MD152Z - Process for the formation of a three-dimensional microstructure - Google Patents

Process for the formation of a three-dimensional microstructure Download PDF

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Publication number
MD152Z
MD152Z MDS20090031A MDS20090031A MD152Z MD 152 Z MD152 Z MD 152Z MD S20090031 A MDS20090031 A MD S20090031A MD S20090031 A MDS20090031 A MD S20090031A MD 152 Z MD152 Z MD 152Z
Authority
MD
Moldova
Prior art keywords
formation
dimensional microstructure
sectors
microindentation
microelectronics
Prior art date
Application number
MDS20090031A
Other languages
Romanian (ro)
Russian (ru)
Inventor
Евгений ХАРЯ
Дарья ГРАБКО
Ольга ШИКИМАКА
Дормидонт ШЕРБАН
Original Assignee
Институт Прикладной Физики Академии Наук Молдовы
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Институт Прикладной Физики Академии Наук Молдовы filed Critical Институт Прикладной Физики Академии Наук Молдовы
Priority to MDS20090031A priority Critical patent/MD152Z/en
Publication of MD152Y publication Critical patent/MD152Y/en
Publication of MD152Z publication Critical patent/MD152Z/en

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  • Photovoltaic Devices (AREA)

Abstract

The invention relates to a process for the formation of a three-dimensional microstructure by modifying according to the given image the properties of the initial billet substance in the worked sectors and may be used in microelectronics for the manufacture of solar cells, hold facilities.The process for the formation of a three-dimensional microstructure includes deposition on a Si support of a working substance layer with ITO composite structure and processing of the obtained structure by microindentation with loads within the limits 0.01…0.50 N with subsequent removal of deformed sectors by means of chemical etching with concentrated hydrofluoric acid.
MDS20090031A 2009-03-10 2009-03-10 Process for the formation of a three-dimensional microstructure MD152Z (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MDS20090031A MD152Z (en) 2009-03-10 2009-03-10 Process for the formation of a three-dimensional microstructure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MDS20090031A MD152Z (en) 2009-03-10 2009-03-10 Process for the formation of a three-dimensional microstructure

Publications (2)

Publication Number Publication Date
MD152Y MD152Y (en) 2010-02-26
MD152Z true MD152Z (en) 2010-09-30

Family

ID=43568922

Family Applications (1)

Application Number Title Priority Date Filing Date
MDS20090031A MD152Z (en) 2009-03-10 2009-03-10 Process for the formation of a three-dimensional microstructure

Country Status (1)

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MD (1) MD152Z (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2129320C1 (en) * 1998-05-22 1999-04-20 Гурович Борис Аронович Conducting structure forming process
RU2193080C2 (en) * 2000-04-05 2002-11-20 Объединенный Институт Ядерных Исследований Method of ion doping of solid bodies
RU2243613C1 (en) * 2003-07-16 2004-12-27 Гурович Борис Аронович Method for bulk structure production
MD2556G2 (en) * 2004-06-01 2005-03-31 Ион ТИГИНЯНУ Process for semiconductor nanostructures obtaining
MD2714G2 (en) * 2004-10-19 2005-10-31 Ион ТИГИНЯНУ Process for obtaining porous semiconductor structures
RU2302054C1 (en) * 2006-02-16 2007-06-27 Борис Аронович Гурович Method for producing spatial three-dimensional structure
  • 2009

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2129320C1 (en) * 1998-05-22 1999-04-20 Гурович Борис Аронович Conducting structure forming process
RU2193080C2 (en) * 2000-04-05 2002-11-20 Объединенный Институт Ядерных Исследований Method of ion doping of solid bodies
RU2243613C1 (en) * 2003-07-16 2004-12-27 Гурович Борис Аронович Method for bulk structure production
MD2556G2 (en) * 2004-06-01 2005-03-31 Ион ТИГИНЯНУ Process for semiconductor nanostructures obtaining
MD2714G2 (en) * 2004-10-19 2005-10-31 Ион ТИГИНЯНУ Process for obtaining porous semiconductor structures
RU2302054C1 (en) * 2006-02-16 2007-06-27 Борис Аронович Гурович Method for producing spatial three-dimensional structure

Also Published As

Publication number Publication date
MD152Y (en) 2010-02-26

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Legal Events

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KA4Y Short-term patent lapsed due to non-payment of fees (with right of restoration)