MD152Z - Process for the formation of a three-dimensional microstructure - Google Patents
Process for the formation of a three-dimensional microstructureInfo
- Publication number
- MD152Z MD152Z MDS20090031A MDS20090031A MD152Z MD 152 Z MD152 Z MD 152Z MD S20090031 A MDS20090031 A MD S20090031A MD S20090031 A MDS20090031 A MD S20090031A MD 152 Z MD152 Z MD 152Z
- Authority
- MD
- Moldova
- Prior art keywords
- formation
- dimensional microstructure
- sectors
- microindentation
- microelectronics
- Prior art date
Links
Landscapes
- Photovoltaic Devices (AREA)
Abstract
The invention relates to a process for the formation of a three-dimensional microstructure by modifying according to the given image the properties of the initial billet substance in the worked sectors and may be used in microelectronics for the manufacture of solar cells, hold facilities.The process for the formation of a three-dimensional microstructure includes deposition on a Si support of a working substance layer with ITO composite structure and processing of the obtained structure by microindentation with loads within the limits 0.01…0.50 N with subsequent removal of deformed sectors by means of chemical etching with concentrated hydrofluoric acid.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
MDS20090031A MD152Z (en) | 2009-03-10 | 2009-03-10 | Process for the formation of a three-dimensional microstructure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
MDS20090031A MD152Z (en) | 2009-03-10 | 2009-03-10 | Process for the formation of a three-dimensional microstructure |
Publications (2)
Publication Number | Publication Date |
---|---|
MD152Y MD152Y (en) | 2010-02-26 |
MD152Z true MD152Z (en) | 2010-09-30 |
Family
ID=43568922
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MDS20090031A MD152Z (en) | 2009-03-10 | 2009-03-10 | Process for the formation of a three-dimensional microstructure |
Country Status (1)
Country | Link |
---|---|
MD (1) | MD152Z (en) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2129320C1 (en) * | 1998-05-22 | 1999-04-20 | Гурович Борис Аронович | Conducting structure forming process |
RU2193080C2 (en) * | 2000-04-05 | 2002-11-20 | Объединенный Институт Ядерных Исследований | Method of ion doping of solid bodies |
RU2243613C1 (en) * | 2003-07-16 | 2004-12-27 | Гурович Борис Аронович | Method for bulk structure production |
MD2556G2 (en) * | 2004-06-01 | 2005-03-31 | Ион ТИГИНЯНУ | Process for semiconductor nanostructures obtaining |
MD2714G2 (en) * | 2004-10-19 | 2005-10-31 | Ион ТИГИНЯНУ | Process for obtaining porous semiconductor structures |
RU2302054C1 (en) * | 2006-02-16 | 2007-06-27 | Борис Аронович Гурович | Method for producing spatial three-dimensional structure |
-
2009
- 2009-03-10 MD MDS20090031A patent/MD152Z/en not_active IP Right Cessation
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2129320C1 (en) * | 1998-05-22 | 1999-04-20 | Гурович Борис Аронович | Conducting structure forming process |
RU2193080C2 (en) * | 2000-04-05 | 2002-11-20 | Объединенный Институт Ядерных Исследований | Method of ion doping of solid bodies |
RU2243613C1 (en) * | 2003-07-16 | 2004-12-27 | Гурович Борис Аронович | Method for bulk structure production |
MD2556G2 (en) * | 2004-06-01 | 2005-03-31 | Ион ТИГИНЯНУ | Process for semiconductor nanostructures obtaining |
MD2714G2 (en) * | 2004-10-19 | 2005-10-31 | Ион ТИГИНЯНУ | Process for obtaining porous semiconductor structures |
RU2302054C1 (en) * | 2006-02-16 | 2007-06-27 | Борис Аронович Гурович | Method for producing spatial three-dimensional structure |
Also Published As
Publication number | Publication date |
---|---|
MD152Y (en) | 2010-02-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
KA4Y | Short-term patent lapsed due to non-payment of fees (with right of restoration) |