication number
- MD2714G2 MD2714G2 MDA20040250A MD20040250A MD2714G2 MD 2714 G2 MD2714 G2 MD 2714G2 MD A20040250 A MDA20040250 A MD A20040250A MD 20040250 A MD20040250 A MD 20040250A MD 2714 G2 MD2714 G2 MD 2714G2
- Authority
- MD
- Moldova
- Prior art keywords
- semiconductor structures
- porous semiconductor
- onto
- semiconductor
- obtaining
- Prior art date
Links
Landscapes
- Drying Of Semiconductors (AREA)
Abstract
The invention relates to semiconductor production technology, in particular to the obtaining of porous semiconductor structures.The process for obtaining porous semiconductor structures consists in that onto the semiconductor surface there is applied a mask, onto the uncovered regions there are implanted high-energy ions, then the mask is removed and the semiconductor surface is subjected to the electrochemical pickling. Novelty consists in that before pickling onto the semiconductor surface there is applied a layer of photoresist material.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
MDA20040250A MD2714G2 (en) | 2004-10-19 | 2004-10-19 | Process for obtaining porous semiconductor structures |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
MDA20040250A MD2714G2 (en) | 2004-10-19 | 2004-10-19 | Process for obtaining porous semiconductor structures |
Publications (2)
Publication Number | Publication Date |
---|---|
MD2714F1 MD2714F1 (en) | 2005-02-28 |
MD2714G2 true MD2714G2 (en) | 2005-10-31 |
Family
ID=34374323
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MDA20040250A MD2714G2 (en) | 2004-10-19 | 2004-10-19 | Process for obtaining porous semiconductor structures |
Country Status (1)
Country | Link |
---|---|
MD (1) | MD2714G2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
MD3811G2 (en) * | 2007-11-06 | 2009-08-31 | Институт Прикладной Физики Академии Наук Молдовы | Process for obtaining semiconductor nanostructural zones |
MD152Z (en) * | 2009-03-10 | 2010-09-30 | Институт Прикладной Физики Академии Наук Молдовы | Process for the formation of a three-dimensional microstructure |
MD193Z (en) * | 2009-06-04 | 2010-11-30 | Институт Прикладной Физики Академии Наук Молдовы | Process for the obtaining of polysulphide film |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6277662B1 (en) * | 1999-06-03 | 2001-08-21 | Seiichi Nagata | Silicon substrate and forming method thereof |
US6476409B2 (en) * | 1999-04-27 | 2002-11-05 | Canon Kabushiki Kaisha | Nano-structures, process for preparing nano-structures and devices |
MD2536G2 (en) * | 2004-04-28 | 2005-03-31 | Ион ТИГИНЯНУ | Process for obtaining porous semiconductor structures |
-
2004
- 2004-10-19 MD MDA20040250A patent/MD2714G2/en not_active IP Right Cessation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6476409B2 (en) * | 1999-04-27 | 2002-11-05 | Canon Kabushiki Kaisha | Nano-structures, process for preparing nano-structures and devices |
US6277662B1 (en) * | 1999-06-03 | 2001-08-21 | Seiichi Nagata | Silicon substrate and forming method thereof |
MD2536G2 (en) * | 2004-04-28 | 2005-03-31 | Ион ТИГИНЯНУ | Process for obtaining porous semiconductor structures |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
MD3811G2 (en) * | 2007-11-06 | 2009-08-31 | Институт Прикладной Физики Академии Наук Молдовы | Process for obtaining semiconductor nanostructural zones |
MD152Z (en) * | 2009-03-10 | 2010-09-30 | Институт Прикладной Физики Академии Наук Молдовы | Process for the formation of a three-dimensional microstructure |
MD193Z (en) * | 2009-06-04 | 2010-11-30 | Институт Прикладной Физики Академии Наук Молдовы | Process for the obtaining of polysulphide film |
Also Published As
Publication number | Publication date |
---|---|
MD2714F1 (en) | 2005-02-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
KA4A | Patent for invention lapsed due to non-payment of fees (with right of restoration) | ||
MM4A | Patent for invention definitely lapsed due to non-payment of fees |