MD1678Z - Низкотемпературный способ получения керамики ZnO:Al - Google Patents
Низкотемпературный способ получения керамики ZnO:Al Download PDFInfo
- Publication number
- MD1678Z MD1678Z MDS20220027A MDS20220027A MD1678Z MD 1678 Z MD1678 Z MD 1678Z MD S20220027 A MDS20220027 A MD S20220027A MD S20220027 A MDS20220027 A MD S20220027A MD 1678 Z MD1678 Z MD 1678Z
- Authority
- MD
- Moldova
- Prior art keywords
- zno
- ceramics
- sintering
- temperature
- ceramic
- Prior art date
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- 239000000919 ceramic Substances 0.000 title claims abstract description 43
- 238000000034 method Methods 0.000 title claims abstract description 16
- 238000005245 sintering Methods 0.000 claims abstract description 24
- 239000000843 powder Substances 0.000 claims abstract description 12
- 238000006243 chemical reaction Methods 0.000 claims abstract description 8
- 239000000126 substance Substances 0.000 claims abstract description 8
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 abstract description 9
- 238000005516 engineering process Methods 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 79
- 239000011787 zinc oxide Substances 0.000 description 39
- 239000012535 impurity Substances 0.000 description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 7
- 239000001301 oxygen Substances 0.000 description 7
- 229910052760 oxygen Inorganic materials 0.000 description 7
- 238000001755 magnetron sputter deposition Methods 0.000 description 6
- 239000010453 quartz Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 5
- 229910052593 corundum Inorganic materials 0.000 description 5
- 229910001845 yogo sapphire Inorganic materials 0.000 description 5
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- QZQVBEXLDFYHSR-UHFFFAOYSA-N gallium(III) oxide Inorganic materials O=[Ga]O[Ga]=O QZQVBEXLDFYHSR-UHFFFAOYSA-N 0.000 description 3
- 239000011858 nanopowder Substances 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000001143 conditioned effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 238000009766 low-temperature sintering Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- PXXKQOPKNFECSZ-UHFFFAOYSA-N platinum rhodium Chemical compound [Rh].[Pt] PXXKQOPKNFECSZ-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Abstract
Изобретение относится к способам получения полупроводниковых материалов и может быть использовано в полупроводниковой технологии.Низкотемпературный способ получения керамики ZnO:Al заключается в спекании порошков ZnO и Al в колличестве 0,5-6 ат.% путем химической транспортной реакции в замкнутом объеме при температуре 900-1150°C, в течение 24-72 часов, в качестве транспортного агента используют HCl с начальным давлением 0,1-6 атм.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MDS20220027A MD1678Z (ru) | 2022-04-13 | 2022-04-13 | Низкотемпературный способ получения керамики ZnO:Al |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MDS20220027A MD1678Z (ru) | 2022-04-13 | 2022-04-13 | Низкотемпературный способ получения керамики ZnO:Al |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| MD1678Y MD1678Y (ru) | 2023-03-31 |
| MD1678Z true MD1678Z (ru) | 2023-10-31 |
Family
ID=85792835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MDS20220027A MD1678Z (ru) | 2022-04-13 | 2022-04-13 | Низкотемпературный способ получения керамики ZnO:Al |
Country Status (1)
| Country | Link |
|---|---|
| MD (1) | MD1678Z (ru) |
-
2022
- 2022-04-13 MD MDS20220027A patent/MD1678Z/ru active IP Right Grant
Also Published As
| Publication number | Publication date |
|---|---|
| MD1678Y (ru) | 2023-03-31 |
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| FG9Y | Short term patent issued |