MD2245G2 - Procedeu de obţinere a straturilor subţiri de semiconductori oxidici - Google Patents
Procedeu de obţinere a straturilor subţiri de semiconductori oxidici Download PDFInfo
- Publication number
- MD2245G2 MD2245G2 MDA20030019A MD20030019A MD2245G2 MD 2245 G2 MD2245 G2 MD 2245G2 MD A20030019 A MDA20030019 A MD A20030019A MD 20030019 A MD20030019 A MD 20030019A MD 2245 G2 MD2245 G2 MD 2245G2
- Authority
- MD
- Moldova
- Prior art keywords
- thin layers
- obtaining
- onto
- semiconductor
- pulverization
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title abstract 5
- 238000000034 method Methods 0.000 title abstract 2
- 238000010298 pulverizing process Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 239000007900 aqueous suspension Substances 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- 230000003301 hydrolyzing effect Effects 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000000725 suspension Substances 0.000 abstract 1
Landscapes
- Oxygen, Ozone, And Oxides In General (AREA)
Abstract
Invenţia se referă la domeniul fizicii semiconductoare şi poate fi utilizată la obţinerea straturilor subţiri semiconductoare, în particular a straturilor subţiri ale semiconductorilor oxidici.Esenţa invenţiei constă în faptul că procedeul include obţinerea în prealabil a suspensiei de oxid semiconductor pe cale hidrolitică şi pulverizarea ei pe un substrat încălzit. Pulverizarea se realizează în interiorul cuptorului electric, utilizând oxigenul ca gaz dispersant, totodată depunerea suspensiei se realizează pe substratul situat pe un suport rotativ, în condiţiile evacuării aerului din interiorul cuptorului.Rezultatul invenţiei constă în obţinerea straturilor subţiri uniforme ca grosime cu parametri electrici şi optici identici pe toată suprafaţa.Figuri.: 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MDA20030019A MD2245G2 (ro) | 2003-01-21 | 2003-01-21 | Procedeu de obţinere a straturilor subţiri de semiconductori oxidici |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MDA20030019A MD2245G2 (ro) | 2003-01-21 | 2003-01-21 | Procedeu de obţinere a straturilor subţiri de semiconductori oxidici |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| MD2245F1 MD2245F1 (ro) | 2003-08-31 |
| MD2245G2 true MD2245G2 (ro) | 2004-02-29 |
Family
ID=29268035
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MDA20030019A MD2245G2 (ro) | 2003-01-21 | 2003-01-21 | Procedeu de obţinere a straturilor subţiri de semiconductori oxidici |
Country Status (1)
| Country | Link |
|---|---|
| MD (1) | MD2245G2 (ro) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| MD193Z (ro) * | 2009-06-04 | 2010-11-30 | Институт Прикладной Физики Академии Наук Молдовы | Procedeu de obţinere a peliculei polisulfidice |
-
2003
- 2003-01-21 MD MDA20030019A patent/MD2245G2/ro not_active IP Right Cessation
Non-Patent Citations (3)
| Title |
|---|
| S.M. Rossnagel. Depozition and redeposition in magnetrons. J. Vac. Sci. Tehcnology, A 6, 1988, p.3055 * |
| W. Badawy, F. Decker, K. Doblhofer. Preparation and properties of Si/SnO2 heterojunctions. Solar Energy Materials, 8, 1983, p. 363-369 * |
| W. Badawy, F. Decker, K. Doblhofer. Preparation and properties of Si/SnO2 heterojunctions. Solar Energy Materials, 8, 1983, p. 363-369. * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| MD193Z (ro) * | 2009-06-04 | 2010-11-30 | Институт Прикладной Физики Академии Наук Молдовы | Procedeu de obţinere a peliculei polisulfidice |
Also Published As
| Publication number | Publication date |
|---|---|
| MD2245F1 (ro) | 2003-08-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| KA4A | Patent for invention lapsed due to non-payment of fees (with right of restoration) | ||
| MM4A | Patent for invention definitely lapsed due to non-payment of fees |